| Patents for C03B 20 - Processes specially adapted for the production of quartz or fused silica articles (2,756) |
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| 09/12/2002 | US20020124597 Method for production of silica glass using sol-gel process |
| 09/06/2002 | WO2002069054A1 Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
| 09/06/2002 | WO2002068350A1 Oxygen doping of silicon oxyfluoride glass |
| 09/04/2002 | EP0960074A4 Method for determining laser-induced compaction in fused silica |
| 08/27/2002 | US6438998 Ultrasonic dispersion apparatus for silica sol |
| 08/21/2002 | CN1365343A Systhetic quartz glass member, photolithography apparatus, and method for producing photolithography apparatus |
| 08/14/2002 | CN1364147A Method for producing quartz glass body |
| 08/08/2002 | WO2002060827A2 Method for quartz crucible fabrication |
| 08/07/2002 | EP1124766B1 Quartz glass plates with high refractive index homogeneity |
| 07/30/2002 | US6425168 Quartz glass jig for heat-treating semiconductor wafers and method for producing same |
| 07/25/2002 | US20020095873 Aqueous dispersions, process for their production, and their use |
| 07/23/2002 | US6423656 Synthetic quartz glass preform |
| 07/18/2002 | WO2002055443A2 Apparatus for silica crucible manufacture |
| 07/18/2002 | US20020092602 Quartz glass wafer support jig and method for producing the same |
| 07/17/2002 | EP1025054B1 Production of quartz glass articles having high surface purity |
| 07/10/2002 | CN1087362C Method for improving zero dislocation yield of single crystals |
| 07/09/2002 | US6415630 Method and device for producing a homogenous sheet of quartz glass without streaks |
| 07/03/2002 | CN1356277A Process for preparing high-strength antifatigue optical fibre |
| 07/02/2002 | US6413682 Synthetic quartz glass substrate for photomask and making method |
| 07/02/2002 | US6412306 Process for producing composite bodies from quartz material |
| 06/27/2002 | US20020082157 Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus |
| 06/25/2002 | US6410631 Silica particle in binder |
| 06/19/2002 | EP1214718A1 Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements |
| 06/13/2002 | WO2001094267A3 Method for heat treating synthetic quartz glass for optical use, heat treatment apparatus for the same, and synthetic quartz glass for optical use |
| 06/13/2002 | US20020069672 Method of producing a quartz glass tube and drill body for performing the method |
| 06/11/2002 | US6403508 Optical elements for lasers and in microlithography; silica glass where the concentration of silicon atoms bonded to three oxygen atoms and to one hydrogen atom and the amount of molecular hydrogen is controlled |
| 06/06/2002 | DE10058558A1 Production of a quartz glass body comprises controlling the distance between the deposition burner and deposition surface and maintaining the geometric shape of the deposition surface during deposition |
| 06/05/2002 | EP1210294A1 HIGHLY FILLED SiO 2? DISPERSION, METHODS FOR THE PRODUCTION THEREOF AND ITS USE |
| 06/04/2002 | US6399526 Heating using furnace tube; high purity for semiconductors |
| 05/29/2002 | EP1209129A2 Process and apparatus for producing a quartz glass article |
| 05/22/2002 | EP1207141A1 Synthetic quartz glass member, photolithography apparatus, and method for producing photolithography apparatus |
| 05/21/2002 | CA2248492C Silica glass composition and method for manufacturing silica glass using the same |
| 05/15/2002 | EP1204611A1 Synthetic quartz glass optical material and optical member for f 2? excimer lasers |
| 05/15/2002 | EP1204609A1 Method for producing a cylindrical component comprised of silica glass and a device suited therefor |
| 05/10/2002 | WO2002037144A1 Optical lithography and a method of inducing transmission in optical lithography preforms |
| 05/08/2002 | EP1203801A2 Aqueous dispersion, process for its production and use |
| 05/08/2002 | DE10054345A1 Wäßrige Dispersion, Verfahren zu deren Herstellung und Verwendung An aqueous dispersion, a process for their preparation and use |
| 05/07/2002 | US6381987 Process for making opaque quartz glass and opaque component made according to the process |
| 05/02/2002 | EP1202328A2 Quartz glass wafer support jig and method for producing the same |
| 05/01/2002 | CN1347393A Method for producing cylindrical component comprised of silica glass and device suited therefor |
| 04/30/2002 | US6380110 Process for making opaque quartz, for carrying out the process suitable SiO2 granulate, and component of opaque quartz glass |
| 04/30/2002 | US6379873 Method and apparatus for the construction of photosensitive waveguides |
| 04/23/2002 | US6374638 Fabrication method of graded index silica glass |
| 04/16/2002 | US6373554 Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus |
| 04/10/2002 | EP1194384A1 Method for producing a quartz glass body |
| 04/10/2002 | CN2485305Y Annular quartz tube maker |
| 04/10/2002 | CN1343639A Method for producing silica glass tube and bore rod body for carryinug out said method |
| 04/04/2002 | WO2001092609A3 Multilayered quartz glass crucible and method of its production |
| 04/04/2002 | US20020038557 Synthetic qurtz glass and method of production |
| 04/04/2002 | DE10044163A1 Elektrophoretisch nachverdichtete SiO2-Formkörper, Verfahren zu ihrer Herstellung und Verwendung Electrophoretically recompressed SiO2-shaped bodies, processes for their preparation and use |
| 03/28/2002 | US20020037797 Fluorine-containing glass |
| 03/28/2002 | US20020036188 Method for determining laser-induced compaction in fused silica |
| 03/26/2002 | US6363098 Carbon electrode for melting quartz glass and method of fabricating thereof |
| 03/26/2002 | US6360563 Process for the manufacture of quartz glass granulate |
| 03/21/2002 | DE10138046A1 Glass used in the production of optical parts and materials for optical transmission media such as optical waveguides comprises silicon dioxide containing hydroxide groups, chlorine and fluorine |
| 03/20/2002 | EP1188723A1 Synthetic quartz glass and method of production |
| 03/20/2002 | CN1341080A Quartz glass crucible and method for production thereof |
| 03/14/2002 | WO2002020424A1 Electrophoretically redensified sio2 moulded body, method for the production and use thereof |
| 03/14/2002 | US20020030446 SiO2 -glass bulb with at least one current lead-in, process for producing a gas-tight connection between them, and their use in a gas-discharge lamp |
| 03/14/2002 | US20020029737 Quartz glass crucible for pulling up silicon single crystal and production method therefor |
| 03/13/2002 | EP1186576A2 Process of manufacturing a quartz glass tube and drill for carrying out the process |
| 03/13/2002 | EP0850202A4 Boule oscillation patterns for producing fused silica glass |
| 03/07/2002 | US20020026809 Fabrication method of graded index silica glass |
| 03/06/2002 | EP1184350A1 Process of production of SiO2-TiO2 glasses with a low thermal expansion |
| 03/06/2002 | CN1339072A Tungsten doped crucible and method for preparing same |
| 03/05/2002 | US6351972 Synthetic fused silica member, method for producing the same and optical member for excimer laser |
| 02/20/2002 | CN1336903A Method for producing a quartz glass body and holding element made of quartz glass |
| 02/07/2002 | US20020014091 Method and apparatus for minimizing air infiltration in the production of fused silica glass |
| 02/06/2002 | EP1178519A1 Quartz vessel with at least one current feedthrough, method of manufacturing a gastight connection between the two, and its application in a gas discharge lamp |
| 02/06/2002 | EP1177092A1 Silice glass honeycomb structure from silica soot extrusion |
| 02/05/2002 | US6343490 Processing entailing sol-gel fabrication of silica glass |
| 01/31/2002 | WO2002008129A1 Method for the vitrification of a porous soot body |
| 01/30/2002 | CN1333075A Guartz filter and making method thereof |
| 01/23/2002 | CN1332703A Tantala doped optical waveguide and method of manufacture |
| 01/22/2002 | US6339940 Synthetic quartz glass manufacturing process |
| 01/17/2002 | WO2002004368A1 Method and device for producing rotationally symmetrical quartz glass crucibles |
| 01/16/2002 | EP1171799A1 Projection lithography photomask blanks, preforms and method of making |
| 01/10/2002 | US20020002843 Method for manufacturing quartz glass ingot and a manufacturing apparatus |
| 01/09/2002 | CN1330037A One-component sol-gel technique |
| 01/03/2002 | DE10033632C1 Vorrichtung zur Herstellung rotationssymmetrischer Quarzglastiegel An apparatus for producing rotationally symmetrical quartz glass crucible |
| 12/27/2001 | US20010055826 Method for manufacturing optical element, optical element, optical system using optical element, optical apparatus and exposure apparatus using optical system, and method for manufacturing device |
| 12/25/2001 | US6333284 As substrate for photomask |
| 12/20/2001 | DE10038841C1 Silicon dioxide glass bulb used in a high power discharge lamp has a current duct made from a gas-tight composite material consisting of a precious metal and silicon dioxide |
| 12/19/2001 | EP1164629A1 Exposure apparatus, semiconductor device, and photomask |
| 12/13/2001 | WO2001094268A1 Method for producing a full cylinder from quartz glass |
| 12/13/2001 | WO2001094267A2 Method for heat treating synthetic quartz glass for optical use, heat treatment apparatus for the same, and synthetic quartz glass for optical use |
| 12/06/2001 | WO2001092609A2 Multilayered quartz glass crucible and method of its production |
| 12/06/2001 | WO2001092176A1 Fused silica with constant induced absorption |
| 12/06/2001 | WO2001092175A1 Synthetic quartz glass optical material and optical member for f2 excimer lasers |
| 12/06/2001 | WO2001092170A1 Method for preparing quartz glass crucible |
| 12/06/2001 | WO2001092169A1 Method for producing quartz glass crucible |
| 12/06/2001 | DE10044715C1 Production of a quartz glass tube comprises using a drilling body having a drill head having a contact surface with a convex curvature facing the quartz cylinder continuously rotating in a heating zone |
| 12/06/2001 | DE10025176A1 Verfahren für die Herstellung einer optischen Faser und Vorform für eine optische Faser A method for producing an optical fiber preform for an optical fiber and |
| 12/05/2001 | EP1160209A2 Method and apparatus for manufacturing quartz glass ingot |
| 12/05/2001 | EP1160208A2 Quartz fusion crucible |
| 12/05/2001 | EP1159227A1 Quartz glass crucible and method for the production thereof |
| 12/05/2001 | CN1324773A Quartz-smelting furnace |
| 11/29/2001 | WO2001090010A1 Method for producing an optical fibre and blank for an optical fibre |
| 11/29/2001 | DE19962452A1 Verfahren für die Herstellung von opakem Quarzglas und nach dem Verfahren hergestelltes opakes Bauteil A process for the production of opaque quartz glass and an opaque component produced by the process |
| 11/28/2001 | EP1156988A1 Method of making silica glass honeycomb structure from silica soot extrusion |