Patents for G21K 1 - Arrangements for handling particles or ionising radiation, e.g. focusing or moderating (12,525)
05/2003
05/29/2003US20030099324 X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor device
05/29/2003US20030099040 Illumination system with a plurality of individual gratings
05/29/2003US20030098415 Aberration corrector for instrument utilizing charged-particle beam
05/28/2003EP1315177A1 Method and device for object imaging
05/28/2003EP1060478B1 Multiple corner kirkpatrick-baez beam conditioning optic assembly
05/28/2003EP0928431A4 Tapered capillary optics
05/28/2003CN1420521A 离子源 Ion source
05/27/2003US6570168 Illumination system with a plurality of light sources
05/27/2003US6570166 Operation method of ion source and ion beam irradiation apparatus
05/27/2003US6569293 Titanium/boron thin films contain no morphological growth features such as those which accompany physical vapor deposition processes; for optical coatings
05/22/2003WO2003042723A2 Optical cell guidance method and apparatus
05/22/2003WO2002101786A3 Spectroscopy instrument using broadband modulation and statistical estimation
05/22/2003WO2002041948A9 Device and method for adapting the size of an ion beam spot in the domain of tumor irradiation
05/22/2003US20030095634 Attachment of X-ray apparatus, high temperature attachment and X-ray apparatus
05/22/2003US20030095633 Method and apparatus for improved X-ray device image quality
05/22/2003US20030095622 Illumination system particularly for microlithography
05/22/2003US20030094911 Methods and systems for generating high energy photons or quantum energy
05/22/2003US20030094902 Ion source
05/21/2003EP1312546A1 Method for generating a divergence between central time and peripheral time in a rotating system applicable to a spatial vehicle
05/20/2003US6566664 Charged-particle beam exposure apparatus and device manufacturing method
05/15/2003WO2003041090A1 Device for filtering an x-ray beam
05/15/2003WO2003039672A1 Radiation modulating apparatus and methods therefor
05/15/2003US20030092794 Melanin polyvinyl alcohol plastic laminates for optical applications
05/15/2003US20030089857 X-ray detector with an applied stray radiation grid, and method for applying a stray radiation grid to an X-ray detector
05/15/2003US20030089856 Fabrication of unit lenses for compound refractive lenses
05/14/2003EP1310978A1 High performance source for electron beam projection lithography
05/14/2003EP0745266B1 Chromatically compensated particle-beam column
05/14/2003CN1418322A ultra high resolution imaging devices
05/13/2003US6563909 X-ray examination apparatus
05/13/2003US6563125 Charged-particle-beam microlithography apparatus and methods for preventing coulomb effects using the hollow-beam technique
05/08/2003WO2002054412A3 Charge exchange device for charged particle accelerator
05/08/2003US20030086534 Radiation diaphragm for an X-ray apparatus
05/08/2003US20030086527 Radiation modulating apparatus and methods therefore
05/08/2003US20030086524 Illumination system particularly for microlithography
05/08/2003US20030086522 X-ray image storage unit and readout device, and subtraction angiography method employing same
05/08/2003US20030086175 Apparatus for applying optical gradient forces
05/08/2003US20030085364 High performance source for electron beam projection lithography
05/07/2003EP1309234A2 Method and apparatus for elimination of high energy ions from EUV radiating device
05/07/2003EP1308717A1 X-ray measuring and testing system
05/07/2003EP1307768A2 Diffraction spectral filter for use in extreme-uv lithography condenser
05/07/2003CN1107877C Specular surface body
05/06/2003US6560312 Medical uses of focused and imaged X-rays
05/02/2003EP1306698A1 Multilayer reflective mirrors for EUV, wavefront-aberration-correction methods for the same, and EUV optical systems comprising the same
05/02/2003EP1305813A1 Plasma focus light source with active and buffer gas control
05/01/2003WO2003036654A1 Process for manufacturing multilayer systems
05/01/2003WO2003012816A3 Mobile miniature x-ray source
05/01/2003WO2002103710A3 Wavelength dispersive xrf system using focusing optic for excitation and a focusing monochromator for collection
05/01/2003US20030081731 Antiscattering grid and a method of manufacturing such a grid
05/01/2003US20030081724 X-ray and neutron imaging
05/01/2003US20030081722 Multilayer-film mirrors for use in extreme UV optical systems, and methods for manufacturing such mirrors exhibiting improved wave aberrations
05/01/2003US20030081721 Edge extension of intensity map for radiation therapy with a modulating multi-leaf collimator
05/01/2003US20030080302 Method and apparatus for elimination of high energy ion from EUV radiating device
04/2003
04/30/2003CN1414397A Method for mounting scattered raster on X-ray detector
04/29/2003US6556657 X-ray collimator and method of manufacturing an x-ray collimator
04/29/2003US6556595 Hybrid wiggler
04/29/2003US6555817 Method and apparatus for correcting magnetic field distortions in electron backscatter diffraction patterns obtained in an electron microscope
04/24/2003WO2003034797A1 X ray and neutron imaging
04/24/2003WO2002044689A3 Storing microparticles in optical switch which is transported by micro-fluidic device
04/24/2003US20030076929 X-ray detector/stray radiation grid and gamma detector/collimator arrangements
04/24/2003US20030075684 Halation-prevention filter, image analysis device equipped with said halation-prevention filter, and diffraction pattern intensity analysis method and diffraction pattern intensity correction program that use said halation-prevention filter
04/24/2003DE10147947C1 Verfahren zur Herstellung eines Streustrahlenrasters oder Kollimators A process for producing an anti-scatter grid or collimator
04/23/2003EP1304703A1 Antiscattering grid and a method of manufacturing such a grid
04/17/2003WO2003032329A1 Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
04/17/2003WO2002085079A3 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube
04/17/2003US20030072415 Method for producing a scattered radiation grid or collimator
04/17/2003US20030072412 Multi-layer structure with variable bandpass for monochromatization and spectroscopy
04/17/2003US20030072410 System and method for optimizing radiation treatment with an intensity modulating multi-leaf collimator by minimizing junctions
04/17/2003DE20023114U1 Joining beams of charged particles includes directing two beams on the axes into the magnetic field, and turning the beams by interaction between the field and the beams into a third beam directed on the third axis
04/16/2003EP1301811A2 Gravitational wave generator
04/16/2003EP1204469A4 Electromagnetic energy driven separation methods
04/16/2003EP0941540B1 Multiple layer multileaf collimator
04/16/2003EP0740527B1 X-ray examination apparatus comprising a beam diaphragm
04/15/2003US6549609 X-ray generator with a limiting device
04/10/2003WO2003030240A2 Etching method and apparatus
04/10/2003US20030066974 Charged-particle beam exposure apparatus and device manufacturing method
04/10/2003US20030066963 Multi-beam multi-column electron beam inspection system
04/10/2003US20030066956 Optical tools manipulated by optical traps
04/09/2003EP1300857A2 Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems
04/09/2003EP1300696A2 X ray image storage and method for patient examination using substraction angiography
04/09/2003EP1300056A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it
04/09/2003CN1409326A Method for producing scattering grating or collimator
04/09/2003CN1408450A Optimum radiation therapeutic system and method using strength modulation multiple fin collimator
04/08/2003US6546076 Digital high resolution x-ray imaging utilizing an imaging sensor
04/03/2003WO2003027499A2 Rotating propulsion device
04/03/2003WO2001094987A3 X-ray optical system
04/03/2003US20030063708 Cassette for radiographic imaging, radiographic image reading apparatus and radiographic image reading method
04/03/2003US20030063266 Lithographic apparatus and device manufacturing method
04/02/2003EP1298965A2 Radiation-generating devices utilizing multiple plasma-discharge sources and microlithography apparatus and methods utilizing the same
04/02/2003EP1298678A2 Method of producing an anti-scatter grid or a collimator
04/02/2003EP1297863A2 System and method for optimizing radiation treatment with an intensity modulating multi-leaf collimator while minimizing junctions
04/02/2003EP0908503B1 Rare earth sulfate phosphor and x-ray detector using the same
04/02/2003CN1407333A Anti-scattering resistant grating for X ray device
04/01/2003US6542576 X-ray tube for CT applications
04/01/2003US6541764 For separating low-mass particles from high-mass particles in multi-species plasma
03/2003
03/27/2003WO2003026363A1 Discharge source with gas curtain for protecting optics from particles
03/27/2003WO2003024527A1 Device for x-ray therapy
03/27/2003WO2003014770A3 Optical method and device for spatially manipulating objects
03/27/2003WO2002098617A3 Optical peristaltic pumping with optical traps
03/27/2003WO2002004698A8 Particle guidance system
03/27/2003US20030058986 Apparatus and methods for surficial milling of selected regions on surfaces multilayer-film reflective mirrors as used in X-ray optical systems
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