Patents
Patents for H01T 23 - Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere (2,972)
11/2007
11/21/2007CN101075727A High-pressure anionic generator
11/21/2007CN100350347C Display device with negative ion generation function and control method thereof
11/15/2007WO2007129633A1 Induction electrode, ion generating element, ion generating apparatus and electrical apparatus
11/14/2007EP1123639A4 Wafer level burn-in and test thermal chuck and method
11/14/2007CN200973920Y Food-care and beautifying machine having electromagnetic wave
11/14/2007CN101071937A Corona discharge type ionizer and fan unit
11/13/2007US7295418 Collimated ionizer and method
11/08/2007US20070258187 Electrostatic chuck
11/08/2007US20070258186 Substrate support with electrostatic chuck having dual temperature zones
11/08/2007US20070258185 Mobile, transportable, electrostatic chuck for wafers made of semiconductor material
11/08/2007US20070258184 Electrostatic chuck of high density plasma deposition apparatus
11/06/2007US7292426 Substrate holding system and exposure apparatus using the same
11/01/2007WO2007122742A1 Ionizer
11/01/2007US20070253139 Electrostatic Chuck
10/2007
10/31/2007CN101061986A Hair care device
10/25/2007US20070247778 Z-stage with dynamically driven stage mirror and chuck assembly
10/24/2007EP1848076A1 Ion generator and method for controlling ozone amount
10/18/2007WO2007118047A2 Multi-frequency static neutralization
10/18/2007WO2006118870A3 Pulsed dielectric barrier discharge
10/17/2007CN101057380A Ion air blower
10/11/2007WO2006116577A3 Electrostatic chuck with smart lift-pin mechanism for plasma reactor
10/11/2007US20070236857 Level adjustment systems and adjustable pin chuck thereof
10/11/2007US20070236856 Ion Generator and Method for Controlling Amount of Ozone Generated in the Same
10/11/2007US20070234924 Electricity-inducing immobilization cartridge attachment
10/10/2007EP1843438A2 Maintenance-free static eliminator
10/04/2007DE102006011790A1 Improvement method for physical and mental well-being, involves production of negative ions, where high environmental humidity caused in environment of cascade is used for negative ions of oxygen molecules
10/03/2007EP1671406B1 Systems and methods using an electrified projectile
10/03/2007CN100340305C Sterilizing method, sterilizing apparatus, and air cleaning method and apparatus using the same
09/2007
09/27/2007DE102006033612B3 Ionisationsvorrichtung zur Gasionisierung, sowie Vorrichtungen und Verfahren zum Aufbereiten von verunreinigtem Wasser Ionization of gas ionization, and apparatus and methods for treating contaminated water
09/20/2007US20070217118 Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus
09/20/2007US20070217117 Electrostatic chuck and producing method thereof
09/18/2007US7270698 Discharge device and air purifier
09/13/2007WO2007102191A1 Neutralization apparatus having minute electrode ion generation element
09/13/2007US20070211402 Substrate processing apparatus, substrate attracting method, and storage medium
09/12/2007EP1833131A1 Ion generating unit and ion generating apparatus
09/06/2007US20070205727 Plasma-generation power-supply device
09/05/2007EP1829823A2 Ozone generating apparatus
09/05/2007CN101032190A Gas excitation device having insulation film layer carrying electrode and gas excitation method
09/04/2007US7265962 Electrostatic chuck and production method therefor
08/2007
08/30/2007US20070201180 Electrostatic chuck and method of its manufacture
08/28/2007US7261767 Air purifier
08/23/2007WO2006035744A8 Gas excitation device having insulation film layer carrying electrode and gas excitation method
08/23/2007US20070195482 Johnsen-Rahbek electrostatic chuck driven with AC voltage
08/21/2007US7259955 Electrostatic holding device and electrostatic tweezers using the same
08/16/2007WO2007091625A1 Ion generator and method for controlling ozone amount
08/16/2007WO2007091366A1 Ion generator
08/15/2007CN1331538C Air refining device and ion generator used for device
08/14/2007US7256979 Ion generator, and electric apparatus and air conditioning apparatus incorporating the same
08/08/2007CN1330515C Vehicular neutralizing apparatus
08/08/2007CN101013797A Method and apparatus for generating glow discharge plasma under atmospheric pressure in air
08/07/2007US7254007 Display apparatus having an anion generator
08/07/2007US7254006 Ion generating element and ion generator, air conditioning apparatus, cleaner and refrigerator containing the same
08/02/2007WO2007085113A1 Oxygen ion generating tube
07/2007
07/25/2007EP1678802A4 Aerosol charge altering device
07/24/2007US7248457 Electrostatic chuck
07/24/2007US7248454 Static eliminator
07/19/2007US20070166209 Discharge tube
07/19/2007US20070165355 Plasma etching method and computer-readable storage medium
07/18/2007EP1809082A1 Gas excitation device having insulation film layer carrying electrode and gas excitation method
07/17/2007US7245357 Lithographic apparatus and device manufacturing method
07/11/2007EP1805856A2 Air ionization module and method
07/11/2007EP1804841A2 Process and device for sterilising ambient air
07/11/2007CN2922376Y Exhaust-type ion wind gun
07/11/2007CN2922222Y Gas electric driving device
07/11/2007CN1997440A Air cleaning device
07/10/2007US7242568 Display apparatus
06/2007
06/26/2007US7236344 Ionic flow generator for thermal management
06/21/2007US20070139857 Method for manufacturing semiconductor device or semiconductor wafer
06/21/2007US20070139856 Method and apparatus for controlling temperature of a substrate
06/21/2007US20070139854 Monitoring device for transport pods
06/21/2007US20070138149 Multi-frequency static neutralization
06/13/2007EP1424032B1 Vacuum cleaner and device having ion generator
06/13/2007CN2912190Y Negative ion energy saving lamp
06/07/2007WO2007062816A1 Capacitor device and method for generating radicals and oxidants
06/07/2007US20070127188 Method of feedback control of esc voltage using wafer voltage measurement at the bias supply output
06/05/2007US7227735 Current regulated, voltage limited, AC power supply with DC offset for corona chargers
05/2007
05/31/2007WO2007061738A2 Maldi/ldi source
05/31/2007WO2007061120A1 Aerosol charge neutralizing device
05/31/2007DE102005056726A1 Verfahren zur oxidativen Behandlung von Gasinhaltsstoffen, das nach dem Prinzip der nichtthermischen, plasmachemischen Umsetzung arbeitet A process for the oxidative treatment of gas constituents and operating according to the principle of the non-thermal plasma chemical reaction
05/30/2007EP1791233A1 Ion generation apparatus
05/30/2007EP1791232A1 Ion generating apparatus and air cleaning apparatus using the same
05/30/2007EP1790361A1 Ion generator
05/30/2007EP1790360A1 Sterilizing method, sterilizing apparatus, ion generating apparatus, and electric appliance and air cleaning apparatus using them
05/30/2007CN1972551A Ion balance adjusting method and method of removing charges from workpiece by using the same
05/29/2007US7224567 Structural arrangements for ion generator to promote ionization efficiency
05/24/2007WO2007056887A1 Apparatus for the lockable and unlockable holding/securing of objects of use, in particular of ionization tubes for the ionization of air, on a holding plate
05/24/2007US20070114437 MALDI/LDI source
05/24/2007US20070114436 Filament member, ion source, and ion implantation apparatus
05/24/2007US20070114435 Filament member, ion source, and ion implantation apparatus
05/23/2007CN2902295Y Improved oxygen ion generation tube
05/23/2007CN1969435A Ion generating unit and ion generating apparatus
05/22/2007US7221551 Cascaded gate-driven ESD clamp
05/17/2007US20070109714 Embossing chuck enabling wafer to be easily detached therefrom
05/17/2007US20070109713 Electrostatic chuck
05/17/2007US20070109711 Ion generating element, ion generating apparatus, and electric appliance
05/15/2007US7218501 High efficiency power supply circuit for an electrical discharge weapon
05/10/2007WO2007052590A1 Air-blowing ionizer
05/10/2007WO2007052589A1 Dc ionizer
05/10/2007US20070103844 Disassembly method and reuse method of substrate mounting member
05/10/2007US20070103843 Electrostatic mems components permitting a large vertical displacement
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