| Patents for G03D 5 - Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected (991) |
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| 04/08/2008 | US7353560 Proximity brush unit apparatus and method |
| 04/01/2008 | US7350991 Universal spray processor for imaged plates |
| 02/12/2008 | US7329058 High flow rate development of photosensitive plates |
| 02/07/2008 | US20080031618 Co2 reaction reduction at developer surface |
| 01/29/2008 | US7322756 Coating and developing apparatus and coating and developing method |
| 01/17/2008 | US20080013946 Developing method and developing unit |
| 01/10/2008 | US20080008973 Substrate processing method and substrate processing apparatus |
| 01/08/2008 | US7316515 Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid |
| 12/27/2007 | US20070297794 Photolithography system and method |
| 12/11/2007 | US7306384 Processing apparatus for lithographic printing plate and process for processing the same |
| 11/29/2007 | US20070274711 Substrate processing apparatus and substrate processing method |
| 11/06/2007 | US7290948 Substrate processing apparatus and substrate processing method |
| 11/01/2007 | US20070253710 Method of processing substrate, substrate processing system and substrate processing apparatus |
| 11/01/2007 | US20070253709 Developing apparatus, developing processing method, developing processing program, and computer readable recording medium recording the program |
| 10/30/2007 | US7289190 Monitoring apparatus and method particularly useful in photolithographically |
| 10/30/2007 | US7287920 Semiconductor manufacturing apparatus and method |
| 10/30/2007 | US7287919 Developing process and apparatus |
| 10/25/2007 | US20070245505 Disc Cleaner |
| 10/23/2007 | US7284917 Coating and developing system and coating and developing method |
| 10/02/2007 | US7275879 Processing device of photo-sensitive material |
| 09/27/2007 | US20070223916 Substrate processing apparatus and substrate processing method |
| 09/25/2007 | US7274429 Integrated lithographic fabrication cluster |
| 09/19/2007 | EP1523695B1 Nozzle assembly for applying a liquid to a substrate |
| 09/11/2007 | US7268853 Exposing systems providing post exposure baking and related methods |
| 09/11/2007 | US7267497 Coating and developing system and coating and developing method |
| 08/28/2007 | US7262829 Coating and developing apparatus and coating and developing method |
| 08/09/2007 | US20070183775 Developing apparatus and developing method |
| 08/09/2007 | US20070183774 Method and storage medium for replacing process instrument in processing apparatus |
| 08/02/2007 | US20070177870 Substrate processing apparatus |
| 08/02/2007 | US20070177869 Coater/developer and coating/developing method |
| 07/26/2007 | US20070172234 Apparatus for and method of processing substrate |
| 07/26/2007 | US20070172233 Substrate processing apparatus |
| 07/19/2007 | US20070166031 Substrate processing apparatus |
| 07/19/2007 | US20070166030 Semiconductor device fabrication equipment and method of using the same |
| 07/10/2007 | US7241061 Coating and developing system and coating and developing method |
| 07/03/2007 | US7237967 Developing apparatus and method |
| 06/28/2007 | US20070147832 Method of processing substrate, substrate processing system and substrate processing apparatus |
| 06/28/2007 | US20070147831 Substrate processing apparatus for performing exposure process |
| 06/07/2007 | US20070127916 Substrate processing apparatus and substrate processing method |
| 05/24/2007 | US20070116459 Rinsing method, developing method, developing system and computer-read storage medium |
| 05/03/2007 | US20070098401 Substrate processing method and apparatus thereof |
| 05/01/2007 | US7210864 Coating and developing apparatus |
| 03/29/2007 | US20070071439 Substrate processing apparatus |
| 03/27/2007 | US7195407 Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program |
| 03/22/2007 | US20070065145 Development apparatus and development method |
| 03/22/2007 | US20070065144 Substrate transport apparatus with automated alignment |
| 03/21/2007 | CN1933760A Motorized cleaning apparatus |
| 02/27/2007 | US7182531 Developing method and apparatus |
| 02/20/2007 | US7179000 Method of developing a resist film and a resist development processor |
| 02/08/2007 | US20070031145 Developing treatment apparatus and developing treatment method |
| 01/04/2007 | US20070003279 Post-exposure baking apparatus and related method |
| 01/04/2007 | US20070003278 Substrate drying apparatus, substrate cleaning apparatus and substrate processing system |
| 12/28/2006 | US20060291855 Substrate processing apparatus |
| 12/28/2006 | US20060291854 Substrate processing apparatus |
| 12/05/2006 | US7145643 Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method |
| 11/21/2006 | US7137164 Glass catching web is positioned between the support and the reservoir to catch pieces of broken glass when a glass sheet being washed breaks. |
| 11/02/2006 | WO2006116263A1 Methods and apparatus for cleaning and edge of a substrate |
| 10/31/2006 | US7128481 Substrate processing apparatus for inspecting processing history data |
| 10/10/2006 | US7119307 Automatic developing device, roller washing method, photosensitive material processing device, and preparation method for processing liquid |
| 10/04/2006 | CN1278275C Runcard management system and method for semiconductor manufacture |
| 09/28/2006 | US20060216025 Exposure apparatus |
| 09/26/2006 | US7113253 computer programs comprising software codes for use in lithography |
| 09/07/2006 | US20060198633 Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording medium |
| 09/07/2006 | US20060197929 Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program |
| 08/31/2006 | US20060193630 Monitoring apparatus and method particularly useful in photolithographically |
| 08/01/2006 | US7083338 Lithography equipment |
| 08/01/2006 | US7083038 Automatic developing device, roller washing method, photosensitive material processing device, and preparation method for processing liquid |
| 07/27/2006 | US20060165409 Coating and developing system and coating and developing method |
| 07/20/2006 | US20060159449 Substrate processing apparatus |
| 07/18/2006 | US7077585 Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processing |
| 07/06/2006 | US20060147202 Substrate processing apparatus and substrate processing method |
| 07/06/2006 | US20060147201 Substrate processing apparatus and substrate processing method |
| 06/29/2006 | US20060140624 Method of developing a resist film and a resist development processor |
| 06/27/2006 | US7068351 Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program |
| 06/08/2006 | US20060120717 Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processing |
| 06/08/2006 | US20060120716 Substrate processing apparatus |
| 05/18/2006 | US20060104635 Substrate processing apparatus and substrate processing method |
| 05/16/2006 | US7044662 Developing photoresist with supercritical fluid and developer |
| 05/11/2006 | US20060098979 Substrate processing apparatus and substrate processing method |
| 05/11/2006 | US20060098978 Substrate processing apparatus and substrate processing method |
| 05/11/2006 | US20060098977 Substrate processing apparatus and substrate processing method |
| 05/09/2006 | US7042553 Apparatus for conveying substrates |
| 05/09/2006 | US7041339 Coating device and coating method using the device |
| 04/25/2006 | US7033089 Method of developing a resist film and a resist development processor |
| 04/18/2006 | US7030957 Monitoring apparatus and method particularly useful in photolithographically processing substrates |
| 04/11/2006 | US7025514 Development apparatus for manufacturing semiconductor device |
| 03/30/2006 | WO2005096724A3 Apparatus and methods for cleaning the components of a feed device |
| 03/30/2006 | US20060067682 Removing apparatus, protective film forming apparatus, substrate processing system and removing method |
| 03/28/2006 | US7018115 Washing method and apparatus |
| 03/14/2006 | US7012670 Method and apparatus for adjusting a photo-exposure time |
| 03/07/2006 | US7008124 Method and device for processing substrate |
| 02/21/2006 | US7001086 Developing method, substrate treating method, and substrate treating apparatus |
| 02/09/2006 | US20060029388 Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid |
| 01/31/2006 | US6991385 Method for developing processing and apparatus for supplying developing solution |
| 01/26/2006 | US20060018655 Photo processing apparatus |
| 01/03/2006 | US6981808 Substrate processing apparatus and substrate transferring method |
| 01/03/2006 | US6981291 Motorized cleaning apparatus |
| 11/17/2005 | US20050254861 Device and method for dosing toner material in an electrophotographic printer or copier |
| 11/10/2005 | US20050249494 Photographic processor |
| 11/02/2005 | CN1690860A Apparatus for removing developer |