Patents
Patents for H02N 1 - Electrostatic generators or motors using a solid moving electrostatic charge carrier (3,310)
11/2005
11/02/2005CN1691488A Electrostatic actuator and method of driving the same
11/02/2005CN1690764A Microactuator
11/01/2005US6960864 Electroactive polymer actuator and diaphragm pump using the same
11/01/2005US6960849 Three-dimensional microelectromechanical tilting platform operated by gear-driven racks
10/2005
10/27/2005US20050237597 Electromechanical drives adapted to provide two degrees of mobility
10/27/2005US20050236937 Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method
10/27/2005US20050236928 Microactuator
10/20/2005US20050231065 Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
10/19/2005CN1685270A Micro moving element comprising torsion bar
10/13/2005US20050225179 Signal output device and substrate device
10/12/2005CN1223084C Elastic surface-wave filter and communication device
10/06/2005US20050221529 Complex microdevices and apparatus and methods for fabricating such devices
10/06/2005US20050221528 Microelectronic mechanical system and methods
10/06/2005US20050219675 Tip-tilt-piston actuator
10/06/2005US20050219017 Electrostatic actuator
10/06/2005US20050218940 Waveform output device and drive device
10/05/2005EP1583213A1 Electrostatic actuator drive
10/05/2005EP1583212A1 Data bus connection for electrostatic actuator
10/05/2005CN1677829A Waveform output device and drive device
10/05/2005CN1677828A Signal output device and substrate device
10/05/2005CN1677706A Method and means for isolating elements of a sensor array
09/2005
09/29/2005WO2005089176A2 Mechanical meta-materials
09/29/2005WO2005047175A3 Electromechanical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of the same
09/29/2005WO2005008708A3 Rotational actuator or motor based on carbon nanotubes
09/29/2005US20050212382 Electrostatic motor
09/29/2005US20050211313 Microvalve for controlling fluid flow
09/28/2005EP1580876A2 Electrostatic motor
09/28/2005CN1674428A Electrostatic motor
09/27/2005US6949996 Actuator
09/27/2005US6949866 Systems and methods for overcoming stiction
09/21/2005EP1454333A4 Mems device having a trilayered beam and related methods
09/21/2005EP1428255A4 Microelectronic mechanical system and methods
09/20/2005US6946596 Tunneling-effect energy converters
09/15/2005WO2005085125A1 Micro actuator and device having micro actuator
09/15/2005US20050200986 Micro-actuation element provided with torsion bars
09/15/2005US20050200938 MEMS device for an adaptive optics mirror
09/15/2005US20050200238 Dielectric polymer actuator and inchworm robot using same
09/06/2005US6940260 Microenergy device for producing mechanically modulated microenergy output from digital microenergy input
09/06/2005US6940207 Micromachined moving device controlled by a varying—amplitude AC drive signal
09/06/2005CA2349842C Driving method for electrostatic actuators
09/01/2005US20050190684 Nanometer scale data storage device and associated positioning system
09/01/2005US20050189845 Micro-mechanical electrostatic actuator
08/2005
08/31/2005EP1569023A1 Micro moving element comprising torsion bar
08/31/2005EP1568656A2 Micro-mechanical electrostatic actuator
08/31/2005CN1661902A Micro-mechanical electrostatic actuator
08/30/2005US6937121 Magnetic actuator
08/30/2005US6935609 Microvalve for controlling fluid flow
08/25/2005US20050184619 Tear resistant gels, composites, and liner articles
08/23/2005US6933873 PWM-based measurement interface for a micro-machined electrostatic actuator
08/23/2005US6932580 Electrohydrodynamic conduction pump
08/18/2005US20050179746 Device for controlling the displacement of a drop between two or several solid substrates
08/18/2005US20050179339 Electromechanical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same
08/18/2005US20050179338 Electrostatic actuator
08/17/2005EP1564879A2 Drop traveling control device between two or more solid substrates
08/17/2005EP1564878A2 Electrostatic actuator
08/17/2005EP1564571A1 Buckling type actuator
08/17/2005EP1564181A1 Microactuator provided with diplacement detection function, and deformable mirror provided with this microactuator
08/17/2005CN1214971C Two-dimensional excitation set and manufacturing method thereof
08/16/2005US6930487 Method for electronic damping of electrostatic positioners
08/16/2005US6930364 Microelectronic mechanical system and methods
08/11/2005WO2005046943A3 Robotic member
08/11/2005US20050172703 Scanning probe microscopy inspection and modification system
08/11/2005DE102004007135A1 Charging method for charging up capacitors feeds a high-voltage electrical charge inside a hollow body to be passed onto a printed circuit board of capacitors
08/04/2005WO2005069959A2 Method and micro power generator for generating electrical power from low frequency vibrational energy
08/02/2005US6925047 High density data storage module
08/02/2005US6924581 Split spring providing multiple electrical leads for MEMS devices
07/2005
07/28/2005WO2005069473A1 Electrostatic mems components permitting a large vertical displacement
07/28/2005WO2005069472A1 Electrostatic control device
07/28/2005WO2005068353A1 Optical scanning using vibratory diffraction gratings
07/28/2005US20050162038 Electrostatic motor
07/28/2005US20050162037 Film like electrode member for electrostatic motor
07/28/2005US20050162036 Electrostatic motor
07/28/2005DE102004063740A1 Mikrobearbeitete Ultraschalltransducerzellen mit nachgiebiger Stützstruktur Micromachined Ultraschalltransducerzellen with resilient support structure
07/27/2005EP1557939A2 Electrostatic motor
07/27/2005EP1557938A2 Film-like electrode member for electrostatic motor
07/27/2005EP1557937A1 Linear electrostatic motor
07/27/2005EP1557936A1 Actuator for an optical device
07/27/2005CN1647356A Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
07/21/2005US20050156482 Method for supplying multiple voltages to a movable part of a MEMS device
07/21/2005US20050156481 Optical scanning using vibratory diffraction gratings
07/21/2005US20050156191 Actuator structure and optical device
07/19/2005US6920032 Method for energy extraction—II
07/14/2005WO2005064780A1 Method for producing comb drive devices using etch buffers
07/14/2005WO2005062950A2 Meso-microelectromechanical system having a glass beam and method for its fabrication
07/14/2005US20050152014 Method for linearizing deflection of a mems device using binary electrodes and voltage odulation
07/14/2005US20050151442 Micromechanical electrostatic resonator
07/14/2005CA2562682A1 Method for producing comb drive devices using etch buffers
07/12/2005US6917086 Trilayered beam MEMS device and related methods
07/07/2005US20050146241 Stepping actuator and method of manufacture therefore
07/07/2005US20050146240 Micromachined ultrasonic transducer cells having compliant support structure
07/05/2005US6914329 Micro cooling and power supply structure
07/05/2005US6913363 Variable geometry mirror having high-precision, high geometry controllability
06/2005
06/30/2005US20050139577 Microelectromechanical system comb actuator and manufacturing method thereof
06/29/2005EP1547234A2 Tunneling-effect energy converters
06/29/2005CN1633616A A microelectromechanical systems device and method for fabricating same
06/28/2005US6911792 System and method for controlling movement
06/23/2005US20050136621 Method for reducing harmonic distortion in comb drive devices
06/23/2005US20050134653 Electrostatic actuator, droplet ejection head and droplet ejection device
06/23/2005US20050134141 Meso-microelectromechanical system having a glass beam and method for its fabrication
06/22/2005EP1543973A1 Electrostatic actuator, droplet ejection head and droplet ejection device
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