| Patents for G01F 9 - Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine (1,467) |
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| 07/11/2006 | US7074525 Projecting light through a photomask using an optical projection system, sub-resolution features in clear areas adjacent to lines and spaces reduce transparency of the clear areas reduce light scattering and flare, greater degree of defocus in the pattern, less resist stripping |
| 07/11/2006 | US7073969 Method for fabricating a photomask for an integrated circuit and corresponding photomask |
| 07/05/2006 | CN1796999A System for testing discharge of tail gas of automobile |
| 07/04/2006 | US7072762 Evaluation system for vehicle operating conditions and evaluation method thereof |
| 06/29/2006 | DE19623734B4 Kraftstoffmeßsystem Kraftstoffmeßsystem |
| 06/27/2006 | US7067223 coating masking layers comprising inorganic phosphates having a nonlinear refractive index, to radiation transparent substrates, then applying photoresist, developing, etching to form miniature patterns and stripping the photoresists; integrated circuits; photolithography |
| 06/27/2006 | US7067222 Pellicle for lithography |
| 06/27/2006 | US7067221 Designing method and device for phase shift mask |
| 06/21/2006 | CN1789924A Method for continuous measurement of liquid consumption |
| 06/20/2006 | US7063922 Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof |
| 06/20/2006 | US7063921 Photomask, in particular alternating phase shift mask, with compensation structure |
| 06/20/2006 | US7063478 Crystallization apparatus and crystallization method |
| 06/14/2006 | DE112004001554T5 Baumaschine Construction Machinery |
| 06/13/2006 | US7060401 directing radiation at a reflective reticle of a first reflective region,a second reflective region, and an absorptive region; the reflective regions are on opposite sides of the absorptive region, |
| 06/13/2006 | US7060400 Method to improve photomask critical dimension uniformity and photomask fabrication process |
| 06/13/2006 | US7060399 a multilayer optical mirror of a substrate and reflective layers, and a capping layer on which an artificial oxide layer forms in air and is doped to improve optical properties during a lithographic exposure of semiconductor products |
| 06/13/2006 | US7060398 photomask for forming a small pattern used for producing a semiconductor integrated circuit device; reducing size of circuit patterns for high integration of a large-scale integrated circuit |
| 06/13/2006 | US7060394 Photoresist comprises both low and high transmission layers for improved resolution |
| 06/06/2006 | US7056629 slit or aperture layouts and radiation beams for projection onto regions of films covering substrates to induce crystallization, without the need to rotate the photomasks; effieciency |
| 06/06/2006 | US7056628 Mask for projecting a structure pattern onto a semiconductor substrate |
| 06/06/2006 | US7056627 forming stress correction film between reflection film for reflecting exposure light on substrates and absorber layers for absorbing exposure light; multilayers used for pattern transfer of semiconductors |
| 06/06/2006 | US7056626 Crystallization apparatus, crystallization method, thin film transistor and display apparatus |
| 06/01/2006 | US20060116472 Compositions comprising graft polymer for extrusion processing |
| 06/01/2006 | DE102005050921A1 Treibstoffverbrauchs-Abschätzungsvorrichtung für Fahrzeuge Fuel consumption estimation apparatus for vehicles |
| 05/30/2006 | US7052810 exposing and developing a testing photoresist layer using a test photo mask to form hole patterns corresponding to first hole patterns; measuring photoresist critical dimensions (pCDs) of the second hole patterns on the test photoresist layer; determining correction of mask critical dimention (mCDs) |
| 05/30/2006 | US7052807 Uniformity |
| 05/26/2006 | WO2006055969A1 Apparatus and method for fuel measurement and accountability |
| 05/23/2006 | US7049035 electrochemically depositing an additive material on exposed sidewalls of an etched first layer of the mask whose top remains covered by a hardmask used during the etching of the first layer; a second layer beneath the etched first layer is resistant to the electrochemical deposition of the additive |
| 05/23/2006 | US7049034 Photomask having an internal substantially transparent etch stop layer |
| 05/03/2006 | CN1768198A System for indicating, recording, and evaluating driving data mode of vehicle for fuel economy |
| 05/02/2006 | US7037628 Method of a floating pattern loading system in mask dry-etching critical dimension control |
| 05/02/2006 | US7037627 Photomask defect testing method, photomask manufacturing method and semiconductor integrated circuit manufacturing method |
| 05/02/2006 | US7037626 an assembly of lithographic sub-masks together forming a fictitious design mask for configuring a device pattern in a layer of a substrate |
| 04/27/2006 | WO2006042789A1 Measuring device for determining the delivered quantity of fuel in an injection valve |
| 04/27/2006 | US20060089785 Fuel consumption estimating unit of vehicle |
| 04/25/2006 | US7033709 masking; selectively coding the spaced regions to define a masked read only memory (ROM) structure that causes optical interference; illumination; development; improved circuit density and reliability; miniaturization; integrated circuits |
| 04/18/2006 | US7029803 Lithography; multilayer; substrate, thin films , layer having controlled optical transmission; defect-free |
| 04/13/2006 | WO2006038787A1 Method and device for measuring fuel |
| 04/13/2006 | WO2006011054A3 System for verifying the consumption of apparatuses using internal combustion motors |
| 04/11/2006 | US7026076 Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC |
| 04/06/2006 | WO2006037027A1 Phase-shift mask providing balanced light intensity through different phase-shift apertures and method for forming such phase-shift mask |
| 04/05/2006 | EP1641649A1 Display device and method for control of a display device for motor vehicles |
| 04/04/2006 | US7022436 alternating and attenuating phase shift masks that provide improved resolution of a photolithographic projection apparatus |
| 04/04/2006 | US7022435 Method for the manufacture of phase shifting masks for EUV lithography |
| 03/30/2006 | WO2006032873A1 Fuel leak estimator |
| 03/28/2006 | US7018750 Exposing the silicon layer to a laser beam through a mask having a phase shift layer; stripes having a first width separated by slits, and an overlapping blocking layer having stripes having a narrower width and parallel to the first |
| 03/28/2006 | US7018749 Crystallization apparatus, crystallization method, and phase shift mask and filter for use in these apparatus and method |
| 03/28/2006 | US7017429 Continuous test flow method and apparatus |
| 03/21/2006 | US7014962 Half tone alternating phase shift masks |
| 03/14/2006 | US7011912 Rapid, error free semiconductor batch production |
| 03/14/2006 | US7011910 Halftone-type phase-shift mask blank, and halftone-type phase-shift mask |
| 03/07/2006 | US7008733 Method of improving a resolution of contact hole patterns by utilizing alternate phase shift principle |
| 02/21/2006 | US7001697 Photolithography |
| 02/21/2006 | US7001696 Near-field light exposure mask with avoidance of overlap of near-field light, method for manufacturing the same, exposure apparatus and method using near-field light exposure mask, and method for manufacturing device |
| 02/14/2006 | US6998205 Optical proximity correction method |
| 02/14/2006 | US6998204 patterning the non-transparent film using the etch stop layer to expose areas of the transparent substrate, forming a mask on the non-transparent film to protect selected areas of the transparent substrate and forming a phase shift oxide |
| 02/14/2006 | US6998202 mask formed of a multilayered stack covered by a spacer layer, such as silicon or boron carbide, in turn covered by a thin layer to prevent inter-diffusion, and finally covered by a capping layer of ruthenium |
| 02/14/2006 | US6998200 Reflection layer on a substrate, an absorber pattern on the reflection layer, and a capping layer on the reflection layer. The capping layer may be selected to decrease a reflectivity of the reflection photomask by less than about |
| 02/07/2006 | US6994940 Phase shift mask, method for forming pattern using phase shift mask and manufacturing method for electronic device |
| 01/26/2006 | DE4336813B4 Vorrichtung zur Lasterfassung bei einer Brennkraftmaschine An apparatus for measuring the load in an internal combustion engine |
| 01/17/2006 | US6986974 Attenuated phase shift mask for extreme ultraviolet lithography and method therefore |
| 01/17/2006 | US6986972 Alternating aperture phase-shift mask fabrication method |
| 01/17/2006 | US6986971 Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same |
| 01/10/2006 | US6985804 Evaluation system for vehicle operating conditions |
| 01/10/2006 | US6984475 Extreme ultraviolet (EUV) lithography masks |
| 01/03/2006 | US6982134 Multiple stepped aperture repair of transparent photomask substrates |
| 01/03/2006 | US6982133 Damage-resistant coatings for EUV lithography components |
| 12/29/2005 | WO2005124293A1 Method of forming a semiconductor layer using a photomask reticle having multiple versions of the same mask pattern with different biases |
| 12/29/2005 | US20050288850 Driving evaluation apparatus, driving evaluation program, and driving evaluation method |
| 12/28/2005 | CN1712909A Driving evaluation apparatus and driving evaluation method |
| 12/15/2005 | US20050277033 Method of forming a semiconductor layer using a photomask reticle having multiple versions of the same mask pattern with different biases |
| 12/13/2005 | US6975217 Vehicle fuel mileage meter |
| 12/13/2005 | US6974652 Lithographic photomask and method of manufacture to improve photomask test measurement |
| 12/01/2005 | DE102004024270A1 Verfahren und Vorrichtung zur Bestimmung einer Abgasrückführungsrate Method and apparatus for determining an exhaust gas recirculation rate |
| 12/01/2005 | DE102004021096A1 Vehicle fuel tank level determination procedure records amount used and subtracts from measured or manually entered original amount |
| 11/30/2005 | CN2743801Y Oil consumption measurer for engine |
| 11/24/2005 | WO2005111401A1 Method and device for determining an exhaust gas recirculation rate |
| 11/10/2005 | US20050247123 Fuel quantity estimate system |
| 11/02/2005 | EP1590089A1 Method of making an array of samples comprising the step of automatically dispensing a high-viscosity liquid |
| 11/01/2005 | US6961656 Apparatus for indicating distance to empty of a vehicle, and a method thereof |
| 10/06/2005 | DE102004013612A1 Vehicle operating parameter measurement system has sensors connected to display and measurement unit by on board data bus |
| 09/29/2005 | WO2005090931A1 Embedded attenuated phase shift mask with tunable transmission |
| 09/22/2005 | US20050208390 Exposed regions of a substrate are etched to a predetermined depth; Additional regions are exposed and trimmed to a predetermined thickness to provide desired attenuation amount; final etched depth compensating for the change of relative phase shift caused by trimming |
| 09/13/2005 | US6944530 System and method for air flow and EGR flow estimation |
| 09/08/2005 | US20050196688 Performing model-based optical proximity correction (OPC) on the repair solution; allowing repair decision for an attenuated phase shifing mask to be made at the same time that inspection is done |
| 09/06/2005 | US6940401 Customizable low fuel indicator system |
| 08/23/2005 | US6933084 Alternating aperture phase shift photomask having light absorption layer |
| 08/09/2005 | US6927005 Alternating phase shift mask design with optimized phase shapes |
| 08/09/2005 | US6927003 Automatic maintenance of radiation transparent deformations on attenuated phase shifting masks(PSM), using computer programs for analysis, then plugging with carbon |
| 08/09/2005 | CA2221768C Display unit for data dependent on a vehicle's energy consumption |
| 08/04/2005 | US20050170288 Optical lithography; radiation transparent phase shifting masks used in manufacture of semiconductors/integrated circuits |
| 08/02/2005 | US6924069 Depositing a negative photoresist over the light blocking layer to include filling a portion of the opening exposing the negative photoresist layer through the quartz substrate; developing and dry etching; accuracy |
| 07/21/2005 | WO2005066591A1 Fuel tank level monitoring system and method |
| 07/21/2005 | US20050155417 Fuel meter for outboard engines |
| 06/28/2005 | US6912480 Method and apparatus for determining the mass flow through an engine |
| 06/28/2005 | US6911286 Photolithographic process used in semiconductor manufacturing |
| 06/21/2005 | US6908713 EUV mask blank defect mitigation |
| 06/16/2005 | DE10353689A1 Verfahren zur Ermittlung von Kraftstoffmehrverbrauch in einem Kraftfahrzeug und Verfahren zur Anzeige des Kraftstoffmehrverbrauchs Procedure for the determination of fuel consumption in a motor vehicle and method for displaying the additional fuel consumption |
| 06/14/2005 | US6907340 System for managing information concerning the fuel consumption of a motor vehicle engine |
| 06/14/2005 | US6904783 System and method for detecting faulty fuel tank level sensor |