Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2014
10/07/2014US8854625 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring
10/07/2014US8853653 Apparatus and techniques for controlling ion implantation uniformity
10/07/2014US8852706 Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
10/07/2014US8852695 Optical barriers, waveguides, and methods for fabricating barriers and waveguides for use in harsh environments
10/07/2014US8852687 Organic layer deposition apparatus
10/07/2014US8852412 Magnetron source and method of manufacturing
10/07/2014US8852411 Sputtering apparatus
10/07/2014US8852406 Method for synthesis of cubic boron nitride
10/07/2014US8852346 Mask frame assembly for thin layer deposition and organic light emitting display device
10/07/2014US8852345 Method and apparatus for electronic device manufacture using shadow masks
10/07/2014US8852344 Large area deposition in high vacuum with high thickness uniformity
10/07/2014US8852305 Nanolaminated coated cutting tool
10/07/2014US8851274 Substrate treatment system
10/07/2014US8851009 Alignment master glass for tensioning vapor deposition mask, method for manufacturing the same, and method for tensioning vapor deposition mask using the same
10/02/2014WO2014160357A1 Color shift improvement after heat treatment
10/02/2014WO2014160245A1 Directed vapor deposition of environmental barrier coatings
10/02/2014WO2014157688A1 Coated cutting tool and method for producing same
10/02/2014WO2014157639A1 Organic el element and method for manufacturing same
10/02/2014WO2014157560A1 Coated tool and method for producing same
10/02/2014WO2014157519A1 Cylindrical sputtering target and process for producing same
10/02/2014WO2014157312A1 Transparent conductive multilayer film and method for producing same
10/02/2014WO2014157187A1 Cobalt sputtering target and production method therefor
10/02/2014WO2014157068A1 Deposition mask, preparatory body for deposition mask, method for manufacturing deposition mask, and method for manufacturing organic semiconductor element
10/02/2014WO2014157054A1 Sputtering silicide target and method for producing same
10/02/2014WO2014157019A1 Semiconductor device
10/02/2014WO2014157000A1 Carbon-doped zinc oxide film and method for producing same
10/02/2014WO2014156918A1 Niobium sputtering target
10/02/2014WO2014156897A1 Rigid decorative member having gray-tone layer
10/02/2014WO2014156750A1 Evaporation source device
10/02/2014WO2014156739A1 Laminated coating film having superior wear resistance
10/02/2014WO2014156699A1 Coated cutting tool
10/02/2014WO2014156601A1 Igzo sputtering target and igzo film
10/02/2014WO2014156567A1 Sputtering device
10/02/2014WO2014156565A1 Nanoparticle differentiation device
10/02/2014WO2014156497A1 Mgo-tio sintered compact target and method for producing same
10/02/2014WO2014156448A1 Tool comprising surface-coated sintered boron nitride object
10/02/2014WO2014156447A1 Surface-coated boron nitride sintered tool
10/02/2014WO2014156446A1 Surface-coated boron nitride sintered tool
10/02/2014WO2014156235A1 Igzo sputtering target, igzo film, and production method for igzo target
10/02/2014WO2014156234A1 Ito sputtering target and method for manufacturing same
10/02/2014WO2014156129A1 Film forming device and film forming method
10/02/2014WO2014155939A1 Mask frame unit, mask apparatus, and processing method
10/02/2014WO2014155883A1 Zinc oxide sputtering target
10/02/2014WO2014155859A1 Zinc oxide sputtering target
10/02/2014WO2014155633A1 Hard film for machining tools and hard film-coated metal machining tool
10/02/2014WO2014155632A1 Hard film for tools, production method therefor, and hard film-coated metal machining tool
10/02/2014WO2014154894A1 Dense, hard coatings on substrates using hipims
10/02/2014WO2014154746A1 Locking method and vacuum substrate treatment system
10/02/2014WO2014154733A1 Multilayer mirror assembly
10/02/2014WO2014154692A1 Deposition platform for flexible substrates and method of operation thereof
10/02/2014WO2014154356A1 Hard material layers with selected thermal conductivity
10/02/2014WO2014100453A9 Dual-detection residual gas analyzer
10/02/2014US20140295674 Angled gas cluster ion beam
10/02/2014US20140295600 Evaporation source assembly, film deposition device and film deposition method
10/02/2014US20140295156 Coated Article With Dark Color
10/02/2014US20140295141 Making the Surface of an Article Visibly Line Free
10/02/2014US20140295128 Hard and low friction nitride coatings
10/02/2014US20140295081 Treatment of steel surfaces
10/02/2014US20140295071 Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films
10/02/2014US20140294676 Hydrogen sensor with active layer and method of manufacturing hydrogen sensors
10/02/2014US20140291147 Target materials for fabricating solar cells
10/02/2014US20140291146 Sputtering apparatus
10/02/2014US20140291141 Nanostructure Lithium Ion Battery
10/02/2014US20140291140 Method and apparatus for plasma generation
10/02/2014DE102013205709A1 Schleusenverfahren und Vakuumsubstratbehandlungsanlage Lock method and vacuum substrate treatment plant
10/02/2014DE102013103133A1 Transportsystem einer Vakuumbehandlungsanlage Transport system for vacuum treatment plant
10/02/2014DE102013005437A1 Hartstoffschichten mit ausgewählter Wärmeleitfähigkeit Hard coatings with thermal conductivity of selected
10/02/2014DE102010040640B4 Substratbehandlungsanlage Substrate treatment plant
10/01/2014EP2785152A1 Plasma generation source and vacuum plasma processing apparatus provided with same
10/01/2014EP2784799A1 Dense, hard coatings on Substrates using HIPIMS
10/01/2014EP2784183A1 Composite body, collector member, fuel battery cell device, and fuel battery device
10/01/2014EP2784176A1 Deposition platform for flexible substrates and method of operation thereof
10/01/2014EP2784174A1 High-purity copper sputtering target
10/01/2014EP2784173A1 Sputtering target and method for producing same
10/01/2014EP2783078A1 Turbomachine component with a parting joint, and a steam turbine comprising said turbomachine component
10/01/2014EP2783022A1 Stain-resistant cooking surface and cookware item or electrical household appliance comprising such a cooking surface
09/2014
09/30/2014US8847470 Method for producing piezoelectric thin-film element, piezoelectric thin-film element, and member for piezoelectric thin-film element
09/30/2014US8846547 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method
09/30/2014US8846530 Method for forming semiconductor region and method for manufacturing power storage device
09/30/2014US8846518 Multilayer construction
09/30/2014US8846506 Enhanced electron mobility at the interface between Gd2O3(100)/N-Si(100)
09/30/2014US8846451 Methods for depositing metal in high aspect ratio features
09/30/2014US8846217 Surface-coated tool
09/30/2014US8846200 Gas-barrier film, process for producing same, member for electronic device, and electronic device
09/30/2014US8845913 Ion radiation damage prediction method, ion radiation damage simulator, ion radiation apparatus and ion radiation method
09/30/2014US8845868 Seal and fixation assembly for a rotating cylindrical magnetron electrode
09/30/2014US8845867 Method for manufacturing magnetoresistance effect element using simultaneous sputtering of Zn and ZnO
09/30/2014US8845866 Optoelectronic devices having electrode films and methods and system for manufacturing the same
09/30/2014US8845808 Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device
09/30/2014US8845807 Linear evaporation source and deposition apparatus having the same
09/25/2014WO2014152836A1 Method for processing a surface
09/25/2014WO2014151788A1 Spallation-resistant thermal barrier coating
09/25/2014WO2014150664A1 Plating stack to condition a bonding surface
09/25/2014WO2014150335A1 Multiple coating configuration
09/25/2014WO2014150311A1 Wear-resistant claddings
09/25/2014WO2014150071A1 Tubular light source having overwind
09/25/2014WO2014149968A1 Pvd target for self-centering process shield
09/25/2014WO2014149966A1 Self-centering process shield
09/25/2014WO2014149919A1 Plasma emission monitor and process gas delivery system
09/25/2014WO2014149677A1 Simplified lamp design
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