Patents
Sitemap › G12 - Instrument details › G12B - Constructional details of instruments, or comparable details of other apparatus, not otherwise provided for › G12B 5 - Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Patents for G12B 5 - Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus (2,046)
06/1999
06/03/1999WO1999027540A1 Stage positioning device
06/02/1999DE19754761A1 Tipping device for micromovement of microscopically examined object
06/02/1999CN2322245Y Electrode telescopic device for pen type tester
05/1999
05/26/1999CN1217549A Contactless intelligent instrument and meter installation method and apparatus thereof
05/11/1999US5902201 Positioning device and component placement machine including the positioning device
04/1999
04/27/1999US5898243 Displacement device with a modular system of displacement units
04/14/1999EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit
04/01/1999WO1999016080A1 Stage driving method, stage device and exposure device
03/1999
03/31/1999EP0905869A2 Linear motor mechanism for exposure apparatus, and device manufacturing method using the same
03/24/1999EP0903606A2 Micromechanical XYZ stage for use with optical elements
03/16/1999US5881533 Process for adjusting machines
03/10/1999EP0900412A1 Positioning device having two object holders
03/02/1999US5876008 Suspension system for video monitor or other equipment
01/1999
01/26/1999US5863017 Stabilized laser platform and module interface
12/1998
12/23/1998WO1998058387A1 Xy table
12/23/1998EP0885087A1 Displacement device with a modular system of displacement units
11/1998
11/24/1998US5839324 Stage apparatus and exposure apparatus provided with the stage apparatus
11/10/1998US5834864 Magnetic micro-mover
11/04/1998EP0874715A2 Device with at least one movement unit
10/1998
10/15/1998DE19715226A1 Precision micro=positioning method using piezoelectric setting elements
09/1998
09/17/1998WO1998040791A1 Positioning device having two object holders
08/1998
08/26/1998EP0792203B1 Electromechanical positioning unit
08/18/1998US5794541 Multi-degree-of-freedom table support unit, and a multi-degree-of-freedom table mechanism
06/1998
06/23/1998US5769561 Device for mounting a tool or workpiece to a machine
06/16/1998US5768013 Microscope stage
06/11/1998WO1998024585A1 Displacement device with a modular system of displacement units
05/1998
05/14/1998DE19749913A1 Equipment for producing two=dimensional movement
04/1998
04/28/1998US5744924 Guideless stage with isolated reaction frame
04/14/1998US5740082 Collocated sensor actuator
03/1998
03/12/1998DE19742205A1 Micropositioning appliance, e.g. for industrial robot
03/10/1998US5726542 Stage apparatus
03/04/1998EP0826295A2 Positioning device and component placement machine including the positioning device
02/1998
02/10/1998US5717482 Stage apparatus and method of mounting a substrate on a substrate holding surface of a substrate chuck in which a substrate is mounted in a Z-axis direction
02/03/1998US5714860 Stage device capable of applying a damping force to a movable member
12/1997
12/31/1997CN1168968A Apparatus for measuring vertical displacement of stage
11/1997
11/18/1997US5687947 Mounting method
11/18/1997US5687489 Guide assembly
11/11/1997US5687293 Method and device for calibration of movement axes of an industrial robot
11/06/1997WO1997034461A3 Positioning device and component placement machine including the positioning device
11/05/1997CN1163997A Process and apparatus for adjusting machines
10/1997
10/29/1997CN1163585A Electromechanical positioning unit
10/21/1997US5678944 Flexural mount kinematic couplings and method
10/15/1997EP0801259A1 Method and apparatus for positioning of machines
09/1997
09/24/1997EP0797071A2 Automatic inclination correction for a laser beam surveying instrument
09/18/1997WO1997034461A2 Positioning device and component placement machine including the positioning device
09/03/1997EP0792203A1 Electromechanical positioning unit
08/1997
08/20/1997EP0790482A1 A dual stage instrument for scanning a specimen
08/14/1997WO1997025180A3 Device with at least one movement unit
08/13/1997EP0788861A1 A multi-degree-of-freedom table support unit, and a multi-degree-of-freedom table mechanism.
07/1997
07/17/1997WO1997025180A2 Device with at least one movement unit
07/09/1997EP0783120A2 Stabilized laser platform and module interface
07/05/1997CA2194333A1 Stabilized laser platform and module interface
06/1997
06/26/1997WO1997022850A1 Collocated sensor actuator
06/11/1997EP0778586A1 Flexural mount kinematic couplings and method
05/1997
05/27/1997US5633720 Stage movement control apparatus and method therefor and projection exposure apparatus and method therefor
04/1997
04/29/1997US5623853 Precision motion stage with single guide beam and follower stage
03/1997
03/19/1997EP0763881A2 Magnetic micro-mover
03/06/1997DE19532008A1 Microscope table with stationary x-y operator's panel
02/1997
02/12/1997CN1142601A Levelling head
12/1996
12/24/1996US5587900 Self leveling independently programmable system
10/1996
10/30/1996EP0739680A1 Device for adjusting an upper part relative to a lower part
10/29/1996US5569918 Probe holder and probe mounting method for a scanning probe microscope
10/15/1996US5564664 Spherical suspension for a technical instrument
10/08/1996US5563485 Equalizing mechanism in home-positioning apparatus
10/01/1996US5561524 Interferometric distance measuring apparatus utilizing an asymmetric/elliptic beam
10/01/1996US5561299 X-Y stage and charged particle beam exposure apparatus
09/1996
09/26/1996DE19611779A1 Raster scan microscope with probe holding system for detachable holding of probe
09/11/1996CN2235127Y Liquid optical wedge automatic compensater
08/1996
08/20/1996US5548405 Optical three-dimensional shape measuring apparatus having a device for accurately positioning and measuring an object
07/1996
07/24/1996EP0723368A2 Video monitor suspension system
07/18/1996CA2166375A1 Video monitor suspension system
07/16/1996US5537208 Interferometer spectrometer having means for varying the optical path length while maintaining alignment
07/09/1996US5533699 Adjustable two-axis instrument mount
06/1996
06/18/1996US5528118 Guideless stage with isolated reaction stage
05/1996
05/23/1996WO1996014959A1 Electromechanical positioning unit
05/23/1996DE4440758A1 Elektromechanische Positioniereinheit Electromechanical positioning
05/01/1996EP0709655A2 Guidance device
04/1996
04/09/1996US5505422 Top adjustable kinematic mount
01/1996
01/11/1996DE4436320A1 Positioning and/or measurement device
12/1995
12/27/1995EP0556371B1 Method and apparatus for calibration of angular displacement
11/1995
11/28/1995US5471279 Apparatus and method for supporting a substrate
11/15/1995CN2212824Y Four-dimensional plate spring type optical regulating supporter
08/1995
08/30/1995CN2206490Y Mechanical level adjuster
08/29/1995US5446519 Stage device
08/23/1995EP0668123A1 Equalizing mechanism in home-positioning apparatus
08/08/1995US5440397 Apparatus and method for exposure
08/02/1995EP0426868B1 Positioning table
08/01/1995US5438451 Linearly fine-adjustable stage
07/1995
07/26/1995EP0664448A2 Tunnel unit and scanning head for scanning tunneling microscope
07/18/1995US5434422 Sample position controller in focused ion beam system
05/1995
05/31/1995EP0655301A1 Method and device for calibration of movement axes of an industrial robot
04/1995
04/25/1995US5408750 X-Y table apparatus
04/20/1995DE4435401A1 Spherical suspension for a technical instrument
02/1995
02/02/1995DE4325450A1 Table-adjusting device
01/1995
01/31/1995US5385217 Vibration eliminating apparatus for elminating vibration of an installation floor
01/18/1995CN2187826Y Adjustable machine seat
01/03/1995US5377897 Compensation of non-parallelism (balancing) of a first body to a second body
12/1994
12/27/1994US5376988 Parallel-moving apparatus and lens moving device in an exposing apparatus using the same
10/1994
10/25/1994US5357963 Sealed magnetic drive means without a passage through a wall and ultrasound probe comprising an application thereof
10/25/1994US5357684 Centering device for a mechanical probe
1 ... 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21