| Patents for G12B 5 - Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus (2,046) |
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| 09/10/2002 | US6448733 XYZ-axes table |
| 09/03/2002 | US6445107 Single stage microactuator for multi-dimensional actuation |
| 08/29/2002 | US20020118897 Stage device, exposure apparatus, device manufacturing method and movement guidance method |
| 08/29/2002 | US20020117903 Linear motor and stage apparatus, exposure apparatus, and device manufacturing method using the same |
| 08/28/2002 | EP1235115A2 Stage device and movement guidance method |
| 08/28/2002 | CN2508350Y High-accuracy O-type scanning support |
| 08/27/2002 | US6441911 Measuring instrument and method for measuring patterns on substrates of various thicknesses |
| 08/27/2002 | US6438857 Coordinate measurement device |
| 08/20/2002 | US6437864 Stage positioning device |
| 08/20/2002 | US6437463 Wafer positioner with planar motor and mag-lev fine stage |
| 08/20/2002 | US6434840 Device, in particular a work table for a projector |
| 08/08/2002 | US20020104453 Air bearing assembly |
| 07/30/2002 | US6425285 Drive unit |
| 07/25/2002 | WO2002045245A3 Xyz-axes table |
| 07/25/2002 | DE10155626A1 Motorisierte Antriebseinrichtung für eine XY-Stufe Motorized drive means for an XY stage |
| 07/11/2002 | US20020089657 Stage devices configured for use in a vacuum environment of a charged-particle-beam microlithography apparatus |
| 07/09/2002 | US6415654 Scanning probe microscope system including removable probe sensor assembly |
| 07/04/2002 | WO2002052702A1 Two part displacement device with detection of the mutual position |
| 07/03/2002 | CN2498714Y Structure of adjusting eye protecting spectacle on display |
| 07/03/2002 | CN2498713Y fixing-holder of display panel |
| 07/02/2002 | US6414742 Stage apparatus, and exposure apparatus and device manufacturing method using the same |
| 07/02/2002 | US6412981 Seal arrangement for a load-carrying bearing, particularly for coordinate measuring devices |
| 06/27/2002 | US20020079888 Displacement device |
| 06/26/2002 | CN2497398Y Liquid-crystal display device with ball-and-socket hinge |
| 06/26/2002 | CN1355539A Adjustable multi-functional bearing base |
| 06/25/2002 | US6411589 System and method for forming electrostatically actuated data storage mechanisms |
| 06/20/2002 | US20020074516 Positioning stage with stationary and movable magnet tracks |
| 06/18/2002 | US6405659 Monolithic stage |
| 06/06/2002 | WO2002045245A2 Xyz-axes table |
| 06/04/2002 | US6400117 Slider mechanism and method of driving the same |
| 06/04/2002 | US6400044 Protective arrangement for electronic functional units and/or functional groups |
| 05/30/2002 | WO2002043138A1 Method and device for alignment |
| 05/28/2002 | US6396566 Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation |
| 05/02/2002 | US20020050804 XYZ-axes table |
| 05/02/2002 | US20020050571 Long stroke mover for a stage assembly |
| 04/25/2002 | US20020047493 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 04/23/2002 | US6377870 Device and method for delivering various transparent substrates into a high-precision measuring instrument |
| 04/17/2002 | CN2487174Y Remote control and hand operate rotary table for TV set |
| 04/17/2002 | CN2487076Y 360 deg position limiting mechanism of stimulate turn table |
| 04/10/2002 | CN1343988A Improved structure for regulating tilt angle of display screen holder |
| 04/04/2002 | US20020039179 Stage apparatus providing multiple degrees of freedom of movement while exhibiting reduced magnetic disturbance of a charged particle beam |
| 04/04/2002 | US20020038984 Single stage microactuator for multi-dimensional actuation |
| 04/03/2002 | CN1342984A Base able to regulate elevation angle of panel |
| 04/02/2002 | US6366342 Drive apparatus, exposure apparatus, and method of using the same |
| 03/28/2002 | US20020037460 Stage unit, measurement unit and measurement method, and exposure apparatus and exposure method |
| 03/27/2002 | CN2483804Y Positioning device which can be autoraised and used for adjusting visual angle of screen |
| 03/21/2002 | US20020033434 Gimbal mechanism |
| 03/19/2002 | US6359679 Positioning device, exposure device, and device manufacturing method |
| 03/13/2002 | EP0874715B1 Device for numerically controlled machining, manipulating or measuring apparatus |
| 02/21/2002 | US20020021423 Stage apparatus, and exposure apparatus and device manufacturing method using the same |
| 02/21/2002 | DE10038836A1 Verfahren und Messanordnung zur Bestimmung der Lage einer Rotationsachse eines Körpers sowie Verfahren zum Ausrichten eines Patiententisches The method and measurement arrangement for determining the position of a rotation axis of a body, and methods for aligning a patient table |
| 02/19/2002 | US6347458 Displaceable X/Y coordinate measurement table |
| 02/14/2002 | WO2002012823A1 Determining the position of an axis of rotation (patient positioning table, radiation therapy) on the basis of an angle of rotation and a chord through a movable mark |
| 02/14/2002 | US20020018195 Moving mechanism in exposure apparatus, and exposure apparatus having the same |
| 02/13/2002 | CN2476882Y Aerial position angular adjustment instrument |
| 02/12/2002 | US6346710 Stage apparatus including displacement amplifying mechanism |
| 02/07/2002 | US20020015140 Stage device and exposure apparatus, and method of manufacturing a device |
| 01/24/2002 | US20020008185 Reference table tilting mechanism |
| 01/23/2002 | EP1174995A2 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 01/23/2002 | EP1174994A1 Single stage microactuator for multi-dimensional actuation |
| 01/23/2002 | CN1078333C Process and apparatus for adjusting locating machines |
| 01/10/2002 | US20020003616 Stage system for exposure apparatus and device manufacturing method using the same |
| 01/10/2002 | US20020003413 Table positioning device |
| 01/09/2002 | CN2470922Y Three-freedom super-precision-positioning and micro operation platform |
| 01/08/2002 | US6337484 Positioning device and lithographic projection apparatus comprising such a device |
| 01/03/2002 | US20020000029 Pipe structure, alignment apparatus, electron beam lithography apparatus, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 01/03/2002 | DE10125031A1 Tischpositioniervorrichtung Tischpositioniervorrichtung |
| 01/03/2002 | DE10125030A1 Inclination angle setting mechanism for reference table, has cam drive mechanisms with cam disks which are rotated for adjusting inclination of reference table supported by flat spring |
| 01/02/2002 | EP1168084A2 Drive mechanism and exposure apparatus having the same |
| 12/20/2001 | WO2001096836A1 Device for positioning disk-shaped objects |
| 12/20/2001 | US20010052984 Object-displacement detector and object-displacement controller |
| 12/20/2001 | US20010052970 Stage apparatus, exposure apparatus, and device manufacturing method |
| 12/19/2001 | CN2466769Y Three-freedom super-precision automatic location platform |
| 12/19/2001 | CN2466768Y Fine operating platform for precision location in plane |
| 12/19/2001 | CN2466767Y Six-freedom super-precision location and fine operating platform |
| 12/13/2001 | US20010050341 Positioning system for use in lithographic apparatus |
| 12/13/2001 | DE10028569A1 Device for positioning plate-shaped objects has object holder rotatable about axis perpendicular to yoke frame rotation axis second axis and passing through yoke frame fork ends |
| 12/12/2001 | CN2465424Y Remote viewing angle adjustable TV set |
| 12/11/2001 | US6330095 Beam scanning apparatus |
| 12/11/2001 | US6327929 Two dimensional drive system |
| 12/06/2001 | US20010047682 Dual stage instrument for scanning a specimen |
| 12/05/2001 | CN2463917Y Improved structure capable of adjusting fluorescent screen seat dip |
| 11/29/2001 | US20010045811 Slider mechanism and method of driving the same |
| 11/29/2001 | US20010045810 High performance stage assembly |
| 11/20/2001 | US6320649 Stage system for exposure apparatus |
| 11/20/2001 | US6320645 Stage system and exposure apparatus, and device manufacturing method using the same |
| 11/20/2001 | US6320345 Command trajectory for driving a stage with minimal vibration |
| 11/14/2001 | CN2459740Y 柔性铰链 Flexible hinge |
| 10/18/2001 | US20010031191 Supporting system in exposure apparatus |
| 10/18/2001 | US20010030522 Guideless stage with isolated reaction stage |
| 10/11/2001 | US20010029010 Mount and mount transit system |
| 10/11/2001 | US20010027595 Stage device, exposure apparatus incorporating the stage device, and method of using the same |
| 10/10/2001 | EP1142541A2 Mount for a part to be measured and manufacturing method therefor |
| 10/04/2001 | US20010026408 Drive apparatus, exposure apparatus, and method of using the same |
| 09/27/2001 | US20010023927 Reaction force isolation system for a planar motor |
| 09/26/2001 | EP1135846A1 Displacement device |
| 09/26/2001 | CN1314601A Objective table of microscope |
| 09/13/2001 | US20010020684 Reaction force isolation system |
| 08/28/2001 | US6281655 High performance stage assembly |
| 08/28/2001 | US6281654 Method for making apparatus with dynamic support structure isolation and exposure method |