Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1982
12/22/1982EP0067393A1 Semiconductor device having a resistor region with an enhanced breakdown voltage
12/22/1982EP0067325A2 Programmable structures
12/22/1982EP0067304A2 Processing array and method for the physical design of very large scale integrated circuits
12/22/1982EP0067276A1 Transistor with tunnel emitter and upper energy valley base
12/22/1982EP0067206A1 Method for fabricating complementary semiconductor devices.
12/22/1982EP0067165A1 Improved partial vacuum boron diffusion process.
12/21/1982US4365264 Semiconductor device with high density low temperature deposited Siw Nx Hy Oz passivating layer
12/21/1982US4365263 Semiconductor integrated circuit device composed of insulated gate field-effect transistor
12/21/1982US4365261 Co-planar barrier-type charge coupled device with enhanced storage capacity and decreased leakage current
12/21/1982US4365217 Charge-transfer switched-capacity filter
12/21/1982US4365208 Gain-controlled amplifier using a controllable alternating-current resistance
12/21/1982US4365019 Integrated circuits
12/21/1982US4364977 Plating; fabrication of integrated circuits
12/21/1982US4364793 Plasma of conventional etchant enhanced by aluminum chloride
12/21/1982US4364779 Heat treatment in hydrogen, cooling, reheating
12/21/1982US4364778 P-type, n-type, and p-n junctions
12/21/1982US4364707 Object transport apparatus
12/21/1982US4364167 Programming an IGFET read-only-memory
12/21/1982US4364166 Semiconductor integrated circuit interconnections
12/21/1982US4364165 Late programming using a silicon nitride interlayer
12/21/1982US4364164 Method of making a sloped insulator charge-coupled device
12/21/1982CA1138125A1 Integrated circuit arrangement in mos- technology with field effect transistors
12/21/1982CA1138124A1 Test circuit arrangement for integrated circuit
12/21/1982CA1138123A1 Self-aligned semiconductor method
12/15/1982EP0067090A1 Process for doping semiconductors
12/15/1982EP0066974A2 Improved substrate bias generator
12/15/1982EP0066883A2 Exposure method with electron beam exposure apparatus
12/15/1982EP0066882A2 Electron beam exposure system
12/15/1982EP0066836A2 Method of marking semiconductor chips, and marked semiconductor chip
12/15/1982EP0066835A2 Method of marking semiconductor chips, and marked semiconductor chip
12/15/1982EP0066810A2 Semiconductor device incorporated in a semiconductor layer formed on an insulating layer
12/15/1982EP0066787A2 Process for preparing amorphous silicon semiconductor
12/15/1982EP0066730A2 An isolating layered structure for a gate, process for manufacturing and use of that structure
12/15/1982EP0066694A2 Method for inspecting integrated circuit chips
12/15/1982EP0066675A1 Processes for the fabrication of field effect transistors
12/15/1982EP0013290B1 Large scale integrated circuit wafer and method of testing same
12/14/1982US4364086 Alignment and recognition apparatus
12/14/1982US4364078 Edge barrier of polysilicon and metal for integrated circuit chips
12/14/1982US4364076 Co-planar well-type charge coupled device with enhanced storage capacity and reduced leakage current
12/14/1982US4364075 CMOS Dynamic RAM cell and method of fabrication
12/14/1982US4364074 V-MOS Device with self-aligned multiple electrodes
12/14/1982US4364044 Semiconductor speech path switch
12/14/1982US4364010 Semiconductor device with monitor pattern, and a method of monitoring device parameters
12/14/1982US4364006 Reference voltage generator for use in an A/D or D/A converter
12/14/1982US4363962 Focussing apparatus with plural emitter-detector pairs
12/14/1982US4363953 Electron beam scribing method
12/14/1982US4363868 Process of producing semiconductor devices by forming a silicon oxynitride layer by a plasma CVD technique which is employed in a selective oxidation process
12/14/1982US4363846 Photomask and photomask blank
12/14/1982US4363830 Method of forming tapered contact holes for integrated circuit devices
12/14/1982US4363828 Method for depositing silicon films and related materials by a glow discharge in a disiland or higher order silane gas
12/14/1982US4363769 Method for manufacturing thin and flexible ribbon wafer of _semiconductor material and ribbon wafer
12/14/1982US4363696 Short circuit prevention in the manufacture of semiconductor devices
12/14/1982CA1137652A1 Apparatus for placing chip type circuit elements on a board
12/14/1982CA1137633A1 Mark signal amplifier
12/14/1982CA1137630A1 Read only memory and integrated circuit and method of programming by laser means
12/14/1982CA1137605A1 High output power laser
12/09/1982WO1982004351A1 Focused ion beam microfabrication column
12/08/1982EP0066480A1 Anti-blooming device for a photosensitive charge-coupled device
12/08/1982EP0066466A2 Photomask and method of testing it
12/08/1982EP0066461A2 Semiconductor wafer and method of manufacturing the same
12/08/1982EP0066429A2 Semiconductor memory
12/08/1982EP0066404A2 Multi-channel electron beam accessed lithography apparatus and method of operating the same
12/08/1982EP0066334A1 Circuit arrangement with an integrated circuit
12/08/1982EP0066288A1 Method for ion-implanting metal elements
12/08/1982EP0066280A2 Method for manufacturing semiconductor device
12/08/1982EP0066243A2 Electron-beam image transfer device
12/08/1982EP0066188A1 Plastic encapsulated semiconductor device and method for manufacturing the same
12/08/1982EP0066175A1 Ion implanter
12/08/1982EP0066097A2 Silicide contacts for CMOS devices
12/08/1982EP0066088A2 Perforated anode for use in reactive ion etching apparatus
12/08/1982EP0066087A1 Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure
12/08/1982EP0066086A2 Manufacture of laminated electronic substrates involving electrical inspection
12/08/1982EP0066081A2 Dense vertical FET and method of making
12/08/1982EP0066071A1 Apparatus for contactless testing of electrical connections
12/08/1982EP0066070A1 Method and apparatus for contactless electrical testing
12/08/1982EP0066069A2 Method for forming dense multilevel metal interconnection systems for integrated circuit devices
12/08/1982EP0066068A2 Structure and process for fabrication of stacked complementary MOS field effect transistor devices
12/08/1982EP0066065A1 Radiation tolerant semiconductor device and method of making such a device
12/08/1982EP0066053A1 Apparatus for, and method of, exposing a photosensitive medium to light
12/08/1982EP0066042A2 Methods of processing a silicon substrate for the formation of an integrated circuit therein
12/08/1982EP0066041A1 Semiconductor device including resistive elements
12/08/1982EP0065999A1 High-speed large-scale integrated memory with bipolar transistors
12/07/1982US4363111 Dummy cell arrangement for an MOS memory
12/07/1982US4363110 Non-volatile dynamic RAM cell
12/07/1982US4363076 Integrated circuit package
12/07/1982US4362985 Integrated circuit for generating a reference voltage
12/07/1982US4362942 Electron beam exposure system and an apparatus for carrying out the same
12/07/1982US4362902 Ceramic chip carrier
12/07/1982US4362809 Multilayer photoresist process utilizing an absorbant dye
12/07/1982US4362807 Photomask-forming photographic material and method for producing photomask using same
12/07/1982US4362766 Method for preparing a protective amorphous silicon passivating film on a semiconductor device
12/07/1982US4362632 Gas discharge apparatus
12/07/1982US4362599 Method for making semiconductor device
12/07/1982US4362598 Etching, carbon tetrachloride
12/07/1982US4362597 Method of fabricating high-conductivity silicide-on-polysilicon structures for MOS devices
12/07/1982US4362596 Etch end point detector using gas flow changes
12/07/1982US4362575 Method of making buried channel charge coupled device with means for controlling excess charge
12/07/1982US4362574 Integrated circuit and manufacturing method
12/07/1982US4362385 Process and arrangement for copying masks on a workpiece with arrangement for correction of alignment errors
12/07/1982US4361951 Method of fabricating a titanium dioxide rectifier