Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
02/2008
02/27/2008CN101133297A Optical metrology optimization for repetitive structures
02/27/2008CN101131318A Measuring method and apparatus for measuring depth of trench pattern
02/27/2008CN101131317A Method and device for measuring micro-nano deep groove structure
02/27/2008CN101131316A System and device for measuring the thickness an optical disc and corresponding machine-readable medium
02/27/2008CN101131315A On-line visual measuring system for tile size and shape
02/27/2008CN100372123C CCD image sensor and high accuracy linear dimension measuring device and measuring method thereof
02/27/2008CN100372089C Pattern evaluating apparatus and pattern evaluating method
02/27/2008CN100371836C Digital imaging system having distribution controlled over distributed network
02/27/2008CN100371777C Projector for detecting plane displaying board and projecting method realized by same
02/27/2008CN100371703C Measuring device for measuring the degree of transmission of a coating
02/27/2008CN100371682C Elongation method for long grating sensor
02/27/2008CN100371677C Method and device for analysing the surface of a substrate
02/27/2008CN100371676C Method and device for quick high precision positioning light spot image mass center
02/27/2008CN100371675C Detected lens holding table for interferometer apparatus
02/27/2008CN100371674C Touch probe
02/27/2008CN100371492C Filming system and its film thickness monitoring device
02/26/2008US7336816 Method and apparatus for measuring shape of bumps
02/26/2008US7336805 Docking assistant
02/26/2008US7336433 Focusable laser collimator
02/26/2008US7336394 Discriminating method for recording medium and recording apparatus
02/26/2008US7336377 Foot measuring device
02/26/2008US7336376 Measuring pyramid size on a textured surface
02/26/2008US7336375 Wireless methods and systems for three-dimensional non-contact shape sensing
02/26/2008US7336374 Methods and apparatus for generating a mask
02/26/2008US7336373 Surface shape measuring apparatus and surface shape measuring method
02/26/2008US7336372 Noninvasive optical imaging by speckle ensemble
02/26/2008US7336369 Multi-axis interferometer system using independent, single axis interferometers
02/26/2008US7336366 Methods and systems for reducing complex conjugate ambiguity in interferometric data
02/26/2008US7336352 Position detection apparatus
02/26/2008US7336350 Wheel alignment apparatus and method utilizing three-dimensional imaging
02/26/2008US7336349 Systems and methods for determining a configuration of a barge complex
02/26/2008US7335280 Method and equipment in the measurement of the flatness of the flow surface of the headbox of a paper machine
02/26/2008US7334460 Method and apparatus of manipulating a sample
02/21/2008WO2008022178A2 Method for separating optical and resist effects in process models
02/21/2008WO2008021894A2 Method and apparatus for monitoring and control of suck back level in a photoresist dispense system
02/21/2008WO2008021109A2 Method and apparatus for contact free measurement of periodically moving objects
02/21/2008WO2008020688A1 An optical magnifier integrated with an arbor
02/21/2008US20080046183 Method for determining a map, device manufacturing method, and lithographic apparatus
02/21/2008US20080044748 separating out the adverse effects of the exposure tool from the effects of the photoresist; exposure tool is adjusted to compensate for the errors; methodology includes a determination of where the simulator best focus location is in comparison to the empirically derived best focus location
02/21/2008US20080043252 Internal and external measuring device
02/21/2008US20080043251 Proximity sensor system
02/21/2008US20080043250 Method and apparatus for measuring drawing position, and method and apparatus for drawing image
02/21/2008US20080043249 Apparatus for measurement of 3-d shape of subject using transformable holder with stable and repeatable positioning of the same subject
02/21/2008US20080043247 Method of Manufacturing an Optical Element
02/21/2008US20080043246 Multi-axis interferometer system using independent, single axis interferometers
02/21/2008US20080043239 Method and apparatus for angular-resolved spectroscopic lithography characterization
02/21/2008US20080043238 Data exchange system
02/21/2008US20080043237 Automatic laser alignment system
02/21/2008US20080043212 Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
02/21/2008DE102006038615A1 Überwachung der Qualität von gemusterten, insbesondere räumlich gekrümmten Oberflächen Monitoring the quality of patterned, in particular three-dimensionally curved surfaces
02/21/2008DE102006038577A1 Photo detector for optical position sensor, comprises two laminar electrodes, where photo-active layer is arranged between two electrodes, where surface of electrode is tapered monotonously with respect to longitudinal axis of detector
02/21/2008DE102006037533A1 Holding device for e.g. stent, has drive provided for moving flexible band along longitudinal direction of band such that object is rotated along its longitudinal direction during moving of object
02/21/2008DE102006000296B3 Contact unit`s co-planarity measuring device for e.g. ball grid array, has sensor that detects wave reflected to light emitting diodes, where each light emitting diodes has set of illumination devices arranged at sensor
02/21/2008CA2658831A1 Method of applying a string of interconnected strain sensors to an object, a pliable support structure, and method of producing a mineral hydrocarbon fluid
02/20/2008EP1890123A2 AE/ultrasound detection system, and material monitoring apparatus and nondestructive inspection apparatus equipped the system
02/20/2008EP1889470A2 Structured light imaging apparatus
02/20/2008EP1889004A2 Alignment structure for use with a light source and/or a light gathering reflector
02/20/2008EP1889002A2 Diffraction method for measuring thickness of a workpart
02/20/2008EP1889000A2 Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
02/20/2008EP1676128B1 Method and device for testing a component having a complex surface contour by means of ultrasound
02/20/2008EP1518090B1 Optical measurement of vane ring throat area
02/20/2008CN101128835A Shape roughness measurement in optical metrology
02/20/2008CN101128719A Probe for measuring the thickness of frost accretion on a surface
02/20/2008CN101127215A Method and apparatus for detecting CD eccentric volume
02/20/2008CN101126930A Pyramid type optical head device for CCD sun sensor
02/20/2008CN101126839A Semiconductor array technology
02/20/2008CN101126727A Pellet ore expansion index measuring method
02/20/2008CN101126703A Method for investigating metal right angle cutting chip forming
02/20/2008CN101126638A Pick-up measuring method for checking road surface planeness
02/20/2008CN101126633A Colorful stripe encoding method based on ring-shape arrangement
02/20/2008CN101126632A Method for measuring article profile using electronic speckle interferometry and carrier-frequency modulation
02/20/2008CN101126631A Three coordinate measuring machine grating reading head self-adaptive device
02/20/2008CN101126630A Step height on-line measuring system using optical fiber grating and wavelength-division multiplex technology
02/20/2008CN101126629A On-line measuring system using optical fiber grating synthetic wave for interfering step height
02/20/2008CN101126628A Tubular member internal thread detection device based on laser shift sensor
02/20/2008CN101126627A Light wave interference detection device and light wave interference detection method
02/20/2008CN100370487C Media sensing method of media dispenser
02/20/2008CN100370382C Image measuring system and method for digital control measuring bed
02/20/2008CN100370272C Method and apparatus for detecting position of mobile robot
02/20/2008CN100370222C Measuring method and measuring unit for determining the spatial position of a wheel rim, and chassis measuring device
02/20/2008CN100370221C Process endpoint detection method using broadband reflectometry
02/20/2008CN100370220C Single-image self-calibration for relative parameter of light structural three-dimensional system
02/20/2008CN100370219C Incidence angle scanning ellipsometric imagery measurement method and apparatus
02/19/2008US7333912 Multiple sensor system
02/19/2008US7333677 Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
02/19/2008US7333649 Measurement processing apparatus for geometrically measuring an image
02/19/2008US7333219 Handheld metrology imaging system and method
02/19/2008US7333218 Systems and methods for determining the location and angular orientation of a hole with an obstructed opening residing on a surface of an article
02/19/2008US7333217 System and method for detecting and correcting position deviations of an object having a curved surface
02/19/2008US7333214 Detector for interferometric distance measurement
02/19/2008US7333208 Full width array mechanically tunable spectrophotometer
02/19/2008US7333200 Overlay metrology method and apparatus using more than one grating per measurement direction
02/19/2008US7333199 Aligning optical components with three degrees of translational freedom
02/19/2008US7333191 Scanning probe microscope and measurement method using the same
02/19/2008US7333185 Optical velocimeter, displacement information measurement device and conveying and processing device
02/19/2008US7333182 Range finder and method of reducing signal noise therefrom
02/19/2008US7332733 System and method to correct for field curvature of multi lens array
02/19/2008US7332732 Alignment systems and methods for lithographic systems
02/19/2008US7332707 Aisle width sensor for mobile storage systems
02/19/2008US7332255 enables the user to measure process line shortening on an overlay tool; means for determining the misalignment, means for determining total line shortening, means for determining the equipment line shortening, and means for determining process line shortening