| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 09/07/2006 | DE102006009718A1 Sensorvorrichtung Sensor device |
| 08/31/2006 | CA2804076A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2804066A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803901A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803899A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803823A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803788A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2803781A1 Methods and apparatus for spatial light modulation |
| 08/24/2006 | WO2006088214A1 Mictoactuator using bundled actin filaments |
| 08/24/2006 | WO2006088120A1 Flow adjusting device, micro-reactor and use thereof |
| 08/16/2006 | CA2536722A1 Articulated mems structures |
| 08/10/2006 | WO2006057797A3 Switch structures or the like based on a thermoresponsive polymer |
| 08/08/2006 | US7088019 Air bearing for MEMS based motor |
| 08/01/2006 | US7085122 MEMS tunable capacitor based on angular vertical comb drives |
| 07/05/2006 | EP1677118A1 Micromachined accelerometer with capacitive combs |
| 06/21/2006 | CN1260796C Side welding method for flip-chip semiconductor device |
| 06/20/2006 | US7064879 Magnetically actuated microelectrochemical systems actuator |
| 06/08/2006 | WO2006059391A1 Slide material, process for producing the same and apparatus utilizing the slide material |
| 06/08/2006 | WO2006058516A1 Device for gap adjustment |
| 06/08/2006 | US20060119217 Micro-mirror with rotor structure |
| 06/01/2006 | WO2006057797A2 Switch structures or the like based on a thermoresponsive polymer |
| 05/31/2006 | EP1272888B1 Magnetically actuated microelectromechanical systems actuator |
| 05/31/2006 | CN1779436A Coaxial-illuminating microscope otpical system for atomic force microscope |
| 05/30/2006 | US7052653 Microsize driving device and method for preparation thereof |
| 05/23/2006 | US7049904 Seesaw-type MEMS switch and method for manufacturing the same |
| 05/16/2006 | US7045371 Foreign material removing method for capacitance type dynamic quantity sensor |
| 05/10/2006 | CN1771575A Micro relay |
| 05/10/2006 | CN1769159A Large range continuous driving microelectromechanical component and its driving method |
| 04/26/2006 | CN1762786A System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
| 04/20/2006 | WO2006040403A1 Sensor and method for measuring a variable affecting a capacitive component |
| 04/18/2006 | US7031041 Micro-oscillating element provided with torsion bar |
| 04/06/2006 | US20060072224 Magnetically actuated microelectromechanical systems actuator |
| 04/05/2006 | EP1642962A1 Nanostructured surface for microparticle analysis and manipulation |
| 04/05/2006 | CN1755417A Method and system for detecting leak in electronic devices |
| 04/05/2006 | CN1249398C Method for measuring tunnelling current between elongate conductors |
| 04/04/2006 | US7022245 Fabrication of a reflective spatial light modulator |
| 03/29/2006 | EP1640765A2 Conductive bus structure for interferometric modulator array |
| 03/28/2006 | US7019876 Micro-mirror with rotor structure |
| 03/16/2006 | DE102004038166A1 Micromechanical sensor, has fixed and movable micromechanical parts with surfaces that are arranged together, and evaluating processor unit for finding actuating force of actuator, where surfaces are removed from each other by actuator |
| 03/15/2006 | EP1635160A2 Nanostepper/sensor systems and methods of use thereof |
| 03/09/2006 | US20060051214 Micro liquid handling device and methods for using it |
| 03/08/2006 | CN1244489C Method for manufacturing a housing for a chip having a micromechanical structure |
| 03/02/2006 | WO2006021613A1 Liquid filled micro-mechanical actuator |
| 03/02/2006 | WO2006021612A1 Micro mechanical clutch and a component integrated thereto |
| 02/22/2006 | CN1736850A Mobile microstructure cosupported by silicon and silicon dioxide, and its production method |
| 02/15/2006 | CN1733592A Flexible electric heat driven micro pliers |
| 02/02/2006 | DE102005031408A1 Sensor für eine physikalische Grösse, sowie Verfahren zu dessen Herstellung Sensor for a physical quantity, and methods for its preparation |
| 02/01/2006 | EP1620352A2 Multi-stable micro electromechanical switches and methods of fabricating same |
| 02/01/2006 | CN1729136A Miniature relay and corresponding uses thereof |
| 01/26/2006 | WO2006009216A1 Light pressur rotator and light pressur rotating device |
| 01/26/2006 | DE19960949B4 Mikromotor zur Erzeugung einer schrittweisen Bewegung von Mikrobauteilen Micro motor for generating a gradual movement of micro-components |
| 01/25/2006 | CN1726348A Valve unit and fluid control chip |
| 01/18/2006 | CN1721319A Spacer fabrication process for manufacturing reflective stealth mirrors and other mems devices |
| 01/18/2006 | CN1721318A Method and system for reducing operational shock sensitivity of MEMS devices |
| 01/11/2006 | CN1719600A Method for producing heat pipes |
| 01/11/2006 | CN1719568A Quantum micro-switch of using vacuum 'zero energy' to drive |
| 01/11/2006 | CN1718531A Quantum minitype propeller using vacuum |
| 01/03/2006 | US6981687 Bubble-actuated valve with latching |
| 12/21/2005 | CN1232437C Method of air tight packaging micro electromechanical system device using capillary tube method |
| 12/14/2005 | EP1605487A1 Micro relay |
| 12/07/2005 | CN1704329A Electrothermal-driven flexile micro-gripper |
| 12/07/2005 | CN1230702C Optical switch |
| 12/01/2005 | DE102004022060A1 Conveyor unit for transporting of goods has top surface of carrying surface provided with micro-mechanical elements which for transporting of goods along conveyor unit execute controlled micro-movements |
| 11/23/2005 | CN1699140A Electro-thermal actuated and flexible hinged support lever type polysillicon microgripper |
| 11/17/2005 | US20050252293 Magnetic MEMS device and method of forming thereof |
| 11/16/2005 | EP1596240A2 Magnetically actuated microelectromechanical systems actuator |
| 11/16/2005 | EP1596203A1 Magnetic micro-electromechanical sytem (MEMS) sensor and method for its manufacture |
| 11/03/2005 | US20050241394 Self-stabilizing, floating microelectromechanical device |
| 10/26/2005 | CN1686780A Single piece of pneumatic gelatious tiny valve |
| 10/19/2005 | CN1683233A Stepping omnibearing nano moving platform |
| 10/13/2005 | DE10359689B4 Biegemodus-Flüssigmetallschalter Bending mode liquid metal switch |
| 10/13/2005 | DE102005011658A1 Halbleiteranordnung mit einem beweglichen Teil A semiconductor device comprising a movable part |
| 10/11/2005 | US6952965 Vertical MEMS gyroscope by horizontal driving |
| 10/06/2005 | US20050219017 Electrostatic actuator |
| 09/29/2005 | US20050214110 Method of driving and drive mechanism utilizing surface tension difference convection generated in two fluids having an interface |
| 09/29/2005 | US20050211505 Nanostructured liquid bearing |
| 09/29/2005 | DE102005010940A1 Elektrostatisch in Schwingungen versetzte Anordnung Electrostatic oscillations in staggered arrangement |
| 09/28/2005 | EP1580528A1 Nanostructured liquid bearing |
| 09/28/2005 | CN1673665A Measurements using tunnelling current between elongate conductors |
| 09/28/2005 | CN1673067A Positioning device for microscopic motion |
| 09/27/2005 | US6948245 Gear and method of making the same |
| 09/22/2005 | US20050205949 Semiconductor device having moving part |
| 09/20/2005 | US6946775 Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
| 09/15/2005 | US20050199063 Electrostatically oscillated device |
| 09/14/2005 | EP1574282A2 Positioning device for microscopic motion |
| 09/07/2005 | CN1665013A Mems压力传感器芯片级老化装置 Mems pressure sensor chip level burn-in apparatus |
| 09/01/2005 | US20050190023 Micro-switching element fabrication method and micro-switching element |
| 08/31/2005 | CN1661769A Micro-switching element fabrication method and micro-switching element |
| 08/25/2005 | US20050184623 Positioning device for microscopic motion |
| 08/25/2005 | DE102005006156A1 Sensor für eine physikalische Größe, welcher einen Sensorchip und einen Schaltungschip aufweist Sensor for a physical quantity that has a sensor chip and a circuit chip |
| 08/24/2005 | CN1657290A Ink-jet printing head with isolated nozzle controller |
| 08/18/2005 | US20050178203 Physical quantity sensor having sensor chip and circuit chip |
| 08/17/2005 | CN1654925A Physical quantity sensor having sensor chip and circuit chip |
| 08/16/2005 | US6930368 MEMS having a three-wafer structure |
| 08/11/2005 | US20050172739 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 08/04/2005 | WO2005071707A1 Micro relay |
| 08/03/2005 | CN1650214A Micro rocking device having torsion bar |
| 07/21/2005 | US20050158209 Microcomponent connection system |
| 07/20/2005 | EP1425528A4 Methods and systems for fluid control in microfluidics devices |
| 07/14/2005 | DE10356678B4 Optisches Relais Optical relay |