Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/2014
12/02/2014US8900419 Method of switching magnetic flux distribution
12/02/2014US8900418 Yttrium and titanium high-k dielectric films
12/02/2014US8900366 Apparatus for depositing a multilayer coating on discrete sheets
12/02/2014US8900365 Apparatus for depositing material on elongate substrate
12/02/2014US8900336 Cutting tool
12/02/2014US8899565 Sputtering device with gas injection assembly
12/02/2014US8899171 Gas enclosure assembly and system
12/02/2014DE202014105707U1 Hohlkathodenzerstäubung bei Atmosphärendruck Hohlkathodenzerstäubung at atmospheric pressure
12/02/2014DE202014105706U1 Kathodenzerstäubung bei Atmosphärendruck Sputtering at atmospheric pressure
12/02/2014DE202014105705U1 Ionengestützte Plasmaprozesse bei Atmosphärendruck Ion-assisted plasma processes at atmospheric pressure
11/2014
11/27/2014US20140349429 Method for manufacturing a display unit
11/27/2014US20140349095 Break resistant and shock resistant sapphire plate
11/27/2014US20140349092 Surface-tensioned sapphire plate
11/27/2014US20140346500 Oxide semiconductor film and formation method thereof
11/27/2014US20140346039 Sputtering Target for Magnetic Recording Film
11/25/2014US8898811 Metal nanopillars for surface-enhanced Raman spectroscopy (SERS) substrate and method for preparing same
11/25/2014US8897910 Particle beam-assisted ultra-precision machining method for single-crystal brittle materials
11/25/2014US8895951 Closed loop sputtering controlled to enhance electrical characteristics in deposited layer
11/25/2014US8895874 Indium-less transparent metalized layers
11/25/2014US8895450 Low resistivity tungsten PVD with enhanced ionization and RF power coupling
11/25/2014US8895160 Product and method for its manufacture within material processing
11/25/2014US8895150 Coated glass surfaces and method for coating a glass substrate
11/25/2014US8895115 Method for producing an ionized vapor deposition coating
11/25/2014US8895106 Process for coating discrete articles with a zinc-based alloyed layer
11/25/2014US8894867 Method for producing and structuring a zinc oxide layer and zinc oxide layer
11/25/2014US8894828 FIB process for selective and clean etching of copper
11/25/2014US8894827 Electrochromic tungsten oxide film deposition
11/25/2014US8894826 Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering
11/25/2014US8894825 Sputtering target, method for manufacturing the same, manufacturing semiconductor device
11/25/2014US8894824 Porous coatings for biomedical implants
11/25/2014US8894769 Material evaporation chamber with differential vacuum pumping
11/25/2014US8894522 Drive end-block for a rotatable magnetron
11/25/2014US8893642 Airflow management for low particulate count in a process tool
11/20/2014US20140342538 Ion implantation system and method
11/20/2014US20140342497 Sodium/molybdenum composite metal powders, products thereof, and methods for producing photovoltaic cells
11/20/2014US20140342149 Gas barrier film and method for producing gas barrier film
11/20/2014US20140342104 Ag alloy film for reflective electrodes, and reflective electrode
11/20/2014US20140342102 Small Feature Size Fabrication Using a Shadow Mask Deposition Process
11/20/2014US20140341169 Allocation of Sub-Channels of MIMO Channels Using a Basestation with a Plurality of Sectors
11/20/2014US20140339917 Method for providing sequential power pulses
11/20/2014US20140339545 Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device
11/20/2014US20140339535 Display unit and light emitting device
11/20/2014US20140339074 Wafer clamp assembly for holding a wafer during a deposition process
11/20/2014US20140339073 Sputtering Target and Oxide Semiconductor Film
11/18/2014US8889547 Sputtering and aligning multiple layers having different boundaries
11/18/2014US8889477 Method for forming thin film utilizing sputtering target
11/18/2014US8889251 Alkali resistant optical coatings for alkali lasers and methods of production thereof
11/18/2014US8889223 Physical vapor deposition apparatus and physical vapor deposition method
11/18/2014US8889214 Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display
11/18/2014US8889169 Drug delivery system and method of manufacturing thereof
11/18/2014US8888966 Protective film mainly composed of a tetrahedral amorphous carbon film and a magnetic recording medium having the protective film
11/18/2014US8888965 Non-stoichiometric titanium nitride films
11/18/2014US8888918 Vapor collection
11/18/2014US8887662 Pressure masking systems and methods for using the same
11/18/2014US8887532 Glass-forming tools and methods
11/13/2014US20140335376 Electrically conductive underlayer to grow fept granular media with (001) texture on glass substrates
11/13/2014US20140335363 Indium-containing oxide film and preparing method thereof
11/13/2014US20140335335 Scratch-Resistant Articles with Retained Optical Properties
11/13/2014US20140335328 Nanowire manufacturing device having nanowire manufacturing substrate and nanowire adhesive film and nanowire manufactured using the same
11/13/2014US20140335320 High gloss molding sheet having metallic effect using ultraviolet curable resin layer and a method for manufacturing the same
11/13/2014US20140335271 Boats configured to optimize vaporization of precursor materials by material deposition apparatuses
11/13/2014US20140334006 Scratch-Resistant Articles with a Gradient Layer
11/13/2014US20140332735 Complex oxide sintered body, sputtering target, transparent conductive oxide film, and method for producing same
11/13/2014US20140332371 Transparent conductive oxides
11/13/2014US20140332370 Filtered Cathodic Arc Deposition Apparatus and Method
11/13/2014US20140332369 Multidirectional racetrack rotary cathode for pvd array applications
11/11/2014US8884476 Hybrid dielectric film for high temperature application
11/11/2014US8884287 Semiconductor device and manufacturing method thereof
11/11/2014US8884194 Heating plate with planar heater zones for semiconductor processing
11/11/2014US8883947 Method of forming thin film
11/11/2014US8883654 Method of treating an oxidized layer of metal nitride
11/11/2014US8883555 Electronic device, manufacturing method of electronic device, and sputtering target
11/11/2014US8883263 Coated film manufacturing method and coating machine
11/11/2014US8883259 Thin film deposition apparatus
11/11/2014US8883250 Methods of rejuvenating sputtering targets
11/11/2014US8883249 Method of producing a perpendicular magnetic recording medium
11/11/2014US8883246 Plasma activated chemical vapour deposition method and apparatus therefor
11/11/2014US8882976 Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same
11/11/2014US8882975 Sb-Te base alloy sinter sputtering target
11/11/2014US8882971 Sputtering apparatus and manufacturing method of semiconductor light-emitting element
11/11/2014US8882922 Organic layer deposition apparatus
11/11/2014US8882918 Vapor deposition apparatus
11/11/2014US8882917 Substrate processing including correction for deposition location
11/11/2014US8882914 Processing substrates using site-isolated processing
11/11/2014US8882870 Coated tool
11/11/2014US8882556 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
11/11/2014US8881677 Shadow mask for patterned deposition on substrates
11/11/2014US8881676 Mask frame assembly for thin film deposition
11/06/2014US20140329095 Method and Apparatus for Producing a Reflection-Reducing Layer on a Substrate
11/06/2014US20140329073 Solar selective coating having high thermal stability and a process for the preparation thereof
11/06/2014US20140329070 Carbon-based coating
11/06/2014US20140329026 Ceramic barrier layers
11/06/2014US20140329025 Solid precursor-based delivery of fluid utilizing controlled solids morphology
11/06/2014US20140326697 Conductive transparent film and method for making same
11/06/2014US20140326482 Iridium Oxide Coating with Cauliflower Morphology for Functional Electrical Stimulation Applications
11/06/2014US20140326179 Apparatus and techniques for controlling ion implantation uniformity
11/06/2014US20140326176 A support including an electrostatic substrate carrier
11/04/2014US8878322 Perovskite manganese oxide thin film and manufacturing method therefor
11/04/2014US8877557 Method of manufacturing organic light emitting display device
11/04/2014US8877335 Corrosion-resistant member and method of manufacturing the same
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