| Patents for F27B 5 - Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated (2,607) |
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| 11/22/2006 | CN1285752C Intermediate frequency inductive carburizing furnace |
| 11/21/2006 | US7138608 Sealed line structure for use in process chamber |
| 11/21/2006 | US7138607 Determining method of thermal processing condition |
| 11/21/2006 | US7138606 Wafer processing method |
| 11/16/2006 | WO2006009787A3 Device for cooling and humidifying reformate |
| 11/16/2006 | DE102004012232B4 Verfahren zum Herstellen von Plattenstapeln, insbesondere zum Herstellen von aus wenigstens einem Plattenstapel bestehenden Kühlern A method for producing stacks of plates, especially for producing a plate stack consisting of at least coolers |
| 11/15/2006 | CN2837309Y Takeout-free vertical magnesium reducing furnace |
| 11/14/2006 | US7135656 Apparatus and method for reducing stray light in substrate processing chambers |
| 11/09/2006 | US20060249502 Distance estimation apparatus, abnormality detection apparatus, temperature regulator, and thermal treatment apparatus |
| 11/09/2006 | US20060249501 Oven for controlled heating of compounds at varying temperatures |
| 11/08/2006 | EP1718909A1 Backside rapid thermal processing of patterned wafers |
| 11/02/2006 | DE112004001923T5 Hochdruck-Wärmebehandlungsofen High-pressure heat treatment furnace |
| 10/26/2006 | WO2006111252A1 Heat treatment of metal work pieces |
| 10/26/2006 | CA2605124A1 Heat treatment of metal work pieces |
| 10/24/2006 | US7126087 Method of effecting heating and cooling in reduced pressure atmosphere |
| 10/19/2006 | US20060234178 Apparatus and method for heating substrate and coating and developing system |
| 10/18/2006 | CN2828697Y Ceramic pushed bat kiln of coal and gas mixing burning |
| 10/11/2006 | CN1279189C Indirectly-heating equipment for running product, specially for plate material by means of fossil fuel |
| 10/10/2006 | US7118085 Retort system |
| 10/05/2006 | WO2006103697A1 Rapid and homogenous heat treatment of large metallic sample using high power microwaves |
| 10/05/2006 | US20060219692 Pointer for interactive display system |
| 10/03/2006 | US7115837 Selective reflectivity process chamber with customized wavelength response and method |
| 09/27/2006 | EP1704265A2 Melting and vaporizing apparatus and method |
| 09/20/2006 | CN1276550C Positive locking element lead retainer/insulator |
| 09/20/2006 | CN1276481C Producing method for ceramic membrane and pressurized heat treatment apparatus therefor |
| 09/19/2006 | US7109443 Multi-zone reflecting device for use in flash lamp processes |
| 09/14/2006 | US20060201927 Heating device for heating semiconductor wafers in thermal processing chambers |
| 09/13/2006 | EP1701121A2 Thermal treatment furnace |
| 09/13/2006 | CN1831457A Continuous fritting furnace for non-oxide ceramic fritting and using method |
| 09/12/2006 | US7105049 Method of manufacturing single crystal calcium fluoride |
| 09/05/2006 | US7103271 plane-shaped heating component faces one surface of a workpiece, irradiating light to raise the temperature of a semiconductor wafer; distortion-free; relieving stress by giving a distribution to a light irradiation intensity of an open loop control, reducing temperature variation |
| 09/05/2006 | US7102104 Thermal processing unit; a tubular processing container for holding semiconductor wafers in a tier-like manner for film-forming process, an etching process, an oxidation process producting semiconductor integrated circuits |
| 08/30/2006 | CN1825041A Vacuum-hot pressing sintering furnace |
| 08/24/2006 | US20060188687 One piece shim |
| 08/23/2006 | EP1240807B1 Improved infrared heating oven for the conditioning of plastic preforms |
| 08/17/2006 | WO2006086217A2 Vacuum muffle quench furnace |
| 08/17/2006 | US20060180085 One piece shim |
| 08/16/2006 | CN2807171Y Microwave sintering furnace for powder material |
| 08/15/2006 | US7091453 Heat treatment apparatus by means of light irradiation |
| 08/10/2006 | US20060175316 Vacuum muffle quench furnace |
| 08/08/2006 | US7087097 Facility for the gasification of carbon-containing feed materials |
| 08/08/2006 | US7086396 Heating apparatus |
| 08/02/2006 | CN2802405Y Vertical continuous fritting furnace with multiple temp zone pipes |
| 08/02/2006 | CN1813163A Gas cooling type vacuum heat treating furnace and cooling gas direction switching device |
| 08/02/2006 | CN1267528C Double-fired horizontal tube heater |
| 08/01/2006 | US7083658 exothermic oxidizer reactor with a CaS inlet, a hot air inlet and a CaSO4/waste gas outlet and an endothermic reducer reactor with a CaSO4 inlet circulating to the oxidizer reactor CaSO4/waste gas outlet, a CaS/syngas outlet circulating to the oxidizer reactor CaS inlet |
| 07/26/2006 | CN2800200Y Carbon tube type high temperature sintering furnace |
| 07/19/2006 | CN2798007Y Non water cooled electrode |
| 07/13/2006 | US20060151462 Semiconductor wafer baking apparatus |
| 07/13/2006 | DE102004049888B4 Furnace for dental parts has between the heating element and burner chamber a heat-permeable cover element supported on furnace hood |
| 07/12/2006 | CN2796093Y Semiconductor module producing system |
| 07/12/2006 | CN2795765Y High efficiency anti-slip wear-resistance mixing machine lining plate |
| 07/12/2006 | CN1800763A Three-chamber type intelligent periodically controllable atmosphere furnace |
| 07/11/2006 | US7075037 Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer |
| 07/06/2006 | DE202006006993U1 Workpiece holder for thermal treatment of exhaust gas catalysers has support surface with contour corresponding to bearing face of catalyser and support surface forms form centering surface for catalyser |
| 06/29/2006 | DE112004001402T5 System zum Prozessieren eines Behandlungsobjekts System for processing a treatment object |
| 06/28/2006 | CN2791569Y Flyash ceramsite sintering machine |
| 06/28/2006 | CN2791568Y Low temperature rapid-cooling vacuum, sintering equipment |
| 06/28/2006 | CN1261732C Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon |
| 06/27/2006 | US7068926 flash lamps are turned on to cause momentary expansion and contraction of the gas in a chamber, thereby scattering particles deposited on a bottom plate, etc.; scattered particles are removed by the nitrogen gas passing through a bottom portion of the chamber and discharged through the outlet passage |
| 06/27/2006 | US7067770 vacuum-compatible system includes a tube that is permeable to IR radiation, extends into the treatment chamber and penetrates the wall of the chamber; a source of infrared radiation is inside the tube which is isolated from the atmosphere inside the treatment chamber. |
| 06/27/2006 | US7067006 OH and H resistant silicon material |
| 06/15/2006 | US20060127067 Fast heating and cooling wafer handling assembly and method of manufacturing thereof |
| 06/13/2006 | US7060939 Substrate heating method, substrate heating system, and applying developing system |
| 06/13/2006 | US7060134 One piece shim |
| 06/13/2006 | US7059848 Method of and auxiliary cleaner for use in cleaning a diffusion furnace of semiconductor manufacturing equipment |
| 05/31/2006 | EP1662219A1 Firing kiln and process for producing porous ceramic member therewith |
| 05/26/2006 | WO2006055772A1 Kilns for processing ceramics and methods for using such kilns |
| 05/26/2006 | CA2626002A1 Kilns for processing ceramics and methods for using such kilns |
| 05/24/2006 | DE202006003855U1 Refractory lining for vacuum and protective gas furnaces used for heat treatment and sintering processes comprises graphite and/or carbon fibers with a metallic and/or ceramic coating in the form of a coating adhering to a substrate |
| 05/24/2006 | CN2783233Y Base type hent mine material feeder |
| 05/24/2006 | CN1777974A Critical dimension variation compensation across a wafer by means of local wafer temperature control |
| 05/23/2006 | US7049549 Covering a substrates with various heating properties ; uniform temperature profile and uniform film deposition |
| 05/18/2006 | US20060102612 Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer |
| 05/17/2006 | EP1657511A1 Firing kiln and process for producing ceramic member therewith |
| 05/17/2006 | CN2781304Y Multifunction three-chamber fritting furnace for Nd-Fe-B permanent magnet |
| 05/17/2006 | CN1774607A Vertical-type heat treating apparatus and workpiece transfer method |
| 05/16/2006 | US7045746 Shadow-free shutter arrangement and method |
| 05/16/2006 | US7044731 Heat treatment apparatus |
| 05/10/2006 | EP1135659B1 Apparatus and method for thermal processing of semiconductor substrates |
| 05/09/2006 | US7041939 Thermal processing apparatus and thermal processing method |
| 05/09/2006 | US7041931 Stepped reflector plate |
| 05/03/2006 | EP1125089B1 Indirect-fired, all ceramic pyrochemical reactor |
| 05/02/2006 | US7038174 Heating device for heating semiconductor wafers in thermal processing chambers |
| 05/02/2006 | US7038173 Heat substrates; positioning lamps perpendicular with reflector; efficient radiation; ring of reflective light; uniform temperature |
| 04/27/2006 | DE19741837B4 Hochtemperatur-Ofenanlage und Verfahren zur Wärmebehandlung von Materialien High-temperature furnace system and method for heat treatment of materials |
| 04/26/2006 | CN1763465A Push plate of nitrogen kiln for sintering soft magnetic ferrite |
| 04/25/2006 | US7034255 Light irradiation type thermal processing apparatus |
| 04/20/2006 | US20060084023 Method of and auxiliary cleaner for use in cleaning a diffusion furnace of semiconductor manufacturing equipment |
| 04/20/2006 | US20060083495 Variable heater element for low to high temperature ranges |
| 04/20/2006 | DE102004049888A1 Furnace for dental parts has between the heating element and burner chamber a heat-permeable cover element supported on furnace hood |
| 04/18/2006 | US7029505 Sheet type heat treating apparatus and method for processing semiconductors |
| 04/13/2006 | US20060076324 Melting and vaporizing apparatus and method |
| 04/12/2006 | CN1758005A Electric calcining furnace of using volatile and electric calcining method |
| 04/12/2006 | CN1250477C Burning furnace, burnt body producing method, and burnt body |
| 04/11/2006 | US7026581 relates to field of semiconductor thermal processing systems, specifically to a vertical rapid thermal processing unit that includes an elevator assembly for positioning a wafer within the processing unit; accurately controls position of wafer within processing chamber |
| 04/11/2006 | US7026580 apparatus for adjusting exhaust flow to a high level that cleans hot plate apparatus; use in photolithography section of semiconductor manufacturing process for numerous heat treating operations, for example, a post expose bake operation |
| 04/11/2006 | US7024916 Vacuum heat treatment furnace and method of and apparatus for measuring carbon concentration in atmosphere having reduced pressure. |
| 04/05/2006 | EP1643199A1 Gas cooling type vacuum heat treating furnace and cooling gas direction switching device |
| 04/05/2006 | EP1522090A4 Thermal processing system and configurable vertical chamber |