| Patents for G03D 5 - Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected (991) |
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| 09/28/2010 | CA2492825C Nozzle assembly for applying a liquid to a substrate |
| 09/16/2010 | WO2010104550A1 Reducing foam formation |
| 09/16/2010 | US20100232781 Coating and developing apparatus, coating and developing method, and storage medium |
| 09/14/2010 | US7796237 Lithography apparatus, method of forming pattern and method of manufacturing semiconductor device |
| 09/07/2010 | US7789577 Coating and developing system, coating and developing method and storage medium |
| 09/07/2010 | US7789576 PEB embedded exposure apparatus |
| 08/24/2010 | US7780366 Resist pattern forming method |
| 08/17/2010 | US7775729 Developing apparatus, developing processing method, developing processing program, and computer readable recording medium recording the program |
| 08/03/2010 | US7766566 Developing treatment apparatus and developing treatment method |
| 08/03/2010 | US7766565 Substrate drying apparatus, substrate cleaning apparatus and substrate processing system |
| 07/06/2010 | US7751025 Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control |
| 06/22/2010 | US7742146 Coating and developing method, coating and developing system and storage medium |
| 06/01/2010 | US7726891 Substrate processing apparatus and substrate processing method |
| 05/25/2010 | US7722267 Substrate processing apparatus |
| 05/11/2010 | US7714979 Substrate processing apparatus |
| 04/06/2010 | US7692764 Exposure apparatus, operation decision method, substrate processing system, maintenance management method, and device manufacturing method |
| 04/06/2010 | US7690853 Substrate processing apparatus |
| 03/17/2010 | CN101673044A Small film processor drying air duct |
| 03/16/2010 | US7679715 Lithographic processing cell, lithographic apparatus, track and device manufacturing method |
| 03/11/2010 | US20100061718 Coating and developing apparatus, coating and developing method, and storage medium |
| 03/04/2010 | US20100054730 Photo development apparatus and method for fabricating a color filter substrate using the same |
| 02/23/2010 | US7665918 Developing apparatus, developing method and storage medium |
| 02/23/2010 | US7665917 Heat treatment apparatus and methods for thermally processing a substrate using a pressurized gaseous environment |
| 02/23/2010 | US7665916 Coater/developer and coating/developing method |
| 02/17/2010 | EP2154580A2 Apparatus and method to control the supply of toner in an electrophotographic printer or copier. |
| 02/16/2010 | US7661894 Coating and developing apparatus, and coating and developing method |
| 02/09/2010 | US7658560 Substrate processing apparatus |
| 01/26/2010 | US7651285 Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium |
| 01/26/2010 | US7651284 Development apparatus and development method |
| 01/12/2010 | US7645081 Coating and developing apparatus, coating and developing method, and storage medium |
| 01/05/2010 | US7641406 Bevel inspection apparatus for substrate processing |
| 01/05/2010 | US7641405 Substrate processing apparatus with integrated top and edge cleaning unit |
| 01/05/2010 | US7641404 Substrate processing apparatus |
| 12/23/2009 | CN201368962Y Evaporator used for developer of photocopier |
| 12/17/2009 | US20090311632 Developing method and developing apparatus |
| 12/15/2009 | US7632028 Substrate transfer apparatus |
| 12/08/2009 | US7630052 Exposure processing system, exposure processing method and method for manufacturing a semiconductor device |
| 11/17/2009 | US7618203 Substrate processing method, substrate processing apparatus, and computer readable storage medium |
| 10/27/2009 | US7609361 Substrate processing method and substrate processing system |
| 10/20/2009 | US7604424 Substrate processing apparatus |
| 10/14/2009 | CN201327563Y Novel manual and electric film winding machine |
| 10/13/2009 | US7600933 Substrate processing apparatus |
| 10/06/2009 | US7599042 Coating and developing apparatus, substrate processing method and computer-readable recording medium |
| 10/06/2009 | US7597492 Coating and developing system, coating and developing method and storage medium |
| 10/06/2009 | US7597491 Apparatus for and method of processing substrate |
| 10/01/2009 | US20090245881 Device and method for dosing toner material in an electrophotographic printer or copier |
| 09/22/2009 | US7591601 Coater/developer, coating/developing method, and storage medium |
| 09/22/2009 | US7591600 Method and system for monitoring photolithography processing based on a batch change in light sensitive material |
| 08/18/2009 | US7575382 Coating/developing apparatus and operation method thereof |
| 08/13/2009 | US20090199870 Glass washing machine with broken glass removal system |
| 07/28/2009 | US7566181 Controlling critical dimensions of structures formed on a wafer in semiconductor processing |
| 07/21/2009 | US7563043 Coating/developing apparatus and substrate transfer method |
| 07/21/2009 | US7563042 Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus |
| 07/14/2009 | US7561832 Device and method for dosing toner material in an electrophotographic printer or copier |
| 06/23/2009 | US7550043 Substrate processing method and substrate processing apparatus |
| 06/23/2009 | US7549811 Substrate treating apparatus |
| 06/11/2009 | US20090144918 Stethoscope cleaning assembly |
| 05/26/2009 | US7537401 Photo apparatus and method |
| 05/12/2009 | US7530749 Coater/developer and coating/developing method |
| 05/05/2009 | US7527442 Process for forming resist pattern, and resist coating and developing apparatus |
| 04/30/2009 | WO2006028951A3 Controlling critical dimensions of structures formed on a wafer in semiconductor processing |
| 04/28/2009 | US7525634 Monitoring apparatus and method particularly useful in photolithographically |
| 04/08/2009 | CN100476582C Nozzle assembly for applying a liquid to a substrate |
| 03/31/2009 | US7512456 Substrate processing apparatus |
| 03/31/2009 | US7510341 Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus |
| 03/24/2009 | US7508486 Exposure apparatus, exposure and developing system, and method of manufacturing a device |
| 03/19/2009 | US20090074402 Substrate processing apparatus and substrate processing method |
| 03/17/2009 | US7503710 Substrate processing system |
| 03/05/2009 | US20090059187 Coating and developing apparatus, coating and developing method, and storage medium |
| 03/04/2009 | CN100465788C Lithography equipment |
| 03/03/2009 | US7497633 Substrate processing apparatus and substrate processing method |
| 02/10/2009 | US7488127 Resist pattern forming apparatus and method thereof |
| 02/03/2009 | US7486377 Developing method and developing apparatus |
| 01/14/2009 | CN100451843C Liquid sprayer |
| 12/30/2008 | US7470098 Detecting apparatus and detecting method |
| 12/25/2008 | US20080318164 exposing imaged, negative working, photopolymerizable coating to high pressure stream of heated but otherwise untreated tap water, where water completely removes only less cohesive and adhesive (e.g., partially polymerized) regions, producing printing plate having image pattern of highly cohesive regions |
| 12/23/2008 | US7467901 Substrate heat treatment apparatus |
| 10/30/2008 | US20080267619 Developing apparatus, developing method, coating and developing system and storage medium |
| 10/28/2008 | US7441968 Spray development of photosensitive plates |
| 10/23/2008 | WO2008054638B1 High flow rate development of photosensitive plates |
| 10/22/2008 | CN201138422Y Film developing apparatus |
| 10/01/2008 | CN201126523Y Developing device for blue print paper aqueous developing solution |
| 09/23/2008 | US7427168 Developing method and developing unit |
| 09/17/2008 | CN201116968Y Automatic temperature-adjusting constant-temperature film developing barrel |
| 08/26/2008 | US7415747 Surface cleaning apparatus |
| 08/20/2008 | CN101247700A Stirring type wet process machine and stirring type wet process |
| 07/31/2008 | DE4307923B4 Plattenmaterial-Bearbeitungsvorrichtung Plate material processing apparatus |
| 07/29/2008 | US7404681 Coating methods and apparatus for coating |
| 07/22/2008 | US7403260 Coating and developing system |
| 07/22/2008 | US7403259 Lithographic processing cell, lithographic apparatus, track and device manufacturing method |
| 07/22/2008 | US7401988 Substrate processing apparatus and substrate processing method |
| 07/10/2008 | WO2008054638A3 High flow rate development of photosensitive plates |
| 06/19/2008 | US20080145799 Substrate developing method, substrate processing method and developing solution supply nozzle |
| 05/13/2008 | US7371023 Apparatus for processing substrates and method therefor |
| 05/08/2008 | WO2008054638A2 High flow rate development of photosensitive plates |
| 05/06/2008 | US7367725 Method for removing developing solution |
| 05/06/2008 | US7367710 Developing solution supply nozzle with stirrer |
| 05/01/2008 | US20080101792 Spray development of photosensitive plates |
| 04/29/2008 | US7364376 Substrate processing apparatus |
| 04/16/2008 | CN101164141A Methods and apparatus for cleaning an edge of a substrate |