| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 10/20/2009 | CA2414741C Movement sensor in a micro electro-mechanical device |
| 10/01/2009 | WO2009119069A1 Flat laminate-type conductive polymer actuator, flat laminate-type conductive polymer actuator device, and operating method thereof |
| 09/16/2009 | CN100542002C Permanent magnetic bistable electrothermal microdrivers |
| 09/11/2009 | WO2009110799A1 Process for adjusting the coefficient of friction between surfaces of two solid objects |
| 09/10/2009 | DE102008061151A1 Halbleiterbauelement und Verfahren zu seiner Herstellung Semiconductor device and process for its preparation |
| 09/09/2009 | EP2098477A1 Process for adjusting the friction coefficient between surfaces of two solid objects |
| 08/27/2009 | WO2009086330A3 Compact automatic focusing camera |
| 08/20/2009 | WO2009102902A2 Rotary nanotube bearing structure and methods for manufacturing and using the same |
| 08/05/2009 | EP2084104A1 Electrical microvalve and method of manufacturing thereof |
| 07/16/2009 | DE102008003792A1 Verfahren zum Herstellen einer Mikropumpe sowie Mikropumpe A method of manufacturing a micro-pump, as well as micropump |
| 07/09/2009 | WO2009086330A2 Compact automatic focusing camera |
| 07/09/2009 | DE102004026654B4 Mikromechanisches HF-Schaltelement sowie Verfahren zur Herstellung Micromechanical RF switching element and methods for preparing |
| 06/18/2009 | WO2009076074A1 Mems devices requiring no mechanical support |
| 06/10/2009 | DE102007058237A1 Micromechanical component for tilting mirror, has electrostatic linear drive to produce thrust or traction force in direction, and has prop, which is coupled with electrostatic linear drive at front end |
| 06/02/2009 | US7541898 High isolation tunable MEMS capacitive switch |
| 05/07/2009 | DE102007029439B4 Stoßantrieb-Aktuator, seine Verwendung in einem Mikro-Drehmotor und Verfahren zur Herstellung eines Mikro-Drehmotors Impact drive actuator, its use in a micro-torque motor and method for manufacturing a micro rotary motor |
| 05/06/2009 | CN101427336A Micro machine switch, filter circuit, duplexer circuit, and communication device |
| 04/29/2009 | EP2053669A1 Multi-set fine walking actuator |
| 04/29/2009 | CN101417785A Wafer-level sensing element packaging structure and method for producing the same |
| 04/16/2009 | WO2006130558A3 Flexible structures for sensors and electronics |
| 04/09/2009 | WO2006083575A3 Mems flow module with pivoting-type baffle |
| 04/02/2009 | DE102007044806A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 04/01/2009 | CN100474647C Large range continuous driving microelectromechanical component and driving method thereof |
| 03/25/2009 | EP2039940A2 Radially staged microscale turbomolecular pump |
| 03/17/2009 | US7505244 Micro-switches for downhole use |
| 03/10/2009 | US7501069 Flexible structures for sensors and electronics |
| 02/25/2009 | CN101374757A Fluid-controlled structure, apparatus, method, and method for configuring instrument |
| 02/07/2009 | CA2638477A1 Integrated electrical cross-talk walls for electrostatic mems |
| 02/05/2009 | WO2009016769A1 Optical micro motor |
| 01/27/2009 | US7482900 Micro relay |
| 01/27/2009 | US7481099 Micromotion device and scanning probe microscope |
| 01/22/2009 | DE102007033002A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 01/22/2009 | DE102007033001A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 01/07/2009 | CN201176394Y Suspending micro-electromechanical structure |
| 01/07/2009 | CN100449789C Method of manufacturing a micro-electrical-mechanical system |
| 12/25/2008 | US20080314723 Method of making contact posts for a microelectromechanical device |
| 12/24/2008 | EP1310038B1 Walking actuator |
| 12/11/2008 | DE102007026510A1 Device for fixing ultra thin silicon chips or micro optics, has base made of polymer, metallic nano-actuator, and expansion, where nano-actuator has two ends facing base of device |
| 11/27/2008 | WO2008078182A8 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 11/26/2008 | CN100437017C Measurements using tunnelling current between elongate conductors |
| 11/18/2008 | US7453269 Magnetic MEMS sensor device |
| 11/18/2008 | CA2419971C Fiber optic switch and associated methods |
| 11/13/2008 | DE102007029439A1 Stoßantrieb-Aktuator und Mikromotor Impact drive actuator and micromotor |
| 11/13/2008 | DE102007029438A1 Layout-Design und Verfahren zum Herstellen eines Mikromotors auf SDA-Basis mit niedriger Betriebsspannung und langer Betriebsdauer Layout design, and method for manufacturing a micromotor on SDA-base low-voltage operation and a long service life |
| 11/13/2008 | DE102007020792A1 Self assembly microstructure e.g. micro rotary fan, has movable portion that includes photosensitive polyimide elastic joint so that movable portion is rotated and lifted up by large surface tension force is generated from joint |
| 11/12/2008 | CN101304841A Cutting tool having variable movement in a Z-direction laterally along a work piece for making microstructures |
| 10/30/2008 | US20080266008 Electromechanical resonator and manufacturing method thereof |
| 10/30/2008 | DE19817357B4 Mikromechanisches Bauelement Micromechanical component |
| 10/30/2008 | DE10317889B4 Mikromechanisches Bauteil und Verfahren zu seiner Herstellung Micromechanical element and process for its preparation |
| 10/23/2008 | US20080258577 Microsystem and Method for Positioning a Second Element with Respect to a First Element in a Microsystem |
| 10/09/2008 | WO2008078182B1 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 10/09/2008 | DE102008013116A1 Verfahren zur Erzeugung einer mikromechanischen Struktur Method for producing a micromechanical structure |
| 10/08/2008 | CN101279712A Method for generating a micromechanical structure |
| 10/01/2008 | CN101278200A A method for the micromechanical measurement of acceleration and a micromechanical acceleration sensor |
| 10/01/2008 | CN100422070C Mobile microstructure cosupported by silicon and silicon dioxide, and its production method |
| 09/25/2008 | WO2008113166A1 Mems actuators and switches |
| 09/25/2008 | CA2679219A1 Mems actuators and switches |
| 09/24/2008 | CN101269489A Electric heat driving nickel tiny clamp with flexible structure |
| 09/18/2008 | DE102007013102A1 Mikromechanische Schaltervorrichtung mit mechanischer Kraftverstärkung Micromechanical switch device with mechanical advantage |
| 09/12/2008 | WO2008106782A1 Serial siphon valves for fluidic or microfluidic devices |
| 09/12/2008 | CA2679395A1 Serial siphon valves for fluidic or microfluidic devices |
| 09/11/2008 | DE102007020756A1 Layout-Design für Mikro-Scratch-Antrieb-Aktuatoren Layout design for micro-scratch drive actuators |
| 09/10/2008 | CN101259950A Method for manufacturing micro-optical-electro-mechanical system wavelength channel selector |
| 09/10/2008 | CN100417523C Ink-jet printing head with isolated nozzle controller |
| 09/04/2008 | DE10318767B4 Mikromechanisch aktuierbares, optoelektronisches Bauelement Micromechanically aktuierbares, optoelectronic component |
| 09/03/2008 | CN101254894A Packaged minisize moveable device and method for manufacturing same |
| 08/27/2008 | EP1960306A1 Microfluidic structures |
| 08/21/2008 | WO2008078182A3 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 08/20/2008 | EP1957991A1 A method for the micromechanical measurement of acceleration and a micromechanical acceleration sensor |
| 08/20/2008 | CN100413062C Method for producing heat pipes |
| 08/14/2008 | DE19680763B4 Microelectromechanical device useful for data storage applications - has cantilevered beam free to move above substrate and carrying insulated conductors is able to position tip on beam in contact with one conductor and move parallel to and perpendicular to substrate plane |
| 08/13/2008 | CN100410165C Miniature relay and corresponding uses thereof |
| 08/07/2008 | DE102007005293A1 Vorrichtung und Verfahren zum mikromechanischen Positionieren und Manipulieren eines Objektes Apparatus and method for micro-mechanical positioning and manipulation of an object |
| 08/06/2008 | EP1620352B1 Multi-stable electromechanical switches and methods of fabricating same |
| 07/30/2008 | EP1948394A1 Cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures |
| 07/30/2008 | EP1534954B1 Micro liquid handling device and methods for using it |
| 07/24/2008 | DE102004028927B4 Beschleunigungssensor Acceleration sensor |
| 07/16/2008 | CN100402414C Spacer fabrication process for manufacturing reflective stealth mirrors and other mems devices |
| 07/10/2008 | DE102007020755A1 Mikro-Scratch-Antrieb-Aktuator mit niedriger Betriebsspannung Micro scratch drive actuator with low operating voltage |
| 07/03/2008 | WO2008078182A2 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| 07/02/2008 | CN100398430C Flexible electric heat driven micro pliers |
| 06/26/2008 | US20080151002 Multi-Coloured Printhead Nozzle Array With Rows Of Nozzle Assemblies |
| 06/25/2008 | EP1936733A1 Resonator structures |
| 06/18/2008 | CN101203066A Electrostatic pressure transducer and manufacturing method therefor |
| 06/04/2008 | CN100391824C Quantum minitype propeller using vacuum |
| 05/30/2008 | CA2613961A1 Microelectromechanical electric potential sensor |
| 05/29/2008 | WO2007059063A8 Cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures |
| 05/14/2008 | CN100387508C Stepping omnibearing nano moving platform and control system control |
| 05/08/2008 | WO2008052363A1 Electrical microvalve and method of manufacturing thereof |
| 05/08/2008 | DE102006052414A1 Micromechanical actuator, has shaft and drive unit that are connected using hinge-joint, and lever connected with shaft at its one end and connected with drive unit at its other end using hinge-joint |
| 05/08/2008 | DE102006051198A1 Housing for accommodating micro component i.e. micro-mechanical component, has housing body made from plastic, and permanent magnets provided for operating micro component and arranged in housing in partially injected manner |
| 05/08/2008 | CA2703801A1 Electrical microvalve and method of manufacturing thereof |
| 05/07/2008 | EP1564182B1 Miniature relay and corresponding uses thereof and process for actuating the relay |
| 05/01/2008 | US20080100175 Self-stabilizing, floating microelectromechanical device |
| 04/30/2008 | DE102006050365A1 Solid body structured surface for use in e.g. transportation engineering, has characteristics of projections and/or carrier layer specifically changeable such that adhesive power of contact surface is adjustable |
| 04/15/2008 | US7357485 Inkjet printhead having row of nozzle actuators interleaved with nozzles of adjacent row |
| 04/10/2008 | DE112005002348T5 Schalterstrukturen oder ähnliches basierend auf einem auf Temperatur reagierenden Polymer Switch structures or the like based on a temperature-responsive polymer |
| 04/09/2008 | CN100380800C Electrostatic driver |
| 04/03/2008 | WO2008036997A1 A system and method for controlling fluids within a microfluidic device |
| 02/06/2008 | CN101117207A In situ application of anti-stiction materials to micro devices |