| Patents for H02N 1 - Electrostatic generators or motors using a solid moving electrostatic charge carrier (3,310) |
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| 09/26/2002 | WO2002075911A1 High efficiency alternating and direct current electrostatic motor |
| 09/26/2002 | WO2002037892A3 Operating element |
| 09/26/2002 | WO2001011411A9 Microelectromechanical optical switch and method of manufacture thereof |
| 09/26/2002 | US20020135855 Apparatus and method for 2-dimensional steered-beam nxm optical switch using single-axis mirror arrays |
| 09/26/2002 | US20020135329 Method for linearization of an actuator via force gradient modification |
| 09/19/2002 | US20020130586 Bi-stable electrostatic comb drive with automatic braking |
| 09/19/2002 | US20020129857 Microvalve devices |
| 09/18/2002 | EP1240708A2 Balanced microdevice and rotary electrostatic microactuator for use therewith |
| 09/18/2002 | CN1370284A Microelectromechanical optical switch and method of manufacture thereof |
| 09/17/2002 | US6450702 Micro actuator having clamping parts |
| 09/12/2002 | US20020125790 MEMS actuator with lower power consumption and lower cost simplified fabrication |
| 09/12/2002 | US20020125789 Micro-mover with balanced dynamics |
| 09/11/2002 | EP1239580A2 Micro-mover system |
| 09/10/2002 | US6446326 Method for manufacturing a hard disk read/write unit, with micrometric actuation |
| 09/05/2002 | US20020122728 Electrohydrodynamicly enhanced micro cooling system for integrated circuits |
| 09/05/2002 | US20020121908 Method and device for inspecting a microactuator |
| 09/05/2002 | US20020121839 Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same |
| 09/05/2002 | US20020121838 Method to prevent charging effects in electrostatic devices |
| 09/04/2002 | EP1183464A4 Method and apparatus for energy extraction |
| 09/03/2002 | US6445107 Single stage microactuator for multi-dimensional actuation |
| 09/03/2002 | US6443704 Electrohydrodynamicly enhanced micro cooling system for integrated circuits |
| 08/29/2002 | US20020117611 Object inspection and/or modification system and method |
| 08/20/2002 | US6437902 Optical beam steering switching system |
| 08/15/2002 | US20020109419 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit |
| 08/13/2002 | US6433465 Energy-harvesting device using electrostrictive polymers |
| 08/01/2002 | US20020101573 Electron exposure apparatus |
| 08/01/2002 | US20020101129 Damped micromechanical device and method for making same |
| 07/31/2002 | EP1226945A1 Electrostatically-actuated device |
| 07/25/2002 | WO2002027909A3 Apparatus for switchng and manipulating particles and method of use thereof |
| 07/25/2002 | US20020097303 Electrostatically-actuated device having a corrugated multi-layer membrane structure |
| 07/23/2002 | US6424504 Microactuator, magnetic head device, and magnetic recording apparatus |
| 07/18/2002 | US20020093446 PWM-based measurement interface for a micro-machined electrostatic actuator |
| 07/18/2002 | US20020093251 Actuator with a flexure arrangement to accommodate a long range of motion |
| 07/17/2002 | EP1223665A1 Improvements in or relating to micro-machines |
| 07/17/2002 | EP1223664A2 Actuator with a flexure arrangement to accomodate a long range of motion |
| 07/16/2002 | US6420814 Spiral wound transducer |
| 07/11/2002 | US20020089804 Circuit topology for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices |
| 07/10/2002 | CN2500023Y Electric energy output device of directional static field |
| 07/04/2002 | WO2001077001A3 Microelectromechanical apparatus for elevating and tilting a platform |
| 07/02/2002 | US6414911 Flying optical head with dynamic mirror |
| 06/27/2002 | WO2002050990A1 Device comprising a variable-rigidity mobile structure preferably with electrostatic control |
| 06/25/2002 | US6411589 System and method for forming electrostatically actuated data storage mechanisms |
| 06/25/2002 | US6411493 Apparatus for generating thrust using a two dimensional, asymmetrical capacitor module |
| 06/25/2002 | US6411013 Microactuator array with integrally formed package |
| 06/20/2002 | WO2002049199A1 Electrostatic device |
| 06/20/2002 | US20020074896 Electrostatic actuator |
| 06/20/2002 | CA2430741A1 Electrostatic device |
| 06/18/2002 | US6407483 Method of power supply for electronic systems and device therefor |
| 06/18/2002 | US6407478 Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature |
| 06/11/2002 | US6404599 High-performance integrated microactuator, particularly for a hard disk read/write transducer |
| 06/06/2002 | US20020067104 Micromirror actuator |
| 06/06/2002 | US20020067103 Micromechanical device having two degrees of motion |
| 06/05/2002 | EP1210760A1 Bead or particle manipulating chucks |
| 06/04/2002 | US6400655 Near field optical information system with seperated recording and reproducing inclined head |
| 05/29/2002 | EP1208403A1 Microelectromechanical optical switch and method of manufacture thereof |
| 05/29/2002 | EP1207970A2 Electrostatic ultrasonic transducer and method of making the same |
| 05/29/2002 | DE10047705A1 Microvalve for controlling fluid flows, has electrostatic comb drive with two comb structures coupled to valve housing and valve element with mutually engaged sets of electrodes |
| 05/28/2002 | US6396174 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit |
| 05/23/2002 | DE10054247A1 Betätigungselement und Verfahren zu seiner Herstellung Actuating element and process for its preparation |
| 05/21/2002 | US6392775 Optical reflector for micro-machined mirrors |
| 05/16/2002 | WO2002019509A3 Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same |
| 05/16/2002 | DE10054246A1 Operating element acting as artificial muscle uses elastomer body provided with opposing electrode devices |
| 05/15/2002 | CN2492006Y Variable-capacitance generator |
| 05/15/2002 | CN1349617A Improved optical reflector for micro-machined mirrors |
| 05/10/2002 | WO2002037892A2 Operating element |
| 05/10/2002 | WO2002037661A1 Electrostatic/pneumatic actuators for active surfaces |
| 05/10/2002 | WO2002037660A1 Actuating member and method for producing the same |
| 05/10/2002 | WO2002036464A1 Powder conveying and dispensing method and apparatus using traveling wave transport |
| 05/10/2002 | WO2002007292A3 Electrohydrodynamic conduction pump |
| 05/10/2002 | CA2427822A1 Electrostatic/pneumatic actuators for active surfaces |
| 05/09/2002 | US20020054190 Powder conveying and dispensing method and apparatus using traveling wave transport |
| 05/08/2002 | EP1204191A2 Wireless power supply method |
| 05/07/2002 | US6384510 Electrostatic microactuator with offset and/or inclined comb drive fingers |
| 05/02/2002 | US20020050764 Electrostatic actuator and camera module using the same |
| 05/02/2002 | US20020050763 Slider displacement direction conversion mechanism in electrostatic actuator |
| 05/02/2002 | EP1202099A2 Electrostatic actuator and camera module using the same |
| 04/25/2002 | US20020047493 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 04/25/2002 | US20020047492 High voltage electrostatic generator |
| 04/25/2002 | US20020047491 Electrostatic actuator and method of driving the same |
| 04/25/2002 | US20020047490 Electrically actuated optical switch having a surface pivotable mirror |
| 04/24/2002 | EP1199174A1 Electrostatically actuated devices |
| 04/24/2002 | CN1346053A Apparatus for particle operation and guide and use method thereof |
| 04/18/2002 | WO2001076054A3 Biased rotatable comb drive sensor methods |
| 04/18/2002 | WO2001073936A3 Biased rotatable combdrive devices and methods |
| 04/18/2002 | WO2001073935A3 Optical switch employing biased rotatable comb drive devices and methods |
| 04/11/2002 | US20020041729 Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly |
| 04/10/2002 | EP1195887A2 Electrostatic actuator driven slider displacement direction conversion mechanism |
| 04/10/2002 | EP0834218A4 Capacitance based tunable micromechanical resonators |
| 04/09/2002 | US6369374 Filter including a micro-mechanical resonator |
| 04/04/2002 | WO2002027909A2 Apparatus for switchng and manipulating particles and method of use thereof |
| 04/04/2002 | WO2002005413A3 Mems actuator with lower power consumption and lower cost simplified fabrication |
| 04/04/2002 | US20020038984 Single stage microactuator for multi-dimensional actuation |
| 04/04/2002 | CA2421939A1 Apparatus for switchng and manipulating particles and method of use thereof |
| 04/03/2002 | EP1193853A2 Electrostatic actuator and method of driving the same |
| 04/03/2002 | EP1193776A2 Deformable micro-actuator |
| 04/02/2002 | US6366340 Electron exposure apparatus |
| 04/02/2002 | US6363712 Gas-driven microturbine |
| 03/28/2002 | US20020037171 Electrostatic actuator and camera module using electostatic actuator |
| 03/28/2002 | US20020036443 Electrostatic actuator and method of driving the same |
| 03/26/2002 | US6362556 Electrically actuated optical switch having a surface pivotable Mirror |