Patents for G03B 27 - Photographic printing apparatus (25,157) |
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08/28/2007 | US7262829 Coating and developing apparatus and coating and developing method |
08/28/2007 | US7262828 Near-field photomask and near-field exposure apparatus including the photomask |
08/28/2007 | US7262365 Anti-abrasive mechanism confining flat flexible cable in position in flatbed image scanner |
08/28/2007 | US7261985 Large feature-shift coma sensitivity is simulated for a range of illumination conditions, resulting source sensitivity data is modeled and a practical array of source shapes, each of which is optimized to eliminate the effects of transverse distortion due to third-order coma, is identified |
08/23/2007 | WO2007094286A1 Image reading apparatus, and its manufacturing method |
08/23/2007 | WO2007079061A3 Projection system with beam homogenizer |
08/23/2007 | US20070196153 Lenticular printer |
08/23/2007 | US20070195307 Projection lens and method for performing microlithography |
08/23/2007 | US20070195306 Semiconductor wafer flatness correction apparatus and method |
08/23/2007 | US20070195305 Lithographic apparatus and device manufacturing method |
08/23/2007 | US20070195304 Large field of view projection optical system with aberration correctability |
08/23/2007 | US20070195303 Apparatus and method for providing fluid for immersion lithography |
08/23/2007 | US20070195302 Using isotopically specified fluids as optical elements |
08/23/2007 | US20070195301 Exposure apparatus, exposure method, and method for producing device |
08/23/2007 | US20070195300 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
08/23/2007 | US20070195299 Method for improving an Optical Imaging Property of a Projection Objective of a Microlithographic Projection Exposure Apparatus |
08/23/2007 | US20070195298 Imaging system |
08/23/2007 | US20070195297 Substrate carrying apparatus, sustrate carrying method, and coating and developing apparatus |
08/23/2007 | US20070195296 Lithographic apparatus and device manufacturing method |
08/23/2007 | US20070195295 Mask pattern data forming method, photomask and method of manufacturing semiconductor device |
08/22/2007 | EP1532484A4 Lithographic printing with polarized light |
08/22/2007 | EP1222630B1 Method and apparatus for dithering |
08/22/2007 | CN1333303C Temperature adjusting device for a LED light source |
08/21/2007 | US7259924 Microscope objective with axially adjustable correction mounts |
08/21/2007 | US7259889 Method and apparatus for dithering |
08/21/2007 | US7259836 Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider |
08/21/2007 | US7259835 Reticle-processing system |
08/21/2007 | US7259834 Method and apparatus having a reticle stage safety feature |
08/21/2007 | US7259833 Substrate support method |
08/21/2007 | US7259832 Lithographic apparatus and device manufacturing method |
08/21/2007 | US7259831 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation |
08/21/2007 | US7259830 Image exposure device |
08/21/2007 | US7259829 Lithographic apparatus and device manufacturing method |
08/21/2007 | US7259828 Alignment system and method and device manufactured thereby |
08/21/2007 | US7259827 Diffuser unit, lithographic apparatus, method for homogenizing a beam of radiation, a device manufacturing method and device manufactured thereby |
08/16/2007 | US20070190438 Method and apparatus for controlling light intensity and for exposing a semiconductor substrate |
08/16/2007 | US20070190430 Photo-mask stage |
08/16/2007 | US20070188840 Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, device, and light modulation element |
08/16/2007 | US20070188733 Manufacturing method of semiconductor device |
08/16/2007 | US20070188732 Stage apparatus and exposure apparatus |
08/16/2007 | US20070188731 Apparatus and method for reducing contamination in immersion lithography |
08/16/2007 | US20070188730 Exposure apparatus and device manufacturing method |
08/16/2007 | US20070188729 Projection Lens for a Microlithographic Projection Exposure Apparatus |
08/16/2007 | US20070188728 Exposure apparatus |
08/16/2007 | US20070188727 Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium |
08/16/2007 | US20070188726 Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium |
08/16/2007 | US20070188725 Exposure apparatus, exposure method, and exposure system |
08/16/2007 | US20070188724 Lithographic apparatus and stage apparatus |
08/16/2007 | US20070188723 Lithographic apparatus and device manufacturing method |
08/16/2007 | US20070188722 Optical system for creating an illuminated strip |
08/16/2007 | US20070188721 Exposure Apparatus |
08/16/2007 | DE102004016704B4 Verfahren zur Reduktion des Rastermaßes auf einer Halbleiterscheibe A process for the reduction of the modular dimension on a semiconductor wafer |
08/15/2007 | EP1446699B1 Method for optimizing and enhancing radiological films by cross image photographic processing and digitization |
08/15/2007 | CN1332268C Base fixing parts and device producing method |
08/14/2007 | US7256941 Lens array |
08/14/2007 | US7256873 Enhanced lithographic resolution through double exposure |
08/14/2007 | US7256872 Purging gas from a photolithography enclosure between a mask protective device and a patterned mask |
08/14/2007 | US7256871 Lithographic apparatus and method for calibrating the same |
08/14/2007 | US7256870 Method and apparatus for controlling iso-dense bias in lithography |
08/14/2007 | US7256869 Exposure apparatus and an exposure method |
08/14/2007 | US7256868 Projection exposure apparatus, device manufacturing method, and sensor unit |
08/14/2007 | US7256867 Lithographic apparatus and device manufacturing method |
08/14/2007 | US7256866 Lithographic apparatus and device manufacturing method |
08/14/2007 | US7256865 Methods and apparatuses for applying wafer-alignment marks |
08/14/2007 | US7256864 Liquid immersion lithography system having a tilted showerhead relative to a substrate |
08/14/2007 | US7256863 Sealing assembly, a lithographic projection apparatus, and a device manufacturing method |
08/14/2007 | US7255298 Magazine and image recording apparatus in which magazine is used |
08/09/2007 | US20070183044 Diffractive Optical Element, Illumination System Comprising the Same, and Method of Manufacturing Semiconductor Device Using Illumination System |
08/09/2007 | US20070182948 Semiconductor exposure method and method of controlling semiconductor exposure apparatus |
08/09/2007 | US20070182947 Lithographic apparatus and device manufacturing method |
08/09/2007 | US20070182946 Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus |
08/09/2007 | US20070182945 Exposure apparatus and device manufacturing method |
08/09/2007 | US20070182944 Lithographic apparatus and device manufacturing method |
08/09/2007 | US20070182943 Debris apparatus, system, and method |
08/09/2007 | US20070182942 Exposure device |
08/09/2007 | US20070182941 Projection exposure mask acceptance decision system, projection exposure mask acceptance decision method, method for manufacturing semiconductor device, and computer program product |
08/08/2007 | EP1814427A2 Fine stage z support apparatus |
08/08/2007 | EP1687829A4 Lithographic systems and methods with extended depth of focus |
08/08/2007 | CN1331341C Image scanning device and commercial equipment using the same device |
08/07/2007 | US7253931 Form fixing structure and image recognition apparatus having the structure |
08/07/2007 | US7253930 Scanner drive system |
08/07/2007 | US7253885 Wavelength selecting method, position detecting method and apparatus, exposure method and apparatus, and device manufacturing method |
08/07/2007 | US7253884 Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method |
08/07/2007 | US7253883 Machine for exposing printed circuit panels with gas balloons and mechanical spacers |
08/07/2007 | US7253882 Exposure method and exposure system |
08/07/2007 | US7253881 Methods and systems for lithographic gray scaling |
08/07/2007 | US7253880 Lithographic apparatus and device manufacturing method |
08/07/2007 | US7253879 Liquid immersion lithography system with tilted liquid flow |
08/07/2007 | US7253878 Exposure apparatus and device fabrication method |
08/07/2007 | US7253877 Exposure apparatus, and device manufacturing method |
08/07/2007 | US7253875 Lithographic apparatus and device manufacturing method |
08/07/2007 | US7253570 Automatic momentary secondary light source assembly |
08/07/2007 | US7251898 Transparent measuring device with enhanced visibility lines |
08/02/2007 | US20070177315 Combination current sensor and relay |
08/02/2007 | US20070177127 Wafer flatness evaluation method, wafer flatness evaluation apparatus carrying out the evaluation method, wafer manufacturing method using the evaluation method, wafer quality assurance method using the evaluation method, semiconductor device manufacturing method using the evaluation method and semiconductor device manufacturing method using a wafer evaluated by the evaluation method |
08/02/2007 | US20070177126 Wafer flatness evaluation method, wafer flatness evaluation apparatus carrying out the evaluation method, wafer manufacturing method using the evaluation method, wafer quality assurance method using the evaluation method, semiconductor device manufacturing method using the evaluation method and semiconductor device manufacturing method using a wafer evaluated by the evaluation method |
08/02/2007 | US20070177125 Substrate holding unit, exposure apparatus having same, exposure method, method for producing device, and liquid repellent plate |
08/02/2007 | US20070177124 Apparatus and method for reducing contamination in immersion lithography |
08/02/2007 | US20070177123 Lithographic projection apparatus and a device manufacturing method |
08/02/2007 | US20070177122 Lithographic apparatus, device manufacturing method and exchangeable optical element |