Patents for G21K 1 - Arrangements for handling particles or ionising radiation, e.g. focusing or moderating (12,525)
03/2003
03/27/2003US20030058984 Retractable collimator apparatus for a CT-PET system
03/27/2003US20030058555 Multifaceted reflecting mirror, illumination optical system based on use of the same, and semiconductor exposure apparatus
03/27/2003US20030058429 Stable energy detector for extreme ultraviolet radiation detection
03/27/2003US20030058422 Lithographic apparatus and device manufacturing method
03/27/2003US20030057382 Charged particle beam irradiation equipment and control method thereof
03/27/2003US20030057319 Propulsion device with decreased mass
03/27/2003US20030057178 Method for making a mirror for photolithography
03/26/2003EP1296162A1 Polygon reflector, and illumination optical system and semiconductor exposure device using the polygon reflector
03/26/2003EP1294445A2 Device for irradiating a tumor tissue
03/26/2003EP1062670B1 Method for assembling an optical array comprising coaxial shells
03/26/2003CN1406383A Device for X-ray lithography
03/25/2003US6538737 High resolution etalon-grating spectrometer
03/20/2003WO2003024163A1 Apparatus and process for the lateral deflection and separation of flowing particles by a static array of optical tweezers
03/20/2003WO2002099534A9 Lighting system with a plurality of individual grids
03/20/2003WO2002097485A3 Method for controlled modification of the reflective qualities of a multi-layer
03/20/2003WO2002078045A3 Methods and apparatus for scanned beam uniformity adjustment in ion implanters
03/20/2003US20030055573 Spectroscopy instrument using broadband modulation and statistical estimation techniques to account for component artifacts
03/20/2003US20030053594 Discharge source with gas curtain for protecting optics from particles
03/20/2003US20030053588 Radiation-generating devices utilizing multiple plasma-discharge sources and microlithography apparatus and methods utilizing the same
03/20/2003US20030053580 Assigning an electric force field to each plus or negative tron which expands out spherically with a specific velocity in excess of the vacuum speed of light and produces an attractive or repulsive Coulomb force; analyzing light etc.
03/20/2003US20030052612 Microminiature microwave electron source
03/20/2003US20030052275 EUV mirror based absolute incident flux detector
03/19/2003EP1119438B1 A gamma ray collimator build-up
03/18/2003US6535577 Method and apparatus for radiographic imaging having an antidiffusion grid
03/18/2003US6535575 Pulsed X-ray reflectometer
03/18/2003US6535573 X-ray fluorescence analyzer
03/18/2003US6534766 Charged particle beam system and pattern slant observing method
03/13/2003WO2003020196A2 Antiprotons for imaging and termination of undesirable cells
03/13/2003WO2002071105A3 Method of fabricating reflection-mode euv diffraction elements
03/13/2003WO2002056431A3 Apparatus for applying optical gradient forces
03/13/2003US20030048869 Method and apparatus for controlling a rotatable multi-element beam shaping device
03/13/2003US20030048059 Fabrication of chopper for particle beam instrument
03/13/2003US20030047676 Apparatus and process for the lateral deflection and separation of flowing particles by a static array of optical tweezers
03/13/2003CA2449087A1 Antiprotons for imaging and termination of undesirable cells
03/12/2003EP1291680A2 Multilayer-film mirrors for use in extreme UV optical systems, and methods for manufacturing such mirrors exhibiting improved wave aberrations
03/12/2003EP1290925A2 Extreme ultraviolet source based on colliding neutral beams
03/12/2003EP1053551A4 Wavelength dispersive x-ray spectrometer with x-ray collimator optic for increased sensitivity over a wide x-ray energy range
03/11/2003US6530874 Synchronized moving shield for a radiation therapy apparatus
03/06/2003WO2003019613A1 Method and apparatus for improved ion bunching in an ion implantation system
03/06/2003WO2003019612A1 Split double gap buncher and method for ion bunching in an ion implantation system
03/06/2003WO2003019290A2 Patterning an integrated circuit using a reflective mask
03/06/2003WO2003019219A1 Electron capture by magnetic resonance
03/06/2003WO2003018299A1 Optical tools manipulated by optical traps
03/06/2003WO2002012928A3 Diffraction spectral filter for use in extreme-uv lithography condenser
03/06/2003WO2002007144A8 Gravitational wave generator
03/06/2003US20030043959 X-ray detector provided with a heating device
03/06/2003US20030043456 Multilayer extreme ultraviolet mirrors with enhanced reflectivity
03/06/2003US20030043455 Collector for an illumination system with a wavelength of less than or equal to 193 nm
03/06/2003US20030042411 Positive and negative ion beam merging system for neutral beam production
03/06/2003CA2457916A1 Optical tools manipulated by optical traps
03/05/2003CN1401065A Optical systems having retro reflectors
03/04/2003US6529582 Focused X-ray scatter reduction grid
03/04/2003US6529578 X-ray condenser and x-ray apparatus
02/2003
02/27/2003WO2003017005A1 Stable energy detector for extreme ultraviolet radiation detection
02/27/2003WO2003016781A2 Surface plasmon enhanced illumination system
02/27/2003WO2003016233A1 Substrate material for x-ray optical components
02/27/2003WO2003001178A3 Configurable dynamic three dimensional array
02/27/2003WO2002093202A3 Improved apparatus, system and method for applying optical gradient forces
02/27/2003US20030039922 Method of making an integrated circuit using a reflective mask
02/27/2003US20030039042 Multilayer-coated reflective mirrors for X-ray optical systems, and methods for producing same
02/27/2003US20030038254 Slit double gap buncher and method for improved ion bunching in an ion implantation system
02/27/2003US20030038253 Method and apparatus for improved ion bunching in an ion implantation system
02/25/2003US6526123 Multiple layer multileaf collimator
02/20/2003WO2003014833A2 Collector with fastening devices for fastening mirror shells
02/20/2003WO2003014770A2 Optical method and device for spatially manipulating objects
02/20/2003WO2002057813A3 Pressed capillary optics
02/20/2003US20030036204 Surface plasmon enhanced illumination system
02/20/2003US20030035512 Scattered ray removal grid and method of producing the same
02/18/2003US6522722 Collimation of radiation from line-like ionizing radiation sources and planar radiation beam detection related thereto
02/18/2003US6522716 Multilayer-film reflective mirrors, extreme UV microlithography apparatus comprising same, and microelectronic-device manufacturing methods utilizing same
02/18/2003US6522056 Method and apparatus for simultaneously depositing and observing materials on a target
02/18/2003US6521895 Wide dynamic range ion beam scanners
02/18/2003US6521888 Inverted orbit filter
02/18/2003US6521101 Beryllium-based multilayer mirrors, useful in the wavelength region greater than the beryllium K-edge (111 angstrom or 11.1 nm)
02/13/2003WO2003012816A2 Mobile miniature x-ray source
02/13/2003WO2003012797A1 Methods and devices for aligning and determining the focusing characteristics of x-ray optics
02/13/2003WO2003012186A2 Imaged nonwoven fabrics in dusting applications
02/13/2003WO2002082065A3 Computed tomography apparatus
02/13/2003WO2002080216A9 Method and system for energy conversion using a screened-free-electron source
02/13/2003WO2002044640A3 Structure and method for controlling the thermal emissivity of a radiating object
02/13/2003US20030032204 Apparatus for use in the isolation of dielectric particles
02/13/2003US20030031938 Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask
02/13/2003US20030031298 Method for checking positional accuracy of the leaves of a multileaf collimator
02/13/2003US20030031286 Creating a model of a proton comprised of electrons, programming a digital computer to perform analyses using proton model
02/13/2003US20030030008 Charged particle beam control system and charge partical beam optical apparatus using the system
02/13/2003US20030030007 Charged particle beam control apparatus
02/12/2003EP1283426A2 X ray detector with heating device
02/12/2003EP1282900A1 Beam scanning system for a heavy ion gantry
02/11/2003US6518578 Method for detecting ionizing radiation, a radiation detector and an apparatus for use in planar beam radiography
02/06/2003US20030026386 Anti-scatter grids and collimator designs, and their motion, fabrication and assembly
02/06/2003US20030026383 Apparatus and method for the analysis of atomic and molecular elements by wavelength dispersive x-ray spectrometric devices
02/05/2003EP1282139A1 Multilayer-coated reflective mirrors for x-ray optical systems, and methods for producing same
02/04/2003US6514771 Apparatus facilitating real-time, spatial manipulation of beads and biomolecules at an interface between a light sensitive electrode and elctrolyte solution; use in drug discovery, diagnostics, bioassays
01/2003
01/30/2003WO2003008943A1 Optical array device and methods of use thereof for screening, analysis and manipulation of particles
01/30/2003US20030022393 Apparatus for in generation surface-mounted optics and material surfaces
01/30/2003US20030021379 Anti-scatter grid for an X-ray device
01/30/2003US20030021377 Mobile miniature X-ray source
01/30/2003US20030020768 Direct write TM system
01/29/2003EP1280165A2 Anti-scatter grid for an X-ray device
01/29/2003EP1226571A4 System and method for programmable illumination pattern generation
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