Patents for G02B 19 - Condensers (2,954)
05/2004
05/12/2004EP1417537A2 Light recovery for projection displays
05/12/2004CN1495461A Repeatered lens used in lighting system of photoetching system
05/11/2004US6733165 Optical integrator for an illumination device
04/2004
04/27/2004US6728043 Microlithographic illumination method and a projection lens for carrying out the method
04/22/2004WO2004034141A1 Illuminator and illuminating method
04/21/2004CN1491373A Illumination engine for projection display using tapered light pipe
04/20/2004US6724530 Polarized light illuminator with a polarized light beam splitter
04/15/2004US20040070821 Critical dimension measuring instrument
04/15/2004US20040070742 Relay image optical system, and illuminating optical device and exposure system provided with the optical system
04/15/2004US20040070735 Lamp, condensing optical system, and image display device
04/15/2004DE10254674A1 Konstruktion zum Reflektieren von Licht Structure for reflecting light
04/13/2004US6721038 Device for step-and-repeat exposure of a substrate
04/08/2004US20040065817 Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
04/08/2004DE10245473A1 Strukturbreiten-Messgerät Linewidths meter
04/06/2004US6715880 Projector device comprising a rod integrator having at least one notch or a protruded portion
04/01/2004WO2004017124A3 Polarization converting system for liquid crystal projector
04/01/2004US20040062045 Structure for reflection of light
03/2004
03/31/2004EP1403676A1 Apparatus for measuring structure widths
03/31/2004EP1402306A2 Projection display system using two lamp sources
03/30/2004US6714297 Light detecting optical device
03/25/2004US20040057036 Exposure method
03/25/2004US20040057033 Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system
03/18/2004WO2004023570A1 Led light collection and uniform transmission system
03/17/2004EP1397715A1 Lensed tapered optical waveguide
03/16/2004US6707591 Angled illumination for a single order light modulator based projection system
03/16/2004US6707533 Detection apparatus and exposure apparatus using the same
03/11/2004WO2004021086A1 Grating based spectral filter for eliminating out of band radiation in an extreme ultra-violet lithography system
03/11/2004WO2004021068A1 Condenser
03/11/2004US20040047053 Coupling of light from a light source to a target using dual ellipsoidal reflectors
03/11/2004US20040046942 Illumination optical unit liquid crystal projector and production method of liquid crystal projector
03/11/2004US20040046489 LED light collection and uniform transmission system
03/09/2004US6704152 Light irradiating device, optical pickup device with the same, method of adjusting light irradiating device
03/09/2004US6704095 Control of a distribution of illumination in an exit pupil of an EUV illumination system
03/04/2004WO2002086617A3 Light recovery for projection displays
03/04/2004WO2002073535A8 Enhanced display of environmental navigation features to vehicle operator
03/04/2004US20040042085 Zoomable beamspreader for non-imaging illumination applications
03/04/2004US20040042070 Vehicular infrared light radiating lamp
03/03/2004EP1393134A2 Lighting system with a plurality of individual grids
03/02/2004US6698907 Method and device for coupling light sources to a light guide
03/02/2004US6698891 Polarizing unit, polarizing illumination device using same polarizing unit and projection display device using same polarizing illumination device
02/2004
02/26/2004WO2004017124A2 Polarization converting system for liquid crystal projector
02/26/2004US20040037388 Illumination system particularly for microlithography
02/26/2004US20040036977 Optical illumination device, exposure device and exposure method
02/26/2004US20040036037 Illumination system with a plurality of light sources
02/25/2004EP1391776A1 Light collecting, integrating and redirecting device
02/19/2004US20040032656 Polarization conversion system and method of calibrating same
02/12/2004US20040028175 Illumination system particularly for microlithography
02/11/2004CN1474235A Advanced lighting system for micro light carving method
02/05/2004US20040021827 Lamp, polarization converting optical system, condensing optical system and image display device
01/2004
01/29/2004WO2004010483A1 Illuminating optical system, exposure system and exposure method
01/29/2004DE10230652A1 Optische Vorrichtung mit einer Beleuchtungslichtquelle An optical device comprising an illumination light source
01/29/2004DE10229144A1 Multifunktionaler Prismenstumpfeil (PSK) zur solaren Strahlungskonzentration Multifunctional prism Stump Feil (PSC) for solar radiation concentration
01/28/2004CN1471647A Light condensing and collecting system using lensed light pipes
01/28/2004CN1471646A Lamp apparatus and method for effectively utilizing light from an aperture lamp
01/22/2004WO2004008507A1 Optical integrator, illumination optical device, exposure apparatus, and exposure method
01/22/2004US20040012864 Laser Beam Focusing Apparatus and Method for Focusing a Laser Beam
01/22/2004US20040012831 Illumination system and projector adopting the same
01/22/2004US20040012766 Illumination optical apparatus and exposure apparatus
01/22/2004US20040012764 Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method
01/15/2004WO2004006308A1 Illuminating method, exposing method, and device for therefor
01/15/2004WO2004006021A2 Optical device comprising an light source
01/15/2004WO2002084339A3 Projection display system using two lamp sources
01/15/2004US20040008408 Relay lens used in an illumination system of a lithography system
01/14/2004EP1380871A2 Relay lens used in an illumination system of a lithography system
01/14/2004CN1467534A Illumination unit employing dichroic mirror wheel and image display system including the illumination unit
01/13/2004US6676264 Laser beam focusing apparatus and method for focusing a laser beam
01/07/2004EP1377934A2 Enhanced display of environmental navigation features to vehicle operator
01/07/2004EP1377875A2 Angled illumination for a single order glv based projection system
01/02/2004EP1377073A2 Illumination unit employing dichroic mirror wheel and image display system including the illumination unit
12/2003
12/31/2003CN1464995A Illumination optical unit, liquid crystal projector and production method of liquid crystal projector
12/30/2003US6669345 Illumination system and projector
12/25/2003US20030234983 Illuminating optical system and projection display device including it
12/25/2003US20030234913 Illumination optical unit employing dichroic mirror wheel and image display system including the illumination optical unit
12/17/2003EP1372034A2 Advanced illumination system for use in microlithography
12/17/2003CN1461974A Assembling optical element external member and method, optical element, offset press, device manufacturing method
12/16/2003US6665052 Illumination optical system and projection exposure apparatus
12/11/2003US20030227609 Advanced illumination system for use in microlithography
12/04/2003WO2003100315A1 Illuminating device, and photographing device and projector device using this illuminating device
12/03/2003EP1367442A2 Illumination device
12/02/2003US6658084 Illumination system with variable adjustment of the illumination
12/02/2003US6655808 Focusing-device for the radiation from a light source
11/2003
11/26/2003EP1364252A2 An illumination engine for a projection display using a tapered light pipe
11/26/2003CN1459039A Coupling of light from light source to target using dual elpsoidal reflectors
11/20/2003US20030214643 Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus
11/13/2003WO2003014833A3 Collector with fastening devices for fastening mirror shells
11/13/2003US20030210482 Novel light collector
11/11/2003US6644814 LED-illumination-type DMD projector and optical system thereof
11/06/2003US20030206348 Optical illumination apparatus
10/2003
10/29/2003EP1356348A2 Illumination device and method for laser projector
10/28/2003US6639733 High efficiency non-imaging optics
10/28/2003US6639652 Illumination system for use in exposure apparatus
10/22/2003EP1354325A2 Collector with an unused area for lighting systems having a wavelength inferior or equal of 193 nm
10/22/2003CN2582022Y Reflective projection imaging device
10/22/2003CN1450378A Optical design method for composite ellipsoidal surface double high efficient condenser lens and condenser lens thereof
10/21/2003US6636367 Projection exposure device
10/21/2003US6635876 Low-loss non-imaging optical concentrator for use in infrared remote control systems
10/21/2003US6634759 Coupling of light from a light source to a target using dual ellipsoidal reflectors
10/14/2003US6633435 Illumination optical system and projector comprising the same
10/09/2003WO2003083579A1 Collector unit comprising a reflective element for lighting systems having a wavelength of less than 193 nm
10/02/2003WO2003081321A1 Lighting equipment and projection display device
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