| Patents for G12B 5 - Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus (2,046) |
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| 08/28/2001 | US6281643 Stage apparatus |
| 08/16/2001 | US20010013177 Coordinate measurement device |
| 08/15/2001 | CN2443469Y Dip angle adjustable information domestic electrical appliance |
| 08/07/2001 | US6271640 Exposure apparatus having reaction frame |
| 07/31/2001 | US6267005 Dual stage instrument for scanning a specimen |
| 07/25/2001 | CN1068813C Electromechanical positioning unit |
| 07/19/2001 | US20010008272 Measuring instrument and method for measuring features on a substrate |
| 07/18/2001 | EP1116932A2 Measuring apparatus and method for measuring structures on a substrat |
| 07/17/2001 | US6262797 Stage unit, drive table, and scanning exposure apparatus using the same |
| 07/17/2001 | US6262796 Positioning device having two object holders |
| 07/10/2001 | US6259571 Adjustable assembly |
| 07/05/2001 | US20010006762 Balanced positioning system for use in lithographic apparatus |
| 06/27/2001 | EP1111468A2 Stage assembly for exposure apparatus |
| 06/27/2001 | CN2437017Y Rotary device |
| 06/26/2001 | US6252705 Stage for charged particle microscopy system |
| 06/26/2001 | US6252234 Reaction force isolation system for a planar motor |
| 06/21/2001 | DE10054113A1 Drive unit used in measuring device, has drive mechanism that moves slider along guide rail to move measuring device along surface of measured object |
| 06/20/2001 | EP1108974A1 Coordinate measuring machine |
| 06/13/2001 | EP1105780A1 Reaction force isolation system for a planar motor |
| 06/12/2001 | US6246921 Concentricity processing apparatus using vision system and method therefor |
| 06/12/2001 | US6244192 XY table |
| 06/07/2001 | DE19958306A1 Koordinatenmeßvorrichtung A coordinate |
| 05/10/2001 | DE19949005A1 Einrichtung und Verfahren zum Einbringen verschiedener transparenter Substrate in ein hochgenaues Messgerät Apparatus and method for introducing various transparent substrates in a highly accurate measuring device |
| 05/09/2001 | CN2429848Y Seal camera with recorder |
| 05/03/2001 | DE19949019A1 Messgerät und Verfahren zum Vermessen von Strukturen auf Substraten verschiedener Dicke Instrument and method for measuring structures on substrates of different thickness |
| 04/18/2001 | EP1093153A2 Device and method for introducing different transparent substrates in a high-precision measuring apparatus |
| 04/18/2001 | EP1092945A2 Device and method for measurements of structures on substrates of various thicknesses |
| 03/21/2001 | EP1085294A1 System for inspecting and/or processing a sample |
| 03/15/2001 | WO2001018944A1 Displacement device |
| 03/06/2001 | US6196138 Movable table unit |
| 02/27/2001 | US6193226 Positioning mechanism |
| 02/15/2001 | DE19934605A1 Device, such as a rotating table, for rotational positioning of components has coarse and fine adjusters, of compact design, to enable a component to be moved quickly and accurately into position |
| 02/06/2001 | US6184533 Scanning probe microscope with the stage unit |
| 01/24/2001 | EP1071097A1 Stage positioning device |
| 12/19/2000 | US6161809 Tilt-adjustable supporting device, in particular maintained in a horizontal position |
| 12/12/2000 | US6158298 Stage apparatus and exposure apparatus provided with the stage apparatus |
| 12/07/2000 | DE19920740A1 Dichtungsanordnung für ein lastabtragendes Lager, insbesondere für Koordinatenmeßvorrichtungen The seal assembly for a load-bearing, in particular for coordinate measuring |
| 12/06/2000 | EP1055163A4 High-speed precision positioning apparatus |
| 12/05/2000 | US6155716 Guide apparatus for biaxial shifting motion and uniaxial turning motion |
| 11/30/2000 | DE10025589A1 Stage apparatus for holding workpiece e.g. semiconductor wafer has magnetic motor for moving stage along X-axis and nonmagnetic motor for moving stage along Y-axis |
| 11/29/2000 | EP1055163A1 High-speed precision positioning apparatus |
| 11/08/2000 | EP1050367A2 Seal arrangement for charge carrying bearing, in particular for coordinate measuring devices |
| 11/08/2000 | EP1050202A1 Protective arrangement for electronic functional units and/or functional groups |
| 11/07/2000 | US6144118 High-speed precision positioning apparatus |
| 11/02/2000 | EP1048924A2 High-precision work table for a projector |
| 10/31/2000 | US6138503 Scanning probe microscope system including removable probe sensor assembly |
| 10/19/2000 | DE10005807A1 Moving mechanism for XY table, includes moving beams between fixed guides in which slider is moved by actuating ball screws |
| 09/26/2000 | US6124923 Stage unit, drive table, and scanning exposure apparatus using the same |
| 08/31/2000 | DE19952553A1 Compact video test device with coupled Y,Z,X measurement axes has movable carriage with objective lens mechanism oriented towards workpiece on one end, video camera on other |
| 08/31/2000 | DE19908554A1 Verstellbare Baugruppe Adjustable assembly |
| 08/30/2000 | EP1031996A2 Adjustable assembly |
| 08/29/2000 | US6109574 Gas laser chamber/optics support structure |
| 08/24/2000 | DE10002137A1 Laser scanner for vehicle distance measuring apparatus, has stopper mechanism with spring which applies energizing force to lens during reversing movement of lens |
| 08/22/2000 | US6107703 Linear motor mechanism for exposure apparatus, and device manufacturing method using the same |
| 08/10/2000 | WO2000046911A1 Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method |
| 07/27/2000 | WO2000010058A9 Reaction force isolation system for a planar motor |
| 07/27/2000 | DE19860566C1 Compensating for out-of-parallel conditions between adjacent surfaces of two bodies involves bringing surfaces into contact, bringing them into parallel contact, moving them apart |
| 07/06/2000 | DE19858428A1 Verfahrbarer x/y-Koordinaten-Meßtisch Movable x / y coordinate measurement table |
| 06/28/2000 | EP1014030A1 Movable x/y stage for coordinate measurement |
| 06/22/2000 | WO2000017724A9 High-speed precision positioning apparatus |
| 06/14/2000 | CN2383039Y Mounting mechanism for semiconductor laser direction indicator |
| 06/07/2000 | CN1053137C Levelling appts. |
| 06/02/2000 | WO2000032022A1 Protective arrangement for electronic functional units and/or functional groups |
| 05/23/2000 | US6065732 Pivotal rotation adjusting apparatus for flat panel display device |
| 05/09/2000 | US6059703 Device with at least one movement unit |
| 05/02/2000 | US6057916 Automatic inclination corrector and inclination sensor using an automatic inclination corrector |
| 04/19/2000 | EP0994541A2 Gas laser chamber/optics support structure |
| 04/11/2000 | US6049186 Method for making and operating an exposure apparatus having a reaction frame |
| 04/06/2000 | DE19940124A1 Platform with displacement amplification mechanism for scanning-microscope has two parallel arms attached via elastic connecting sections to base |
| 03/30/2000 | WO2000017724A1 High-speed precision positioning apparatus |
| 03/02/2000 | DE19941025A1 Flat web coupler for coordinate measurement systems that incorporates a web portion and flexing member joined by links, to the web portion via spring portions to accurately translate rotational motion |
| 03/01/2000 | CA2281230A1 Flat web coupler for cmm's |
| 02/24/2000 | WO2000010058A1 Reaction force isolation system for a planar motor |
| 02/10/2000 | DE19833904A1 Sample stage positioner offering lift and tilt down to picometer range under low temperatures comprises metal bellows containing expansible medium and electrical heater |
| 02/09/2000 | EP0978832A2 System and method for forming electrostatically actuated data storage mechanisms |
| 02/02/2000 | EP0977244A2 Stage system and stage driving method for use in exposure apparatus |
| 01/27/2000 | DE19757567C2 Einrichtung zur Verstellung des Meßtisches an einem Meßmikroskop Means for adjusting the measurement table in a measuring microscope |
| 01/25/2000 | US6018415 X-Y table having belt drives for moving a stage of the table in fine increments and microscope comprising the same |
| 01/05/2000 | DE19845270A1 Fine adjustment device for components or workpieces |
| 12/07/1999 | US5996437 Precision motion stage with single guide beam and follower stage |
| 11/30/1999 | US5994820 Electromechanical positioning unit |
| 11/24/1999 | CN1236151A Pivotal rotation adjusting apparatus for flat panel display device |
| 11/10/1999 | CN2348464Y 枢钮器装置 Hinges device |
| 11/09/1999 | US5982128 Lithography apparatus with movable stage and mechanical isolation of stage drive |
| 10/20/1999 | EP0950873A2 Suspension for gravity actuated measuring devices |
| 10/19/1999 | US5969857 Stage assembly of microscope which prevents its particles of wear from being dispersed |
| 10/05/1999 | US5963367 Micromechanical xyz stage for use with optical elements |
| 09/28/1999 | US5959427 Method and apparatus for compensating for reaction forces in a stage assembly |
| 09/16/1999 | DE19810447A1 Suspension for measuring arrangement influenced by large forces e.g. level, inclinometer |
| 09/15/1999 | CN2338859Y High-pricision, quick-action and automatic mechanism for adjusting level of instrument |
| 09/07/1999 | US5948972 For sensing a sample |
| 08/31/1999 | US5943915 Two-dimensional motion producing apparatus |
| 08/25/1999 | EP0937961A2 Positioning mechanism |
| 08/24/1999 | US5942871 Double flexure support for stage drive coil |
| 08/19/1999 | DE19805689A1 Device for highly accurate adjustment movements for use with tool machines |
| 08/05/1999 | DE19803375A1 Device for place dependent positioning of workpiece using cantilever carrying arm |
| 07/15/1999 | DE19757957A1 Motorized level for use in construction and building industry |
| 07/08/1999 | WO1999034245A1 Device for displacing the stage of a measuring microscope |
| 07/01/1999 | DE19757567A1 Einrichtung zur Verstellung des Meßtisches an einem Meßmikroskop Means for adjusting the measurement table in a measuring microscope |
| 06/24/1999 | DE19757461A1 Builder's laser with rotating beam for defining level |