Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2014
11/04/2014US8877299 Method for enhancing a substrate using gas cluster ion beam processing
11/04/2014US8877291 Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
11/04/2014US8877021 Chromic oxide powder for sputtering target, and sputtering target manufactured from such chromic oxide powder
11/04/2014US8877019 Sputtering apparatus, sputter deposition method, and analysis apparatus
11/04/2014US8876976 Chemical vapor deposition apparatus for equalizing heating temperature
11/04/2014US8876975 Thin film deposition apparatus
11/04/2014US8875652 Liquid adhesive boundary control
10/2014
10/30/2014US20140322507 Systems, methods, and apparatus for production coatings of low-emissivity glass
10/30/2014US20140322063 Process for producing fept-based sputtering target
10/30/2014US20140322062 Process for producing fept-based sputtering target
10/30/2014US20140320969 Methods for fabrication of stable ultra-low reflective surface and the ultra-low reflective surface itself
10/30/2014US20140318956 Sputtering target and method for producing the same
10/30/2014US20140318949 Method of Making, and, Analyte Sensor
10/30/2014US20140318948 Silicon target for sputtering film formation and method for forming silicon-containing thin film
10/30/2014US20140318947 Sputter target and sputtering methods
10/30/2014US20140318452 Multi-zone modular coater
10/28/2014US8872615 Magnetic nanoclusters
10/28/2014US8872428 Plasma source with vertical gradient
10/28/2014US8871618 In-situ fabrication method for silicon solar cell
10/28/2014US8871366 Corrosion resistant coating for copper substrate
10/28/2014US8871362 Tool with multi-layered metal oxide coating
10/28/2014US8871336 Coating layer with low-friction for vehicle component and method for producing the same
10/28/2014US8871306 Structural components for oil, gas, exploration, refining and petrochemical applications
10/28/2014US8871144 High-purity Ni-V alloy target therefrom high-purity Ni-V alloy thin film and process for producing high-purity Ni-V alloy
10/28/2014US8871143 Amalgam method for forming a sputter target useful in the manufacture of thin-film solar photovoltaic cells
10/28/2014US8871119 Composite oxide sintered body and sputtering target comprising same
10/28/2014US8871064 Electromagnet array in a sputter reactor
10/28/2014US8871027 Electrical contacts for use with vacuum deposition sources
10/28/2014US8870974 Thin film battery fabrication using laser shaping
10/23/2014US20140315014 Coated Article Having A Vivid Color
10/23/2014US20140314964 Method and apparatus for additive manufacturing
10/23/2014US20140312336 Organic display panel, organic display device, organic light emitting device, method of manufacture of these, and thin film formation method
10/23/2014US20140311895 Glow Discharge Apparatus and Method with Lateral Rotating Arc Cathodes
10/23/2014US20140311893 Sputtering system and method using direction-dependent scan speed or power
10/23/2014US20140311892 Reactive sputtering process
10/23/2014US20140311409 Vapor deposition apparatus having pretreatment device that uses plasma
10/21/2014US8866144 Thin film semiconductor device having silicon nitride film
10/21/2014US8865810 Formed article, method for producing same, electronic device member, and electronic device
10/21/2014US8865314 Press molding glass material, manufacturing method thereof, and manufacturing method of optical element
10/21/2014US8865271 High rate deposition for the formation of high quality optical coatings
10/21/2014US8865268 Method and apparatus
10/21/2014US8865258 Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
10/21/2014US8864966 Coating mask for electrolytically coating a peripheral region on an outer surface of a cylindrical body
10/21/2014US8864959 Method for manufacturing workpieces with ion-etched surface
10/21/2014US8864958 Method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index
10/21/2014US8864957 Vanadium oxide thin films
10/21/2014US8864956 Multi-component deposition
10/21/2014US8864955 Process to apply heater function to plastic substrate
10/21/2014US8864954 Sputtering lithium-containing material with multiple targets
10/21/2014US8864861 Nanolaminated coated cutting tool
10/21/2014US8864818 TiNxOy Modified surface for an implantable device and a method of producing the same
10/16/2014US20140308528 Systems, methods, and apparatus for production coatings of low-emissivity glass
10/16/2014US20140308521 Apparatus and method for sputter-deposited coatings on fluidized particle beds
10/16/2014US20140306144 Magnetron sputtering target and process for producing the same
10/16/2014US20140305802 Self-ionized and inductively-coupled plasma for sputtering and resputtering
10/16/2014US20140305793 Anti-static wrapper for electronic component wrapping, coated with nano film and manufacturing method thereof
10/16/2014US20140305792 Hipims layering
10/14/2014US8862259 Processing data managing system, processing system, and processing device data managing method
10/14/2014US8859438 Vapor deposition method, vapor deposition device and organic EL display device
10/14/2014US8859325 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
10/14/2014US8859161 Proton conductive inorganic thin film, method of forming the same, and fuel cell including the proton conductive inorganic thin film
10/14/2014US8859116 Multi-layer coating
10/14/2014US8859114 Coating for improved wear resistance
10/14/2014US8859104 Transparent conducting oxides
10/14/2014US8859078 Friction piece in a lubricated medium, working at contact pressures higher than 200 MPa
10/14/2014US8859043 Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
10/14/2014US8859032 Organic el device manufacturing method and apparatus
10/14/2014US8858877 Sputtering target material
10/14/2014US8858873 Nickel-based superalloys for use on turbine blades
10/14/2014US8858844 In—Ga—Zn—O type sputtering target
10/14/2014US8858766 Combinatorial high power coaxial switching matrix
10/14/2014US8858763 Apparatus and methods for deposition and/or etch selectivity
10/14/2014US8858714 Injector for a vacuum evaporation source
10/14/2014US8858674 FePt—C-based sputtering target and process for producing the same
10/14/2014US8858666 Tool coating
10/09/2014WO2014163911A2 Cylinder liners with adhesive metallic layers and methods of forming the cylinder liners
10/09/2014WO2014163009A1 Gas barrier film and method for producing same
10/09/2014WO2014162999A1 Piezoelectric film and method for manufacturing same
10/09/2014WO2014162665A1 Processing device and method for measuring workpiece temperature in processing device
10/09/2014WO2014162125A1 Bio control activity surface
10/09/2014WO2014161759A1 Apparatus for the vacuum treatment of substrates
10/09/2014US20140302332 Fluorinated ether compound, fluorinated ether composition and coating liquid, and substrate having surface-treated layer and method for its production
10/09/2014US20140302252 Low Energy Ion Milling or Deposition
10/09/2014US20140302238 Apparatus and Method for the Evaporation and Deposition of Materials
10/09/2014US20140301887 Fept-c-based sputtering target and process for producing the same
10/09/2014US20140300978 Surface plasmon resonance in thin films
10/09/2014US20140299781 Method for producing a neutron detector component comprising a boron carbide layer for use in a neutron detecting device
10/09/2014US20140299466 High-density metallic sputtering targets
10/09/2014US20140299464 Antistatic coating
10/09/2014DE102013220383A1 Metall-Trennelement für eine Brennstoffzelle und Herstellungsverfahren dafür Metal separator for a fuel cell and manufacturing method thereof
10/09/2014DE102013206210A1 Vakuumbeschichtungsvorrichtung und Verfahren zur Mehrfachbeschichtung The vacuum deposition apparatus and method for multi-coating
10/09/2014DE102013103472A1 Vakuumbetriebskomponente und Vakuumprozessanordnung Vacuum operation component and vacuum processing arrangement
10/09/2014DE102013005868A1 Vorrichtung zur Vakuumbehandlung von Substraten Apparatus for vacuum processing of substrates
10/09/2014DE102010041858B4 Verfahren und Vorrichtung zur Schichtdickenkontrolle bei der Beschichtung von Substraten im Vakuum Method and apparatus for coating thickness control in the coating of substrates in a vacuum
10/08/2014EP2786180A2 Yttrium oxide coated optical elements with improved mid-infrared performance
10/08/2014EP2785892A1 Closed loop control
10/08/2014EP2785891A2 Diffusion blocking layer in an exhaust treatment unit
10/08/2014EP2785881A2 Cooling element and method for manufacturing a cooling element
10/08/2014EP2785764A1 Metallized multilayer structure made of specific polycarbonates with low coefficient of thermal expansion
10/08/2014EP2785661A2 Optical coating method, apparatus and product
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