| Patents for G03D 5 - Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected (991) |
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| 11/18/2014 | US8888387 Coating and developing apparatus and method |
| 10/07/2014 | US8851769 Substrate processing method |
| 08/26/2014 | US8817225 Coating and developing apparatus and method, and storage medium |
| 06/10/2014 | US8746171 Substrate treating system |
| 06/03/2014 | US8740481 Coating and developing apparatus |
| 05/13/2014 | US8722135 Method for discharging chemical solution |
| 05/06/2014 | US8714845 Developer, process for treating developing solution, process for producing printing plate, and filter apparatus |
| 04/29/2014 | US8708587 Substrate treating apparatus with inter-unit buffers |
| 03/25/2014 | US8678684 Developing method |
| 03/18/2014 | US8672563 Development method, method of manufacturing photomask, method of manufacturing semiconductor device and development device |
| 02/13/2014 | US20140044429 Color Film Developing Apparatus |
| 01/28/2014 | US8635968 Substrate processing apparatus and substrate processing method |
| 10/29/2013 | US8568043 Coating and developing apparatus and coating and developing method |
| 10/09/2013 | CN103345116A Development method with three-dimensional portrait masterplate as substrate |
| 10/01/2013 | US8545119 Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method |
| 10/01/2013 | US8545118 Substrate treating apparatus with inter-unit buffers |
| 09/17/2013 | US8534936 Coating and developing apparatus |
| 08/13/2013 | US8506186 Coating and developing apparatus, coating and developing method and non-transitory tangible medium |
| 07/09/2013 | US8480319 Coating and developing apparatus, coating and developing method and non-transitory tangible medium |
| 06/25/2013 | US8469614 Substrate treatment method, computer storage medium and substrate treatment apparatus |
| 05/28/2013 | US8448600 Substrate processing apparatus, substrate processing method, and storage medium |
| 05/21/2013 | US8444333 Developer, process for treating developing solution, process for producing printing plate, and filter apparatus |
| 05/21/2013 | US8443513 Substrate processing apparatus |
| 05/07/2013 | US8434423 Substrate carrying apparatus having circumferential sidewall and substrate processing system |
| 04/23/2013 | US8424483 Painting apparatuses and methods |
| 04/18/2013 | DE10063216B4 Vorrichtung zum Bearbeiten von fotosensiblem Material Apparatus for processing photo sensitive material |
| 04/16/2013 | US8419299 Coating and developing apparatus and method, and storage medium |
| 04/09/2013 | US8415092 Substrate developing method, substrate processing method and developing solution supply nozzle |
| 04/03/2013 | CN102331665B Lower liquid carrying plate shaft installation structure for blueprint machine |
| 04/02/2013 | US8408158 Coating/developing device and method |
| 03/19/2013 | US8398319 Developing apparatus, developing method, and storage medium |
| 03/12/2013 | US8393808 Developing method |
| 02/19/2013 | US8376637 Photoresist coating and developing apparatus, substrate transfer method and interface apparatus |
| 01/22/2013 | US8356951 Wet-processing apparatus |
| 01/01/2013 | US8342761 Coating/developing apparatus and coating/developing method |
| 12/25/2012 | US8337104 Developing apparatus, developing method and storage medium |
| 12/18/2012 | US8333522 Developing apparatus, developing method and storage medium |
| 11/20/2012 | US8313257 Coating and developing apparatus, substrate processing method, and storage medium |
| 11/13/2012 | US8308381 Substrate processing method, computer-readable storage medium, and substrate processing system |
| 11/06/2012 | US8303197 Method of developing a substrate and apparatus for performing the same |
| 10/16/2012 | US8289496 System and method for treating substrate |
| 09/11/2012 | US8262301 Developer spraying device for reducing usage quantity of developer |
| 09/11/2012 | US8262300 Coating and developing apparatus, developing method and non-transitory medium |
| 07/31/2012 | US8231285 Substrate processing method and apparatus |
| 04/10/2012 | US8151396 Liquid-sample wiping mechanism and wipe-material holding mechanism for optical measurement apparatus |
| 04/03/2012 | US8147153 Rinsing method, developing method, developing system and computer-read storage medium |
| 03/27/2012 | US8142086 Semiconductor manufacturing process |
| 03/15/2012 | US20120063765 Coating and developing apparatus, coating and developing method and non-transitory tangible medium |
| 03/08/2012 | US20120057862 Coating and developing apparatus, coating and developing method and non-transitory tangible medium |
| 03/08/2012 | US20120057861 Coating and developing apparatus and method, and storage medium |
| 02/01/2012 | CN102341756A Reducing foam formation |
| 01/25/2012 | CN102331683A Developing shaft component of blueprinting machine |
| 01/25/2012 | CN102331682A Liquid holding tank part of blue printer |
| 01/25/2012 | CN102331681A Developing liquid supply component of blueprinting machine |
| 01/25/2012 | CN102331665A Lower liquid carrying plate shaft installation structure for blueprint machine |
| 01/25/2012 | CN102331658A Cam driving part of blueprint machine |
| 01/19/2012 | US20120014689 Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method |
| 01/18/2012 | EP2406688A1 Reducing foam formation |
| 01/12/2012 | US20120008936 Coating and developing apparatus |
| 12/21/2011 | CN202083901U Developing shaft part of blueprint machine |
| 12/21/2011 | CN202083900U Developing liquid supply part of blueprint machine |
| 12/21/2011 | CN202083899U Liquid holding tank component of blueprinting machine |
| 12/21/2011 | CN202083885U Cam driving part for blueprint machine |
| 12/21/2011 | CN202083881U Installation structure of lower liquid plate shaft of blueprint machine |
| 12/06/2011 | US8069816 Coating film processing method and apparatus |
| 11/24/2011 | US20110286738 Wet-processing apparatus |
| 11/15/2011 | US8057114 Wet-processing apparatus, wet-processing method and storage medium |
| 10/18/2011 | US8040488 Substrate processing apparatus |
| 10/04/2011 | US8031324 Substrate processing apparatus with integrated cleaning unit |
| 09/29/2011 | US20110236011 Substrate processing apparatus and substrate processing method |
| 09/22/2011 | US20110229120 Rinsing method and developing method |
| 09/01/2011 | US20110211825 Coating and developing apparatus, substrate processing method, and storage medium |
| 08/16/2011 | US7999910 System and method for manufacturing a mask for semiconductor processing |
| 08/16/2011 | US7997813 Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium |
| 07/14/2011 | US20110170855 Developing apparatus and developing method |
| 06/28/2011 | US7968825 Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate |
| 06/07/2011 | US7955011 Coating and developing apparatus, substrate processing method, and storage medium |
| 05/10/2011 | US7938587 Substrate processing method, computer storage medium and substrate processing system |
| 05/03/2011 | US7934880 Coating and developing apparatus, coating and developing method, and storage medium |
| 04/12/2011 | US7922405 Developing apparatus and developing method |
| 03/15/2011 | US7905668 Coating/developing apparatus and method |
| 03/08/2011 | US7901149 Substrate processing method, program, computer-readable recording medium, and substrate processing system |
| 03/01/2011 | US7896563 Photo spinner apparatus and wafer carrier loading/unloading method using the same |
| 03/01/2011 | US7896562 Developing method, developing apparatus and storage medium |
| 02/15/2011 | US7889313 Immersion lithography apparatus and exposure method |
| 02/03/2011 | US20110027727 Substrate developing method, substrate processing method and developing solution supply nozzle |
| 01/25/2011 | US7874748 Photo development apparatus and method for fabricating a color filter substrate using the same |
| 01/18/2011 | US7871211 Coating and developing system, coating and developing method and storage medium |
| 12/28/2010 | US7857530 Developing method and developing unit |
| 12/07/2010 | US7846648 Supplying a developing solution to develop the resist film formed on the substrate; supplying a treatment solution to the substrate to dissolve the base film at a portion exposed by the development of the resist film |
| 12/07/2010 | US7845868 Apparatus for semiconductor manufacturing process |
| 11/30/2010 | US7841788 Substrate processing apparatus and substrate processing method |
| 11/30/2010 | US7841787 Rinsing method, developing method, developing system and computer-read storage medium |
| 11/23/2010 | US7840166 Device and method for dosing toner material in an electrophotographic printer or copier |
| 11/09/2010 | US7828488 Developing apparatus, developing method, coating and developing system and storage medium |
| 11/09/2010 | US7828487 Post-exposure baking apparatus and related method |
| 10/26/2010 | US7821616 Resist pattern forming method, semiconductor apparatus using said method, and exposure apparatus thereof |
| 10/26/2010 | US7821614 Monitoring apparatus and method particularly useful in photolithographically processing substrates |
| 10/26/2010 | US7819594 Development processing device |
| 10/26/2010 | US7819080 Substrate processing apparatus and substrate processing method |