Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
06/2010
06/02/2010CN101019000B Thickness measurement technique based on interferometry surface figure
06/02/2010CN101013022B Method for random error elimination in optical element interference sampling data
06/01/2010US7728986 Systems and methods for digital detection of a tomographic signal
06/01/2010US7728984 Method for evaluating a measured parameter
06/01/2010US7728983 Diffraction grating based interferometric systems and methods
06/01/2010US7728982 Fiber-optic assay apparatus based on phase-shift interferometry
06/01/2010US7728981 Device for measuring the profile of very short single pulses
06/01/2010US7728976 Determining photoresist parameters using optical metrology
06/01/2010US7728962 Device for visualizing a mark on a spectacle lense
06/01/2010US7728958 Condition assessment method for a structure including a semiconductor material
05/2010
05/27/2010WO2010058165A1 Interferometric system for profiling surfaces with application in the field of manufacturing radioastronomic antennas and corresponding method
05/27/2010WO2010058090A1 Novel method and apparatus for forensic applications
05/27/2010WO2010057247A1 A system, device and method for detecting seismic acceleration
05/27/2010US20100128284 Optical sensor for extreme environments
05/27/2010US20100128283 Interferometric systems and methods featuring spectral analysis of unevenly sampled data
05/27/2010US20100128281 Microstructural feature and material property monitoring device for metallic material
05/27/2010US20100128280 Scan error correction in low coherence scanning interferometry
05/27/2010US20100128279 Scanning microscope using heterodyne interferometer
05/27/2010US20100128278 Fiber-based interferometer system for monitoring an imaging interferometer
05/27/2010US20100128276 Compound reference interferometer
05/27/2010DE102009038889A1 Verfahren zur schnellen Bildrekonstruktion Method for fast image reconstruction
05/27/2010DE102008041284B4 Ophthalmo-Operationsmikroskopsystem mit OCT-Messeinrichtung Ophthalmic surgical microscope system with OCT-measuring device
05/27/2010CA2744255A1 A system, device and method for detecting seismic acceleration
05/26/2010EP2189751A1 Method and apparatus for the elimination of low-frequency drifts of the set-point in control systems
05/26/2010EP2189750A1 Method for calibrating the gain factors of the sensor pixels in an interferometer
05/26/2010EP2188587A1 Apparatuses, systems, and methods for low-coherence interferometry (lci)
05/26/2010EP1444482B1 Scanning interferometer for aspheric surfaces and wavefronts
05/26/2010CN201488699U reticle projector
05/26/2010CN1904544B Laser tracking interferometer
05/26/2010CN101050940B High precision double frequency laser interferometer signal subdivision system
05/20/2010WO2010056658A2 Phase-shifting interferometry in the presence of vibration
05/20/2010US20100125432 Measurement apparatus, measurement method, computer, program, and exposure apparatus
05/20/2010US20100123902 Method for Determining the Dynamic Range of Volume Holographic Memories
05/20/2010DE10248914B4 Verfahren zur Beobachtung eines Objekts und Satellit zur Anwendung des Verfahrens A method of observing an object satellite and for applying the method
05/20/2010DE102009013878B3 Sensoranordnung und Detektionsverfahren Sensor array and detection method
05/20/2010CA2685715A1 Process for calibrating interpixel gain in an interferometer
05/19/2010CN201476761U White light interference three-dimensional outline measuring instrument
05/19/2010CN101711341A 干涉仪促动器 Interferometer actuator
05/19/2010CN101710209A Compound microscope
05/19/2010CN101709956A Optical fiber point diffraction phase shifting interferometry of optical plane surface shape
05/19/2010CN101166947B System and method for providing chirped electromagnetic radiation
05/19/2010CN100998494B An optical image-measuring device
05/18/2010US7720526 Self-interfering tomography system
05/18/2010US7719736 Components for optical qubits in the radio frequency basis
05/18/2010US7719693 Interferometry system chamber viewing window
05/18/2010US7719691 Wavefront measuring apparatus for optical pickup
05/18/2010US7719690 Optical inclination sensor
05/18/2010US7719689 AE/ultrasound detection system, and material monitoring apparatus and nondestructive inspection apparatus equipped the system
05/18/2010US7719688 Optical device and method of making the same
05/18/2010US7719687 Apparatus for measuring reflection characteristics of object surfaces
05/18/2010US7719668 Confocal fiber-optic laser device and method for intraocular lens power measurements
05/18/2010US7718940 Compound-eye imaging apparatus
05/14/2010WO2010052943A1 Projection device, projection device control method, and projection device control program
05/13/2010US20100121202 System and method for positioning a probe
05/13/2010US20100118313 Phase-shifting interferometry in the presence of vibration
05/13/2010US20100118312 Phase-shifting interferometry in the presence of vibration using phase bias
05/13/2010US20100118292 Cross-chirped interferometry system and method for light detection and ranging
05/12/2010EP2183543A1 Motion detection system and method
05/12/2010DE112005000639B4 Vorrichtung und Verfahren zur kombinierten interferometrischen und abbildungsbasierten Geometrieerfassung, insbesondere in der Mikrosystemtechnik Apparatus and method for combined interferometric and abstract geometry-based detection, especially in microsystem technology
05/12/2010DE102008062879A1 Verfahren und Anordnung zur skalierbaren konfokalen Interferometrie Method and apparatus for scalable confocal interferometry
05/12/2010DE102008057593A1 Optical diffraction arrangement for use in e.g. optical spectral apparatus, has mirror whose reflection plane is aligned parallel to and in symmetry plane of optical diffraction structure, where rays are reflected on diffraction structure
05/12/2010CN1726501B Image scanning device having a system for determining the distance to a target
05/12/2010CN101706253A Filtering phase discriminator type dynamic interferometry system
05/11/2010US7715017 Dynamic fringe phase detection for measurement of very small spacing
05/11/2010US7715015 Adaptive mixing for high slew rates
05/06/2010WO2010050296A1 Optical tomographic image forming method
05/06/2010US20100115671 inertial positioner and an optical instrument for precise positioning
05/06/2010US20100112733 Measuring device, exposure apparatus, and device manufacturing method
05/06/2010US20100110447 Compact gas sensor using high reflectance terahertz mirror and related system and method
05/06/2010US20100110446 Scanning Interferometric Methods and Apparatus for Measuring Aspheric Surfaces and Wavefronts
05/06/2010US20100110442 Tandem Fabry-Perot Etalon Cylindrical Beam Volume Hologram for High Resolution/Large Spectral Range Diffuse Light Spectroscopy
05/06/2010US20100110440 Optical Pulse Duration Measurement
05/06/2010US20100110403 Measurement apparatus, exposure apparatus, and device manufacturing method
05/06/2010DE102008053954A1 Fokuskorrektur in Lithographieanlagen mittels Linsenaberrationssteuerung Focus correction in lithography equipment using Linsenaberrationssteuerung
05/05/2010EP2182319A1 Interferometric distance measuring apparatus
05/05/2010EP1405030B1 Scanning interferometer for aspheric surfaces and wavefronts
05/05/2010CN1991297B Approximate co-optical path outer difference interference offset measuring system
05/05/2010CN1957225B Polarising interferometer with removal or separation of error beam caused by leakage of polirised light
05/05/2010CN1766740B Optical position assessment apparatus and method
05/05/2010CN101701792A Gauge block automatic verification system and verification method
05/04/2010US7710581 Wavelength monitoring method and apparatus and method of making same
05/04/2010US7710577 Multiplexing spectrum interference optical coherence tomography
05/04/2010US7710573 Device and method for the non-invasive detection and measurement of the properties of a medium
05/04/2010US7710565 Method of correcting systematic error in a metrology system
05/04/2010CA2393307C Shearographic imaging machine
04/2010
04/29/2010US20100103961 Mode-locked laser device, ultrashort pulse light source device, broad bandwidth light source device, non-linear optical microscopy device, recording device and optical coherence tomography device
04/29/2010US20100103516 Head-tracking enhanced stereo glasses
04/29/2010US20100103433 Differential critical dimension and overlay metrology apparatus and measurement method
04/29/2010US20100103429 Integrated optical sensor
04/29/2010US20100103403 Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method
04/29/2010DE102009025562A1 Verfahren zum optischen Untersuchen von Schichten Method for optically inspecting layers
04/28/2010CN1677164B Optical analyzers of polarization properties
04/28/2010CN101699328A Optical grating agglutination alignment mechanism in space heterodyne interferometer
04/27/2010US7705998 Method for evaluating an optical imaging process
04/27/2010US7705996 Methods and systems for ultra-precise measurement and control of object motion in six degrees of freedom by projection and measurement of interference fringes
04/27/2010US7705994 Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs
04/27/2010US7705993 Sampling of optical signals
04/27/2010US7705992 Optical coherence tomography system
04/27/2010US7705991 Gas concentration measuring apparatus
04/27/2010US7705975 Reticle
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