| Patents for F16K 99 - Subject matter not provided for in other groups of this subclass (2,394) |
|---|
| 05/27/1993 | WO1993010385A1 Micromechanical valve for micromechanical dosing devices |
| 05/27/1993 | DE4138491A1 Mikromechanisches ventil fuer mikromechanische dosiereinrichtungen Micromechanical valve for micromechanical dosing |
| 05/12/1993 | EP0540510A1 Micromechanic manipulator. |
| 02/16/1993 | US5186001 For providing motion at a high repetitive rate |
| 02/02/1993 | US5182910 Micromechanical manipulator |
| 01/19/1993 | US5180623 Electronic microvalve apparatus and fabrication |
| 01/07/1993 | EP0521117A1 Microvalve. |
| 01/05/1993 | US5176358 Microstructure gas valve control |
| 12/24/1992 | DE4119955A1 Miniatur-betaetigungselement Miniature betaetigungselement |
| 12/23/1992 | WO1992022763A1 Miniature actuating device |
| 12/16/1992 | EP0518524A2 Valve and semiconductor fabricating equipment using the same |
| 11/19/1992 | EP0513018A1 Microvalve. |
| 11/17/1992 | US5163920 Flow regulator damper element |
| 11/11/1992 | EP0512521A1 Thermally actuated microminiature valve |
| 11/10/1992 | US5161774 Microvalve |
| 09/01/1992 | US5142781 Method of making a microvalve |
| 08/19/1992 | EP0498863A1 A valve equipped with a position detector and a micropump incorporating said valve. |
| 08/06/1992 | WO1992013200A1 Microvalve |
| 07/31/1992 | WO1992014199A1 Flow regulator |
| 07/23/1992 | DE4101575A1 Mikroventil Microvalve |
| 07/21/1992 | CA1305393C Silicon micromachined elastic flow valves |
| 07/08/1992 | EP0478716A4 Semiconductor microactuator |
| 06/24/1992 | EP0491026A1 Valve and micropump incorporating said valve. |
| 05/20/1992 | EP0485739A1 Microvalve having a multilayer structure |
| 04/08/1992 | EP0478716A1 Semiconductor microactuator. |
| 04/08/1992 | EP0478565A1 Microvalve. |
| 04/07/1992 | CA1298530C Silicon micromachined non-elastic flow valves |
| 03/19/1992 | WO1992004569A1 A valve equipped with a position detector and a micropump incorporating said valve |
| 03/17/1992 | US5096643 Method of manufacturing microvalves |
| 02/05/1992 | EP0469749A1 Control valve utilizing mechanical beam buckling |
| 01/21/1992 | US5082242 Electronic microvalve apparatus and fabrication |
| 01/11/1992 | WO1992001160A1 Valve and micropump incorporating said valve |
| 01/11/1992 | CA2065735A1 Valve and micropump incorporating said valve |
| 12/24/1991 | US5074629 Integrated variable focal length lens and its applications |
| 12/11/1991 | EP0447451A4 Micromachined valve with polyimide film diaphragm |
| 12/03/1991 | US5069419 Semiconductor microactuator |
| 11/19/1991 | US5065978 Valve arrangement of microstructured components |
| 10/22/1991 | US5058856 Thermally-actuated microminiature valve |
| 09/25/1991 | EP0447451A1 Micromachined valve with polyimide film diaphragm. |
| 09/24/1991 | US5050838 Control valve utilizing mechanical beam buckling |
| 08/22/1991 | WO1991012434A1 Microvalve |
| 08/14/1991 | DE4003619A1 Two=stage multilayer micro-valve - has central flexible tongue in first stage for direction of fluid into two chambers with outlet and return ports, respectively |
| 07/31/1991 | EP0438570A1 Method of making a microvalve. |
| 07/09/1991 | US5029805 Valve arrangement of microstructured components |
| 07/03/1991 | EP0435237A1 Electrostatic miniature valve and method for its fabrication |
| 05/08/1991 | EP0425612A1 Micromechanical actuator. |
| 05/08/1991 | EP0309450B1 Micro-valve arrangement |
| 02/21/1991 | WO1991002169A1 Method of making a microvalve |
| 02/07/1991 | WO1991001464A1 Anti-return valve, particularly for micropump and micropump provided with such a valve |
| 01/10/1991 | WO1991000464A1 Semiconductor microactuator |
| 12/27/1990 | WO1990015933A1 Microvalve |
| 12/12/1990 | EP0401607A1 Method for manufacturing a microvalve and microvalve |
| 11/15/1990 | WO1990013750A1 Micromechanical actuator |
| 10/31/1990 | DE3914031A1 Mikromechanischer aktuator The micromechanical actuator |
| 10/30/1990 | US4966646 Method of making an integrated, microminiature electric-to-fluidic valve |
| 10/30/1990 | CA1275611C Silicon valve |
| 07/24/1990 | US4943032 Integrated, microminiature electric to fluidic valve and pressure/flow regulator |
| 07/03/1990 | CA1271140A1 Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| 06/14/1990 | WO1990006587A1 Micromechanic manipulator |
| 06/14/1990 | WO1990006470A1 Micromachined valve with polyimide film diaphragm |
| 06/13/1990 | DE3844669A1 Micromechanical device |
| 06/13/1990 | DE3841557A1 Mikromechanischer manipulator Micromechanical manipulator |
| 01/23/1990 | US4895500 Micromechanical non-reverse valve |
| 12/12/1989 | US4885830 Process of producing a valve element |
| 11/02/1989 | EP0339528A1 Valve structure from microstructured components |
| 10/05/1989 | WO1989009477A1 Micromechanical device |
| 10/05/1989 | DE3809597A1 Mikromechanisches stellelement Micromechanical adjusting element |
| 09/26/1989 | US4869282 Micromachined valve with polyimide film diaphragm |
| 05/03/1989 | EP0314286A1 A silicon valve assembly for controlling the flow of fluid |
| 05/03/1989 | EP0314285A1 A silicon valve assembly for controlling the flow of fluid |
| 05/02/1989 | US4826131 Electrically controllable valve etched from silicon substrates |
| 04/25/1989 | US4824073 Integrated, microminiature electric to fluidic valve |
| 04/18/1989 | US4821999 Valve element and process of producing the same |
| 04/18/1989 | US4821997 Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| 04/05/1989 | EP0309450A1 Micro-valve arrangement. |
| 09/13/1988 | US4770740 Method of manufacturing valve element for use in an ink-jet printer head |
| 09/06/1988 | US4768751 Silicon micromachined non-elastic flow valves |
| 07/27/1988 | EP0276156A2 Valve element and process of producing the same |
| 07/12/1988 | US4756508 Silicon valve |
| 03/30/1988 | EP0261972A2 Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator and method of making same |
| 01/14/1988 | DE3621332A1 Microvalve |
| 01/07/1988 | EP0250948A2 Microvalve |
| 12/03/1987 | WO1987007351A1 Micro-valve arrangement |
| 12/03/1987 | DE3618380A1 Mikroventilanordnung Micro-valve arrangement |
| 03/31/1987 | US4654676 Valve element for use in an ink-jet printer head |
| 03/03/1987 | US4647013 Silicon valve |
| 01/14/1987 | EP0208386A1 Silicon valve |
| 12/16/1986 | US4628576 For controlling fluid flow |
| 04/29/1986 | US4585209 Miniature valve and method of making same |
| 04/08/1986 | US4581624 Microminiature semiconductor valve |
| 11/06/1985 | EP0160463A2 Valve element for use in an ink-jet printer head |
| 12/11/1984 | US4487662 Electrodeposition method for check valve |
| 07/04/1984 | EP0112701A2 Valve element for use in an ink-jet printer head |
| 05/13/1980 | US4203128 Electrostatically deformable thin silicon membranes |