Patents
Patents for G01L 9 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (16,396)
11/2002
11/26/2002US6484586 Differential pressure transducer
11/26/2002US6484585 Pressure sensor for a pressure transmitter
11/21/2002WO2002040955A3 Transducer packaging assembly for use in sensing unit subjected to high g forces
11/21/2002US20020172382 Pressure responsive device and method of manufacturing semiconductor substrate for use in pressure responsive device
11/21/2002US20020171114 Diaphragm-type semiconductor device and method for manufacturing diaphragm-type semiconductor device
11/21/2002US20020170875 Method for production of a semiconductor component and a semiconductor component produced by said method
11/21/2002DE10119293A1 Berührungslose magnetoelastische Sensoren Non-contact magnetoelastic sensors
11/21/2002DE10114751C1 Drucksensor Pressure sensor
11/20/2002EP1258032A1 Method for producing defined polycrystalline silicon areas in an amorphous silicon layer
11/20/2002EP1257797A2 Method and apparatus for remote measurement of physical properties inside a sealed container
11/20/2002EP0757541B1 Implantable capacitive absolute pressure and temperature sensor
11/20/2002CN2521603Y Oil pressure monitoring apparatus for oil well casing or oil pipeline
11/19/2002US6484107 Selectable on-off logic modes for a sensor module
11/19/2002US6483283 Semiconductor dynamic quantity-sensor and method of manufacturing the same
11/14/2002WO2002090916A1 Device comprising a wet filter containing a hydrophobic or hydrophobicized nanoporous material
11/14/2002WO2002010702A3 Micro-machined absolute pressure sensor
11/14/2002US20020167058 Semiconductor pressure sensor decreasing creep stress in <110> crystalline axis direction
11/14/2002DE10122511A1 Relativdrucksensor mit Feuchtefilter Relative pressure sensor with humidity filter
11/13/2002CN1379228A Pressure sensor with electrostatic bonding and sealed capacitor cavity and its preparing process
11/12/2002US6477993 Control device for solenoid driving valve
11/07/2002WO2002089038A2 Capacitive sensor system with improved capacitance measuring sensitivity
11/07/2002WO2002088655A1 Capacitive differential pressure sensor
11/07/2002WO2002088654A2 Semiconductor component, particularly a micromechanical pressure sensor
11/07/2002WO2002066282A3 Device for receiving a force acting upon a vehicle seat
11/07/2002US20020162399 Pressure sensor and method of manufacturing the same
11/07/2002DE10121394A1 Halbleiterbauelement, insbesondere ein mikromechanischer Drucksensor Semiconductor component, in particular a micromechanical pressure sensor
11/06/2002EP1255099A2 Pressure sensor for picking up the pressure in a combustion area of an engine and procedure for its manufacturing
11/06/2002EP1255098A1 Transfer fluid for pressure measurement and its application
11/06/2002EP1254358A1 Pressure sensor module
11/06/2002EP1254357A1 Optical pressure sensor
11/06/2002EP1254356A1 Oil-less differential pressure sensor
11/06/2002EP0799412B1 AC excitation of polysilicon based pressure sensors
11/05/2002US6474170 Pressure sensor
11/05/2002US6474169 Corrosion-resistant diaphragm pressure sensor
11/05/2002US6474168 Dynamic pressure sensor, photo acoustic gas detector, microphone, hydrophone and method of their manufacture
10/2002
10/31/2002WO2002086435A1 Contactless magneto-elastic sensors
10/31/2002US20020159671 Micromachined fiber optic sensors
10/31/2002US20020157476 Pressure measuring system
10/31/2002US20020157475 Sensor with built-in circuits and pressure detector using the same
10/31/2002US20020157474 Pressure sensor integrated into an electro-hydraulic control unit
10/31/2002US20020157473 Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
10/31/2002DE10120069A1 Scheibenförmiges Siliziumsensorelement für einen Druckfühler sowie Druckfühler unter Verwendung eines derartigen Siliziumsensorelements Disk-shaped silicon sensor element for a pressure sensor and pressure sensor using such a silicon sensor element
10/30/2002EP1253412A2 System for measuring pressure
10/30/2002EP1252490A1 Fluid diffusion resistant glass-encased fiber optic sensor
10/30/2002EP0934511A4 Fluid pressure sensing unit incorporating diaphragm deflection sensing array
10/29/2002US6472244 Manufacturing method and integrated microstructures of semiconductor material and integrated piezoresistive pressure sensor having a diaphragm of polycrystalline semiconductor material
10/29/2002US6472243 Method of forming an integrated CMOS capacitive pressure sensor
10/29/2002US6470754 Sealed capacitive pressure sensors
10/29/2002US6470739 Sensor mounting structure and semiconductor pressure sensor for motor vehicles
10/24/2002WO2002084336A2 Optical pressure monitoring system
10/24/2002WO2002084243A2 Method and apparatus for measuring pressure
10/24/2002WO2001070625A3 Micromechanical component and balancing method
10/24/2002WO2001059419A9 Optical pressure sensor
10/24/2002WO2001053789A9 Isolation technique for pressure sensing structure
10/24/2002US20020152817 Disk-shaped silicon sensor element for a pressure sensor and pressure sensor using such a silicon sensor element
10/24/2002US20020152816 Apparatus for filling gauge and sensor protectors with pressure transmitting fluid, diaphragm housing used therefor, and method using such apparatus
10/24/2002DE10216019A1 Container used for a semiconductor sensor comprises a housing part provided with a housing hollow space for a sensor element, a lid for closing the hollow space, and connecting lines
10/23/2002EP1250570A1 A multivariable transmitter
10/23/2002EP0776468B1 Differential pressure transmitter
10/23/2002CN1376261A Scalable process transmitter
10/23/2002CN1376260A Preinstallation of a pressure sensor module
10/17/2002US20020151100 Pressure sensor monolithically integrated and relative process of fabrication
10/17/2002US20020149069 Piezoresistive sensor with epi-pocket isolation
10/17/2002US20020148297 Pressure sensor using resin adhesive between sensor element and stem
10/17/2002DE10216020A1 Pressure sensor has pressure inlet device for pressure measuring chamber provided with integral protection device
10/17/2002DE10215104A1 Drucksensor, bei welchem ein Harzhaftmittel zwischen einem Sensorelement und einem Schaft verwendet wird Pressure sensor is used in which a resin adhesive between a sensor element and a shank
10/16/2002EP1151263B1 Improved coupled diaphragm interface for phacoemulsification apparatus
10/16/2002CN1092836C Capacitive absolute pressure sensor and its producing method
10/15/2002US6465855 Micromachined structure with a deformable membrane and method for making same
10/15/2002US6465271 Method of fabricating silicon capacitive sensor
10/15/2002US6463813 Displacement based pressure sensor measuring unsteady pressure in a pipe
10/15/2002CA2205169C Capacitive absolute pressure sensor and method
10/15/2002CA2126360C Seal arrangement
10/10/2002WO2002079743A1 Semiconductor pressure sensor
10/10/2002WO2002079742A1 Independent-excitation cross-coupled differential-pressure transducer
10/10/2002WO2002048668A3 Integrated cmos capacitive pressure sensor
10/10/2002US20020144554 Semiconductor physical quantity sensor
10/10/2002DE10117142A1 Capacitive differential pressure sensor incorporates correction of calculated differential pressure for eliminating dependency on network pressure
10/10/2002DE10117024A1 Vacuum panel internal pressure measuring method detects deformation of vacuum panel surface upon evacuation of suction cup applied to latter
10/09/2002EP1247972A1 Intake pressure sensing device for internal combustion engine
10/09/2002CN1373849A Pressure transmitter
10/08/2002US6460416 Capacitor structure and fabrication process
10/08/2002US6460234 Method of forming micromachined sealed capacitive pressure sensors
10/03/2002WO2002077598A1 Semiconductor pressure sensor and regulation method therefor
10/03/2002WO2002077597A1 Pressure sensor
10/03/2002WO2002077592A1 Device for determining a force
10/03/2002WO2002076881A1 Method for making a structure with micromachined membrane
10/03/2002WO2002076880A2 Method for producing micromechanic sensors and sensors produced by said method
10/03/2002WO2001024594A9 Environmentally sealed instrument loop adapter
10/03/2002WO2001023858A9 Scalable process transmitter
10/03/2002US20020142508 Metal film protection of the surface of a structure formed on a semiconductor substrate during etching of the substrate by a KOH etchant
10/02/2002EP1244900A1 Grain growth of electrical interconnection for microelectromechanical systems (mems)
10/02/2002EP1244899A2 Method and apparatus for a direct bonded isolated pressure sensor
10/02/2002EP1244898A1 Sapphire pressure sensor beam with gold germanium isolation braze joint
10/02/2002DE10114036A1 Verfahren zur Herstellung von mikromechanischen Sensoren und damit hergestellte Sensoren A process for producing micromechanical sensors and sensors produced thereby
10/02/2002DE10113291A1 Pressure measuring unit comprises a housing with two pressure chambers, and an axially movable rod with a carrier element which is axially compliant but radially stiff
10/01/2002US6458618 Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators
10/01/2002US6457368 Noise reduced pressure sensor
10/01/2002US6457367 Scalable process transmitter
09/2002
09/26/2002WO2002017677A3 Electrostatic electroacoustical transducer