Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 1 - Devices without movable or flexible elements, e.g. micro-capillary devices
Patents for B81B 1 - Devices without movable or flexible elements, e.g. micro-capillary devices (5,283)
12/1997
12/16/1997US5698299 Thin laminated microstructure with precisely aligned openings
12/10/1997CN1167520A Electroformed multilayer spray director and a process for the preparation thereof
12/03/1997EP0810659A2 Semiconductor packaging apparatus and method
12/02/1997US5693113 Container gripper apparatus
11/1997
11/27/1997WO1997044692A2 Fabrication of small-scale coils and bands as photomasks on optical fibers for generation of in-fiber gratings, electromagnets as micro-nmr coils, microtransformers, and intra-vascular stents
11/25/1997US5690841 Method of producing cavity structures
11/12/1997EP0805994A2 Miniature mounting device
11/11/1997US5685491 Fluid dispersant unit
10/1997
10/15/1997EP0800643A1 Fabry-perot micro filter-detector
10/14/1997US5676998 Thin film magnet, cylindrical ferromagnetic thin film and production method thereof
10/14/1997US5676983 A base plate with rough surface having plural microstructure projections; accuracy shaping
10/01/1997EP0738306B1 Method of producing microchannel/microcavity structures
09/1997
09/12/1997WO1997033192A1 Optical multi-channel separating filter with electrically adjustable photon crystals
09/11/1997DE19610656A1 Optische Mehrwege-Weiche mit elektrisch einstellbaren Photonenkristallen Optical multichannel crossover with electrically adjustable photonic crystals
09/09/1997US5666190 Method of performing lithography using cantilever array
09/09/1997US5666000 Microcavity capacitive device
09/02/1997US5662814 Micro-machining minute hollow using native oxide membrane
08/1997
08/26/1997US5660680 Method for fabrication of high vertical aspect ratio thin film structures
08/19/1997US5658413 Miniaturized planar columns in novel support media for liquid phase analysis
08/06/1997EP0787216A1 Shape memory alloy electro-mechanical system
07/1997
07/29/1997US5651900 Microfabricated particle filter
07/29/1997US5651898 Field emission cold cathode and method for manufacturing the same
07/16/1997EP0784338A2 Process for manufacturing trenches or holes side by side
07/09/1997EP0783108A1 Micromechanical element with planarized cover over a cavity and method of fabrication
07/08/1997US5645684 Microelectromechanical systems, electronic circuits and mechanical devices integrated on the same chip
06/1997
06/24/1997US5641400 Use of temperature control devices in miniaturized planar column devices and miniaturized total analysis systems
06/11/1997EP0527980B1 Method of manufacture of a composite body consisting of microsieves
06/10/1997US5637984 Pseudo-mechanical system incorporating ohmic electromechanical transducer and electrical generator
05/1997
05/28/1997EP0775304A1 Method of producing cavity structures
05/21/1997EP0774115A2 Printed fluid transport devices
05/15/1997WO1997017302A1 Field-assisted sealing
05/15/1997CA2236788A1 Field-assisted sealing
05/07/1997CN1149138A Improved method for manufacturing array of thin film actuated mirrors
05/02/1997EP0770871A2 Use of temperature control devices in miniaturized planar column devices and miniaturized total analysis systems
04/1997
04/08/1997US5618760 Method of etching a pattern on a substrate using a scanning probe microscope
04/03/1997WO1997012030A1 Apparatus and methods for active programmable matrix devices
04/03/1997CA2233238A1 Apparatus and methods for active programmable matrix devices
03/1997
03/26/1997EP0764346A1 High vertical aspect ratio thin film structures
03/26/1997EP0764214A1 Bioarray chip reaction apparatus and its manufacture
03/18/1997US5611942 Method for producing tips for atomic force microscopes
03/06/1997DE19600782C1 Forming adjacent channels or holes in semiconductor substrate, for application of masking layer
02/1997
02/19/1997EP0749352A4 Microfabricated particle filter
02/18/1997US5604081 Method for producing a surface structure with reliefs
02/05/1997EP0757372A1 Field emission display fabrication method
01/1997
01/09/1997WO1997000726A1 Silicon-based sleeve devices for chemical reactions
01/02/1997EP0751415A2 Mechanical fiber optic switch
12/1996
12/31/1996US5589136 Silicon-based sleeve devices for chemical reactions
12/31/1996US5588597 Nozzle plate for a liquid jet print head
12/27/1996EP0749474A1 Microfabricated capsules for isolation of cell transplants
12/27/1996EP0749352A1 Microfabricated particle filter
12/19/1996WO1996041368A1 Multilayer high vertical aspect ratio thin film structures
12/19/1996WO1996040420A1 Micromachined porous membranes with bulksupport
12/17/1996US5585961 Photostrictive device
12/17/1996US5585689 Field-emission cathode having integrated electrical interconnects and electron tube using the same
11/1996
11/26/1996US5579179 Method for manufacturing an array of thin film actuated mirrors
11/20/1996EP0734282A4 Miniaturized planar columns for use in a liquid phase separation apparatus
11/20/1996EP0734281A4 Miniaturized planar columns in novel support media for liquid phase analysis
11/19/1996US5576147 Formation of microstructures using a preformed photoresist sheet
11/05/1996US5571410 Fully integrated miniaturized planar liquid sample handling and analysis device
10/1996
10/23/1996EP0738306A1 Method of producing microchannel/microcavity structures
10/02/1996EP0734282A1 Miniaturized planar columns for use in a liquid phase separation apparatus
10/02/1996EP0734281A1 Miniaturized planar columns in novel support media for liquid phase analysis
10/02/1996EP0584233A4 Methods of fabricating integrated, aligned tunneling tip pairs
09/1996
09/26/1996WO1996023238A3 Miniature mounting device
09/26/1996WO1996022460A3 Electroformed multilayer spray director and a process for the preparation thereof
09/18/1996EP0732603A2 Optical fiber alignment
08/1996
08/27/1996US5550373 Fabry-Perot micro filter-detector
08/21/1996EP0727814A1 Scanning probe for investigating electronic, magnetic and topographic structures of the order of sub-micron resolution and method of fabricating the same
08/01/1996WO1996023238A2 Miniature mounting device
08/01/1996CA2211616A1 Miniature mounting device
07/1996
07/25/1996WO1996022460A2 Electroformed multilayer spray director and a process for the preparation thereof
07/25/1996CA2205801A1 Electroformed multilayer spray director and a process for the preparation thereof
07/16/1996US5536988 Compound stage MEM actuator suspended for multidimensional motion
07/11/1996WO1996021140A1 Fabry-perot micro filter-detector
07/11/1996CA2205875A1 Fabry-perot micro filter-detector
06/1996
06/20/1996WO1996005510A3 Printed fluid transport devices
06/18/1996US5528724 Apparatus and method for aligning optical fibers with respect to one another
05/1996
05/30/1996DE4442023A1 Aperture formation with specific exit opening in silicon wafer
05/14/1996US5517280 Photolithography system
05/07/1996US5514832 Microcavity structures, fabrication processes, and applications thereof
05/07/1996US5514150 Micromachined conveyor devices
05/02/1996WO1996012828A1 Shape memory alloy electro-mechanical system
05/02/1996WO1996012546A1 Miniaturized planar columns for use in a liquid phase separation apparatus
05/02/1996WO1996012545A1 Miniaturized planar columns in novel support media for liquid phase analysis
04/1996
04/30/1996US5512161 Impressing metal stamp into surface coated with electrically conductive material; forming isolated conductive spangles on front surface
04/24/1996EP0708331A1 Fully integrated miniaturized planar liquid sample handling and analysis device
04/24/1996EP0708330A1 Low voltage miniaturized column analytical apparatus and method
04/24/1996EP0662163B1 Process for galvanically forming structured plate-shaped bodies
04/23/1996US5509309 Acceleration measuring device
04/17/1996EP0646188B1 Process and tool for producing a microstructured plastic layer
04/16/1996US5508234 Microcavity structures, fabrication processes, and applications thereof
04/09/1996US5506175 Method of forming compound stage MEM actuator suspended for multidimensional motion
04/03/1996EP0704731A2 Optical semiconductor module & method for manufacturing the same
03/1996
03/26/1996US5501784 Process for producing microstructure metallic elements
03/19/1996US5500071 Miniaturized planar columns in novel support media for liquid phase analysis
03/05/1996US5496668 Formation of microstructures using a preformed photoresist sheet
02/1996
02/22/1996WO1996005510A2 Printed fluid transport devices
02/22/1996CA2197061A1 Printed fluid transport devices
02/20/1996US5493173 Field emission cold cathode and method for manufacturing the same
02/07/1996EP0695941A2 Method and apparatus for packaging a chip
1 ... 42 43 44 45 46 47 48 49 50 51 52 53