| Patents for G02B 19 - Condensers (2,954) |
|---|
| 08/13/2002 | US6433934 Illumination system for use in imaging systems |
| 07/25/2002 | WO2002057830A1 Zoom optical system, aligner having the zoom optical system, and aligning method |
| 07/25/2002 | US20020097505 Single-element catadioptric condenser lens |
| 07/25/2002 | US20020097386 Detection apparatus and exposure apparatus using the same |
| 07/25/2002 | DE10138313A1 Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm Collector for Beleuchtugnssysteme with a wavelength <193 nm |
| 07/24/2002 | EP1225481A2 Collector for an illumination system with wavelength of 193 nm |
| 07/24/2002 | CN1360218A 投射型显示装置 Projection display apparatus |
| 07/23/2002 | US6423927 Laser system |
| 07/18/2002 | WO2002027405A3 Illumination system particularly for microlithography |
| 07/18/2002 | US20020093736 Illuminating device and projecting display device |
| 07/18/2002 | US20020093718 Polarisation separation element, a polarisation conversion system, an optical element, and a projection display system |
| 07/17/2002 | CN1359477A System for collecting and condensing light |
| 07/11/2002 | WO2002027402A3 Illumination system particularly for microlithography |
| 07/11/2002 | WO2002027400A3 Illumination system particularly for microlithography |
| 07/11/2002 | US20020089654 Projection exposure apparatus and device manufacturing method using the same |
| 07/11/2002 | DE10100265A1 Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe Lighting system with raster elements of different sizes |
| 07/11/2002 | DE10065198A1 Lichtintegrator für eine Beleuchtungseinrichtung Light integrator for a lighting device |
| 07/10/2002 | EP1221634A2 Illumination system with array elements of different sizes |
| 07/04/2002 | WO2002027406A3 Illumination system particularly for microlithography |
| 07/04/2002 | WO2002027401A3 Illumination system particularly for microlithography |
| 07/04/2002 | US20020085286 Projection exposure device |
| 07/04/2002 | US20020085276 Illumination optical apparatus and exposure apparatus provided with illumination optical apparatus |
| 07/03/2002 | EP1220039A1 Multi-mirror system for illumination system |
| 07/02/2002 | US6412953 Illumination device and image projection apparatus comprising the device |
| 06/27/2002 | US20020080486 Polarized light illuminator for optical alignment |
| 06/27/2002 | US20020080485 Polarized light illuminator with a polarized light beam splitter |
| 06/27/2002 | US20020080237 Process and device for the video recording of an illuminated field |
| 06/26/2002 | EP1217450A2 Light integrator for an irradiation device |
| 06/26/2002 | EP1217424A1 Polarized light illuminator for optical alignment |
| 06/26/2002 | EP1217292A1 Method and device for video recordings of an illuminated region |
| 06/26/2002 | CN2497332Y Omnbearing monitoring mirror |
| 06/20/2002 | WO2001073487A3 Coupling of light from a light source to a target using dual ellipsoidal reflectors |
| 06/20/2002 | US20020075579 Apparatus for collecting and converting radiant energy |
| 06/20/2002 | US20020075460 Illumination device and method for laser projector |
| 06/20/2002 | US20020075455 Projection display apparatus |
| 06/20/2002 | DE10063380A1 Video recording of illuminated field involves automatically adjusting pivotably mounted video camera until its optical axis intersects light beam or beams in area of illuminated field |
| 06/19/2002 | EP1215524A2 Polarized light illuminator with a polarized light beam splitter |
| 06/19/2002 | EP1215520A2 Optical arrangement for the collection of light |
| 06/19/2002 | CA2364165A1 Process and device for the video recording of an illuminated field |
| 06/06/2002 | WO2002044766A2 Static concentrator |
| 06/06/2002 | US20020067550 Illumination apparatus and projection exposure apparatus |
| 06/06/2002 | US20020067542 Uv-absorbing filter and optical apparatus incorporating the same |
| 06/06/2002 | DE10059455A1 Statischer Konzentrator Static concentrator |
| 06/05/2002 | EP1211561A2 Illumination apparatus |
| 06/04/2002 | US6400510 Uniform illumination optical device with a concave lens |
| 06/04/2002 | US6398368 Light pipe for a projector system |
| 05/30/2002 | US20020063501 Light emitting device and camera having the same |
| 05/28/2002 | US6394607 Polarized light separation device, method of fabricating the same and projection display apparatus using the polarized light separation device |
| 05/21/2002 | US6392800 Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangement |
| 05/15/2002 | EP1204888A1 Collimator and focusing optic |
| 05/02/2002 | EP1202291A2 Illumination system with a grid unit |
| 05/02/2002 | EP1202118A2 Device for step-and-repeat exposure of a substrate |
| 05/02/2002 | EP1202101A2 Variable illumination system |
| 05/02/2002 | EP1202100A2 Illumination system with reduced heat load |
| 05/02/2002 | EP1200879A1 Control of the distribution of lighting in the exit pupil of an euv lighting system |
| 05/02/2002 | EP1200878A2 Multi mirror system for an illumination system |
| 05/02/2002 | DE10053587A1 Beleuchtungssystem mit variabler Einstellung der Ausleuchtung Lighting system with variable adjustment of illumination |
| 04/25/2002 | DE10046218A1 Projektionsbelichtungsanlage Projection exposure apparatus |
| 04/18/2002 | WO2002031592A1 Illumination optical unit and projection display comprising it |
| 04/18/2002 | US20020044773 Camera |
| 04/17/2002 | EP1197766A2 A polarisation separation element, a polarisation conversion system, an optical element, and a projection display system |
| 04/16/2002 | US6373633 Shaping irradiance profiles using optical elements with positive and negative optical powers |
| 04/16/2002 | US6373554 Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus |
| 04/04/2002 | WO2002027406A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027405A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027402A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027401A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027400A2 Illumination system particularly for microlithography |
| 04/04/2002 | US20020039293 Light condensing and collecting systems using lensed light pipes |
| 04/04/2002 | US20020039157 Optical lens system, image display apparatus, micro-lens array, liquid crystal diplay device, and liquid crystal display apparatus of projection-type |
| 04/03/2002 | EP1193542A2 A method and apparatus for printing monochromatic images using a spatial light modulator having a selectable light source |
| 04/03/2002 | EP1193539A2 Illumination system for use in imaging systems |
| 03/28/2002 | WO2002025329A2 Light condensing and collecting systems using lensed light pipes |
| 03/28/2002 | US20020036903 Image display apparatus, image display system, and illumination system |
| 03/28/2002 | US20020036831 Image display apparatus |
| 03/28/2002 | US20020036754 Projector |
| 03/28/2002 | CA2422705A1 Light condensing and collecting systems using lensed light pipes |
| 03/27/2002 | EP1191796A2 Optical apparatus and projection type display apparatus |
| 03/21/2002 | US20020033903 Optical apparatus and projection type display apparatus |
| 03/21/2002 | DE10136510A1 Optisches Beleuchtungssystem in einer Belichtungseinheit Illumination optical system in an exposure unit |
| 03/21/2002 | DE10045265A1 Vorrichtung zum Bündeln der Strahlung einer Lichtquelle Apparatus for bundling the radiation from a light source |
| 03/20/2002 | EP1189112A2 Projection exposure apparatus |
| 03/20/2002 | EP1189089A2 Device for concentrating radiation of a light source |
| 03/20/2002 | CN1340738A Lighting optical system and projector containing it |
| 03/20/2002 | CN1340736A Light reflection device and camera with the said device |
| 03/14/2002 | WO2002021734A1 Wireless communication receiver using a totally internally reflecting concentrator |
| 03/12/2002 | US6356399 Light projecting method, surface inspection method, and apparatus used to implement these methods |
| 03/07/2002 | US20020027720 Projection system |
| 03/07/2002 | US20020027717 Uniform illumination optical device with a concave lens |
| 03/07/2002 | DE10132840A1 Arrangements of apertures and optical elements, with positive and negative refractive powers, and radiated target area. |
| 03/06/2002 | EP1184706A2 Illuminating apparatus |
| 02/28/2002 | US20020024740 Illuminating apparatus |
| 02/28/2002 | DE10040898A1 Beleuchtungssystem für die Mikrolithographie An illumination system for microlithography |
| 02/27/2002 | CN1338034A Lighting appararatus |
| 02/27/2002 | CN1337586A Lighting optical system and projecting instrument using said optical system |
| 02/21/2002 | WO2002014924A1 Relay image optical system, and illuminating optical device and exposure system provided with the optical system |
| 02/21/2002 | US20020021507 Method of connecting a multiplicity of optical elements to a basic body |
| 02/20/2002 | EP1180726A2 Illumination system for microlithography |
| 02/14/2002 | WO2001055771A3 Focusing system for videoprojector |
| 02/14/2002 | US20020018150 Illumination optical system and projector using the same |