Patents
Patents for G01L 9 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (16,396)
02/2002
02/07/2002WO2002010701A1 Device for measuring the pressure of a fluid
02/07/2002US20020014124 Capacitive pressure sensor
02/07/2002US20020014122 Overload-proof pressure sensor
02/07/2002DE10036433A1 Capacitive pressure sensor has membrane connected to base body via joint and groove to measurement capacitor connects to end of joint in base body
02/07/2002DE10036284A1 Production of sensor element used as thin film high pressure sensor comprises applying expanded measuring strip to membrane via electrically insulating substrate
02/07/2002CA2410707A1 Micro-machined absolute pressure sensor
02/06/2002CN2476012Y Silicon pressure sensor
02/06/2002CN1334979A Antenna device
02/06/2002CN1334919A Transducer having temp. compensation
02/06/2002CN1334918A 半导体压力传感器 Semiconductor pressure sensor
02/06/2002CN1334917A Inductive pressure transducer
02/06/2002CN1334451A 陶瓷压力传感器及差压传感器 Ceramic pressure sensor and pressure sensor
02/05/2002US6343514 Combined flow, pressure and temperature sensor
02/05/2002CA2026751C Process and device for the simultaneous measurement of the amount of oxygen and residual pressure in a package
01/2002
01/31/2002WO2002008713A1 Sensor usable in ultra pure and highly corrosive environments
01/31/2002WO2002008712A1 Capacitive pressure sensor
01/31/2002WO2002008711A1 Production method for a thin-layer component, especially a thin-layer high pressure sensor, and corresponding thin-layer component
01/31/2002WO2001063645A3 Capacitive pressure-responsive devices and their fabrication
01/31/2002US20020011637 Sensor
01/31/2002US20020011115 Process sensor module having a single ungrounded input/output conductor
01/31/2002US20020011114 Capacitive vacuum sensor
01/31/2002DE10034460A1 Hochdrucksensor, Verfahren und Werkzeug zu seiner Herstellung High pressure sensor, procedures and tools for its production
01/30/2002EP1176410A1 Pressure transducer with error compensation
01/30/2002EP1176408A2 Bending beam sensor with resistance elements
01/30/2002EP1175606A1 Braking device for vehicle braking systems
01/30/2002CN2475015Y Capacitance differential pressure/pressure sensor
01/29/2002US6341528 Strain sensing structure with improved reliability
01/29/2002US6341527 Capacitive pressure sensor
01/29/2002US6341526 Micromachined diffractive pressure sensor system
01/24/2002WO2002006785A1 Differential pressure sensor
01/24/2002WO2002006784A1 High pressure sensor, method and tool for producing the same
01/24/2002US20020009279 Optical filter device having creep-resistant optical fiber attachments
01/24/2002US20020009252 Optical sensor device having creep-resistant optical fiber attachments
01/24/2002US20020007681 Environmentally sealed service block
01/24/2002US20020007677 Printed circuit board inclinometer/accelerometer
01/24/2002DE10032579A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement A process for producing a semiconductor device as well as a product produced by the process semiconductor device
01/23/2002EP1174696A2 Pressure measurement cell with temperature sensor
01/23/2002EP1173739A1 Method for the non-invasive measurement of an internal pressure
01/22/2002CA2130364C Capacitive transducer feedback-controlled by means of electrostatic force and method for controlling the profile of the transducing element in the transducer
01/22/2002CA2050915C Piezoelectric differential pressure vortex sensor
01/17/2002WO2002004909A1 Pressure transmitter for clean environments
01/17/2002WO2002004908A1 Pressure transducer
01/17/2002WO2002004907A1 Surface-micromachined pressure sensor and high pressure application
01/17/2002US20020006682 Micromechanical component and appropriate manufacturing method
01/17/2002US20020005072 Sensor held by base having lead
01/17/2002DE10031129A1 Überlastfester Drucksensor Overload-proof pressure sensor
01/16/2002EP1172640A1 Differential pressure sensor
01/16/2002EP1171759A1 Method of making thin film piezoresistive sensor
01/15/2002US6338272 Method for determining parameters, for example level, pressure, gas composition in closed containers
01/15/2002CA2199901C Method for producing capacitive ceramic absolute pressure sensors sorted in zero-point long-term stability defect classes
01/15/2002CA2035030C Single diaphragm transducer with multiple sensing elements
01/10/2002WO2002003043A1 Capacity type pressure sensor and method of manufacturing the pressure sensor
01/10/2002WO2002002458A1 Method for production of a semiconductor component and a semiconductor component produced by said method
01/10/2002US20020003917 Micromachined, etalon-based optical fiber pressure sensor
01/10/2002US20020003274 Piezoresistive sensor with epi-pocket isolation
01/10/2002DE10131697A1 Pressure sensor has conductive elevations that are arranged in between opposing surfaces of shaft and sensor chip, thereby connecting sensor chip to guides
01/09/2002EP1170578A2 Overload-proof pressure sensor
01/09/2002EP1169628A1 A method of measuring pressure by means of a pressure gauge having a resonant element
01/09/2002EP1169619A1 An optical fibre sensor assembly
01/09/2002EP1169202A1 Device for measuring the pressure of a fluid
01/09/2002EP0866957B1 Instability oscillator with electrostatic presetting
01/08/2002CA2088353C Method and apparatus for measuring intracranial pressure
01/03/2002US20020000649 Method of fabrication of a microstructure having an internal cavity
01/03/2002US20020000127 High pressure piezoresistive transducer suitable for use in hostile environments and method for making the same
01/02/2002EP1166072A1 Dual-mode thickness-shear quartz pressure sensors for high pressure and high temperature applications
01/02/2002EP1166071A1 Sensor element
01/02/2002EP1166046A1 Measurement system utilizing a sensor formed on a silicon on insulator structure
01/02/2002EP0928414B1 Compensation technique for resistive bridge
01/02/2002CN1329243A Sensor
12/2001
12/27/2001WO2001098200A1 Vertical transistor comprising a mobile gate and a method for the production thereof
12/27/2001US20010054316 Method of manufacturing inertial force sensor
12/27/2001US20010054315 Micromechanical component protected from environmental influences
12/25/2001US6332476 Pressure level control device
12/20/2001US20010052628 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate
12/20/2001US20010052627 Piezoelectric/electrostrictive film type device
12/20/2001US20010052266 Semiconductor pressure sensor having rounded corner portion of diaphragm
12/20/2001DE10128577A1 Semiconductor pressure sensor for e.g., as intake pressure sensor in vehicle engine intake, has semiconductor substrate, diaphragm portion, strain gauge, circuit portion, and local oxidation of silicon film
12/19/2001EP1164378A1 Sensor
12/19/2001CN2466647Y Probe capable of measuring plant cell pressure and cell membrane potential simultaneously
12/18/2001US6331161 Method and apparatus for fabricating a pressure-wave sensor with a leveling support element
12/18/2001US6330829 Oil-filled pressure transducer
12/13/2001WO2001026136A3 Encapsulation for a three-dimensional microsystem
12/13/2001US20010050366 Semiconductor sensor device having a correction circuit
12/12/2001CN1326544A Capacitive measuring device
12/12/2001CN1326095A Multi-parameter sensor for micro-power optical fibre transmission
12/11/2001US6329825 Sensing apparatus having a sensing bridge circuit and a temperature detecting bridge circuit for detecting a physical quantity and a related temperature compensating method
12/11/2001US6328647 Pressure differential detecting system, and method of use
12/11/2001US6327911 High temperature pressure transducer fabricated from beta silicon carbide
12/06/2001US20010047689 Method to force-balance capacitive transducers
12/06/2001DE10126621A1 Semiconductor pressure sensor with a rounded corner part of a membrane for picking up pressure has a recess on a semiconductor substrate with a sidewall, a bottom wall acting as a membrane and a corner part with a bending radius
12/04/2001US6326795 Capacitance detection system and method
12/04/2001US6324914 Pressure sensor support base with cavity
11/2001
11/29/2001WO2001090704A2 Electrical leakage diagnostics in a magnetic flow meter
11/29/2001WO2001090702A2 Spectral diagnostics in a magnetic flow meter
11/29/2001WO2001090701A2 Conduction indication in a magnetic flowmeter
11/29/2001WO2001090577A1 Micromachined fluidic device and method for making same
11/27/2001US6321603 Pressure sensor
11/22/2001US20010042411 Pressure detecting appartus
11/22/2001DE10024266A1 Micromechanical component used as a pressure sensor comprises a semiconductor functional layer on a substrate, a hollow chamber arranged between the substrate and the functional layer, and distance spacers arranged on the substrate
11/21/2001EP1155297A1 Resonant sensor